JPH0186230U - - Google Patents
Info
- Publication number
- JPH0186230U JPH0186230U JP18140587U JP18140587U JPH0186230U JP H0186230 U JPH0186230 U JP H0186230U JP 18140587 U JP18140587 U JP 18140587U JP 18140587 U JP18140587 U JP 18140587U JP H0186230 U JPH0186230 U JP H0186230U
- Authority
- JP
- Japan
- Prior art keywords
- wafer boat
- tube
- cantilever tube
- cantilever
- support arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18140587U JPH0186230U (nl) | 1987-11-28 | 1987-11-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18140587U JPH0186230U (nl) | 1987-11-28 | 1987-11-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0186230U true JPH0186230U (nl) | 1989-06-07 |
Family
ID=31472889
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18140587U Pending JPH0186230U (nl) | 1987-11-28 | 1987-11-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0186230U (nl) |
-
1987
- 1987-11-28 JP JP18140587U patent/JPH0186230U/ja active Pending