JPH0364938U - - Google Patents
Info
- Publication number
- JPH0364938U JPH0364938U JP12536089U JP12536089U JPH0364938U JP H0364938 U JPH0364938 U JP H0364938U JP 12536089 U JP12536089 U JP 12536089U JP 12536089 U JP12536089 U JP 12536089U JP H0364938 U JPH0364938 U JP H0364938U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- storage container
- suction
- suction part
- support part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 230000032258 transport Effects 0.000 claims 3
- 238000001179 sorption measurement Methods 0.000 description 2
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12536089U JPH0364938U (nl) | 1989-10-26 | 1989-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12536089U JPH0364938U (nl) | 1989-10-26 | 1989-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0364938U true JPH0364938U (nl) | 1991-06-25 |
Family
ID=31673234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12536089U Pending JPH0364938U (nl) | 1989-10-26 | 1989-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0364938U (nl) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6169144A (ja) * | 1984-09-12 | 1986-04-09 | Nec Corp | ウエハプロ−バ |
-
1989
- 1989-10-26 JP JP12536089U patent/JPH0364938U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6169144A (ja) * | 1984-09-12 | 1986-04-09 | Nec Corp | ウエハプロ−バ |