JPH0364715B2 - - Google Patents
Info
- Publication number
- JPH0364715B2 JPH0364715B2 JP11184883A JP11184883A JPH0364715B2 JP H0364715 B2 JPH0364715 B2 JP H0364715B2 JP 11184883 A JP11184883 A JP 11184883A JP 11184883 A JP11184883 A JP 11184883A JP H0364715 B2 JPH0364715 B2 JP H0364715B2
- Authority
- JP
- Japan
- Prior art keywords
- diameter
- members
- buttful
- buffle
- cryopump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007423 decrease Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11184883A JPS606087A (ja) | 1983-06-23 | 1983-06-23 | クライオポンプにおけるバツフル装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11184883A JPS606087A (ja) | 1983-06-23 | 1983-06-23 | クライオポンプにおけるバツフル装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS606087A JPS606087A (ja) | 1985-01-12 |
| JPH0364715B2 true JPH0364715B2 (ko) | 1991-10-08 |
Family
ID=14571677
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11184883A Granted JPS606087A (ja) | 1983-06-23 | 1983-06-23 | クライオポンプにおけるバツフル装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS606087A (ko) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1050681A4 (en) | 1998-01-22 | 2006-10-11 | Ebara Corp | TRAP AND CASE SYSTEM |
| JP6057782B2 (ja) * | 2013-03-05 | 2017-01-11 | 住友重機械工業株式会社 | クライオポンプ |
-
1983
- 1983-06-23 JP JP11184883A patent/JPS606087A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS606087A (ja) | 1985-01-12 |
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