JPH036362A - Surface treatment for stainless steel by ion implantation method - Google Patents
Surface treatment for stainless steel by ion implantation methodInfo
- Publication number
- JPH036362A JPH036362A JP13930089A JP13930089A JPH036362A JP H036362 A JPH036362 A JP H036362A JP 13930089 A JP13930089 A JP 13930089A JP 13930089 A JP13930089 A JP 13930089A JP H036362 A JPH036362 A JP H036362A
- Authority
- JP
- Japan
- Prior art keywords
- stainless steel
- ions
- ion implantation
- surface treatment
- implanted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910001220 stainless steel Inorganic materials 0.000 title claims abstract description 108
- 239000010935 stainless steel Substances 0.000 title claims abstract description 107
- 238000000034 method Methods 0.000 title claims abstract description 43
- 238000004381 surface treatment Methods 0.000 title abstract description 29
- 238000005468 ion implantation Methods 0.000 title abstract description 28
- 150000002500 ions Chemical class 0.000 claims abstract description 60
- 239000007789 gas Substances 0.000 claims abstract description 54
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 20
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 19
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 16
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 8
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 abstract description 10
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 abstract description 7
- 150000001875 compounds Chemical class 0.000 abstract description 4
- 229910021529 ammonia Inorganic materials 0.000 abstract description 2
- 239000000203 mixture Substances 0.000 abstract description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 230000000052 comparative effect Effects 0.000 description 16
- 238000010884 ion-beam technique Methods 0.000 description 14
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 13
- 239000010936 titanium Substances 0.000 description 9
- 238000005259 measurement Methods 0.000 description 8
- 230000003287 optical effect Effects 0.000 description 8
- 239000002344 surface layer Substances 0.000 description 8
- 241001422033 Thestylus Species 0.000 description 7
- 238000005299 abrasion Methods 0.000 description 7
- 238000007796 conventional method Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 229910052796 boron Inorganic materials 0.000 description 4
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000010998 test method Methods 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- -1 acetylene hydrocarbon Chemical class 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Natural products C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、イオン注入法によるステンレス鋼の表面処理
法に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method for surface treatment of stainless steel by ion implantation.
（従来の技術）
従来、この種のイオン注入法によるステンレス鋼の表面
処理法として、第５図示のようなイオン注入室ａ内の一
方にステンレス鋼すを保持する基板ホルダー〇を配置し
、他方にイオンを発生させるイオン源と、該イオンを加
速させる加速器を備えたイオンビーム源ｄを配置した装
置を用い、ステンレス鋼に耐摩耗性を向上させるＣ、Ｎ
、Ｂ、Ｔｉ、Ｔａ等の元素、或いは該元素を含む化合物
からイオンビーム源ｄのイオン源で必要元素のイオンを
発生させ、該イオンを加速器で例えば３００ｋｅＶの高
エネルギに加速し、加速されたイオンビームを、基板ホ
ルダー〇に保持され、例えば冷却水の温度十数℃に冷却
されたステンレス鋼すに注入（矢印ｅ方向）して該ステ
ンレス鋼の表面処理する処理法が知られている。(Prior Art) Conventionally, as a surface treatment method for stainless steel using this type of ion implantation method, a substrate holder 〇 for holding a stainless steel plate is placed in one side of the ion implantation chamber a as shown in Figure 5, and the other side is Using a device equipped with an ion beam source d equipped with an ion source that generates ions and an accelerator that accelerates the ions, C and N, which improve the wear resistance of stainless steel, are used.
, B, Ti, Ta, etc., or a compound containing the element, the ion source of the ion beam source d generates ions of the necessary element, and the ions are accelerated to a high energy of, for example, 300 keV by an accelerator. A processing method is known in which an ion beam is injected (in the direction of arrow e) into a stainless steel plate held by a substrate holder 0 and cooled to, for example, a cooling water temperature of 10-odd degrees Celsius, thereby treating the surface of the stainless steel plate.
また、ステンレス鋼に耐摩耗性を向上させるため該ステ
ンレス鋼へ注入するイオンに２種類以上の元素を用いる
場合には、夫々の元素について前記イオン注入を縁り返
し行っている。Further, when two or more types of elements are used as ions to be implanted into stainless steel in order to improve its wear resistance, the ion implantation is repeated for each element.
（発明が解決しようとする課題）
しかしながら、前′記従来のイオン注入法によるステン
レス鋼の表面処理法は、ステンレス鋼に耐摩耗性を向上
させるための元素を全てイオンにしてからステンレス鋼
に注入する必要があるため、２種類以上の元素を必要と
する場合は、ステンレス鋼に対して各元素毎にイオン注
入する必要があり処理効率が悪く、またステンレス鋼に
注入するイオン量を１ ｘ １０ ”Ｊｏｎｓ／ ｃＪ
以上と多量に必要とする問題がある。(Problem to be Solved by the Invention) However, in the conventional ion implantation method for surface treatment of stainless steel, all elements for improving the wear resistance of stainless steel are ionized and then implanted into the stainless steel. Therefore, if two or more types of elements are required, ions must be implanted for each element into stainless steel, resulting in poor processing efficiency. ”Jons/ cJ
There is a problem in that a large amount is required.
また、更にステンレス鋼の耐摩耗性を向上させる表面処
理法が要求されている。Additionally, there is a need for a surface treatment method that further improves the wear resistance of stainless steel.
本発明は、前記問題点を解消し、更にステンレス鋼の耐
摩耗性を向上させるイオン注入法によるステンレス鋼の
表面処理法を提供することを目的とする。SUMMARY OF THE INVENTION An object of the present invention is to provide a method for surface treatment of stainless steel by ion implantation, which solves the above-mentioned problems and further improves the wear resistance of stainless steel.
（課題を解決するための手段）
本発明は、前記目的を達成するイオン注入法によるステ
ンレス鋼の表面処理法を提案するもので、ステンレス鋼
にイオンを注入してステンレス鋼の表面処理を行う方法
において、イオンの注入を窒素を含むガス雰囲気中で行
うことを特徴とする。(Means for Solving the Problems) The present invention proposes a method for surface treatment of stainless steel by ion implantation that achieves the above object, and is a method for surface treatment of stainless steel by implanting ions into stainless steel. The method is characterized in that ion implantation is performed in a gas atmosphere containing nitrogen.
窒素を含むガス雰囲気中でイオンを注入する本表面処理
法は、５ＵＳ３０４に代表される低炭素含有量であって
比較的軟らかなステンレス鋼に適している。This surface treatment method of implanting ions in a nitrogen-containing gas atmosphere is suitable for relatively soft stainless steel with a low carbon content, such as 5US304.
本表面処理法で用いる窒素を含むガスとしては、窒素（
Ｎ２）単独ガス、アンモニア（ＮＨ３）ガス等が挙げら
れる。また、窒素を含むガス雰囲気中でイオンを注入す
る際の該ガス圧力は、一般には５Ｘ１０−’〜３×１０
Ｐａ程度に設定する。The nitrogen-containing gas used in this surface treatment method is nitrogen (
Examples include N2) gas alone, ammonia (NH3) gas, and the like. Furthermore, the gas pressure when implanting ions in a nitrogen-containing gas atmosphere is generally 5 x 10-' to 3 x 10
Set to about Pa.
また、窒素を含むガス雰囲気中でステンレス鋼に注入す
るイオンとしては、ホウ素（Ｂ＋）チタン（Ｔｉ＋）、
窒素（Ｎ”）、炭素（Ｃ＋）等が挙げられる。また、ス
テンレス鋼に注入するイオン量は例えば５ＵＳ３０４ス
テンレス鋼の場合、Ｎ２ガス雰囲気中で５ ｘ １０１
５ｉｏｎｓ／ｃＪ −Ｉ Ｘ １０ ’ ７ｊｏｎｓ／
ａｔ程度とする。Ions to be implanted into stainless steel in a nitrogen-containing gas atmosphere include boron (B+), titanium (Ti+),
Nitrogen (N"), carbon (C+), etc. can be mentioned. Also, the amount of ions implanted into stainless steel is, for example, 5 x 101 in the case of 5US304 stainless steel in an N2 gas atmosphere.
5ions/cJ-I X 10' 7jons/
It should be about at.
また、もう一つのイオン注入法によるステンレス鋼の表
面処理法は、ステンレス鋼にイオンを注入してステンレ
ス鋼の表面処理を行う方法において、イオンの注入を炭
素を含むガス雰囲気中で行うことを特徴とする。In addition, another method for surface treatment of stainless steel using ion implantation is a method for surface treatment of stainless steel by implanting ions into stainless steel, and the feature is that the ion implantation is performed in a gas atmosphere containing carbon. shall be.
炭素を含むガス雰囲気中でイオンを注入する本表面処理
法は、５ＵＳ４４０Ｃに代表される高炭素含有量であっ
て熱処理等を施して硬くして用いるステンレス鋼に適し
ている。This surface treatment method of implanting ions in a carbon-containing gas atmosphere is suitable for stainless steel that has a high carbon content, such as 5US440C, and is hardened by heat treatment or the like.
本表面処理法で用いる炭素を含むガスとしては、アセチ
レン系炭化水素（例えばＣ２Ｈ２）ガス、メタン系炭化
水素（例えばＣ３Ｈ８）ガス、芳香族系炭化水素（例え
ばＣｂ Ｎ５ ＣＨ３）ガス等が挙げられる。また、炭
素を含むガス雰囲気中でイオンを注入する際の該ガス圧
力は、一般には５Ｘ１０−’〜３Ｘ１０−’Ｐ’ａ程度
に設定する。Examples of the carbon-containing gas used in this surface treatment method include acetylene hydrocarbon (for example, C2H2) gas, methane hydrocarbon (for example, C3H8) gas, aromatic hydrocarbon (for example, Cb N5 CH3) gas, and the like. Further, the gas pressure when implanting ions in a gas atmosphere containing carbon is generally set to about 5X10-' to 3X10-'P'a.
また、炭素を含むガス雰囲気中でステンレス鋼に注入す
るイオンとしては、チタン（Ｔｉ＋）タンタル（Ｔａ”
）、ホウ素（Ｂ” ）、タングステン（Ｗ”）等が挙げ
られる。また、ステンレス鋼に注入するイオン量は例え
ば５ＵＳ４４０Ｃステンレス鋼の場合、アセチレン（Ｃ
２Ｈ２）ガス雰囲気中で５ Ｘ １０ ’５ｊｏｎｓ／
Ｃ♂〜Ｉ Ｘ １０ ’Ｊｏｎｓ／ ｃ♂程度とする。In addition, the ions to be implanted into stainless steel in a gas atmosphere containing carbon include titanium (Ti+), tantalum (Ta"
), boron (B"), tungsten (W"), etc. In addition, the amount of ions implanted into stainless steel is, for example, in the case of 5US440C stainless steel, acetylene (C
2H2) 5 x 10'5jons/in gas atmosphere
It should be about C♂~I x 10' Jons/c♂.
（作 用）
窒素を含むガス、或いは炭素を含むガスがステンレス鋼
の表面に吸着し、同時に注入された高速のイオンビーム
により、その一部はスパッタリング作用により該表面か
ら離脱するが、はとんどがイオンビームと共にステンレ
ス鋼表面層内部に取り込まれる。これらイオンビームま
たはガスの形でステンレス鋼の表面に導入された元素は
相互に或いはステンレス鋼内の元素と反応して、ステン
レス鋼表面層近傍にＢＮＴｉＮ、Ｔｉｃ、ＴａＣ等の非
晶質または結晶質の化合物相または混合相を形成する。(Function) Nitrogen-containing gas or carbon-containing gas is adsorbed on the surface of stainless steel, and at the same time, due to the high-speed ion beam injected, some of it leaves the surface due to sputtering action, but very little of it separates from the surface. The ions are taken into the stainless steel surface layer along with the ion beam. These elements introduced to the surface of stainless steel in the form of an ion beam or gas react with each other or with elements within the stainless steel, forming amorphous or crystalline materials such as BNTiN, Tic, TaC, etc. in the vicinity of the stainless steel surface layer. form a compound phase or a mixed phase.
（実施例）
以下添付図面に従って本発明の実施例について説明する
。(Example) Examples of the present invention will be described below with reference to the accompanying drawings.
第１図は本発明表面処理法を実施する１例を示すもので
、図中、１はイオン注入室を示す。FIG. 1 shows an example of implementing the surface treatment method of the present invention, and in the figure, 1 indicates an ion implantation chamber.
該イオン注入室］内を外部の真空ポンプその他の真空排
気系２に圧力調節弁３を介して接続すると共に、該イオ
ン注入室１内に表面処理すべきステンレス鋼４を保持す
る基板ホルダー５を配置した。また、該イオン注入室１
内の他方に前記基板ホルダー５に保持されたステンレス
鋼４に対向させて窒素を含むガス、或いは炭素を含むガ
スを噴射するノズル６と、イオンを発生させるイオン源
と、該イオンを加速させる加速器を備えたイオンビーム
源７を配置した。そして真空排気系２を作動させてイオ
ン注入室１内を所定の真空度に設定し、窒素を含むガス
、或いは炭素を含むガスのガス供給源（図示せず）に連
なるマスフローコントローラー８によって常に前記雰囲
気ガスの所定量をノズル６からイオン注入室１内に導入
（矢印９方向）し、イオン注入室１内を前記ガス雰囲気
下にすると共に、ステンレス鋼４に注入すべき元素をイ
オンビーム源７で数１０ｋｅ■〜数１００ｋｅＶの高エ
ネルギーに加速されたイオンビームとし、該イオンビー
ムをステンレス鋼４に注入（矢印１０方向）出来るよう
にした。The inside of the ion implantation chamber is connected to an external vacuum pump or other evacuation system 2 via a pressure control valve 3, and a substrate holder 5 for holding the stainless steel 4 to be surface-treated is installed inside the ion implantation chamber 1. Placed. In addition, the ion implantation chamber 1
A nozzle 6 for injecting a nitrogen-containing gas or a carbon-containing gas toward the stainless steel 4 held by the substrate holder 5 on the other side, an ion source for generating ions, and an accelerator for accelerating the ions. An ion beam source 7 equipped with the following was arranged. Then, the vacuum evacuation system 2 is operated to set the inside of the ion implantation chamber 1 to a predetermined degree of vacuum, and the mass flow controller 8 connected to a gas supply source (not shown) of nitrogen-containing gas or carbon-containing gas is used to constantly maintain the vacuum level in the ion implantation chamber 1. A predetermined amount of atmospheric gas is introduced into the ion implantation chamber 1 from the nozzle 6 (in the direction of the arrow 9) to bring the inside of the ion implantation chamber 1 under the gas atmosphere, and the elements to be implanted into the stainless steel 4 are introduced into the ion beam source 7. The ion beam was accelerated to a high energy of several 10 keV to several 100 keV, and the ion beam could be implanted into the stainless steel 4 (in the direction of arrow 10).
次に、前記装置を用いて窒素を含むガス雰囲気中でイオ
ンを注入する表面処理法の場合の具体的実施例を比較例
と共に説明する。Next, a specific example of a surface treatment method in which ions are implanted in a nitrogen-containing gas atmosphere using the above-mentioned apparatus will be described together with a comparative example.
実施例１
先ず、イオン注入室１内の基板ホルダー５に厚さ２ ｍ
ｍの材質５ＵＳ３０４ステンレス鋼４を保持した状態で
該イオン処理室１内の圧力を真空排気系２を介してｌＸ
１Ｏ−５Ｐａに設定する。Example 1 First, a substrate holder 5 in the ion implantation chamber 1 is coated with a thickness of 2 m.
While holding the material 5 US304 stainless steel 4, the pressure inside the ion processing chamber 1 is increased to 1X via the vacuum evacuation system 2.
Set to 10-5Pa.
次に、ノズル６より窒素（Ｎ２）ガスを導入し、圧力調
整バルブ３を調整して、該イオン注入室１内の圧力を２
Ｘ１０−３Ｐａに保った状態で、イオンビーム源７で７
０１ｃ ｅ Ｖの高エネルギーに加速されたホウ素（Ｂ
＋）のイオンビームをイオン量Ｉ Ｘ １０ ’７ｉｏ
ｎｓ／ ｃｄで、注入時間１８分間ステンレス鋼４に注
入してステンレス鋼４の表面処理を行った。Next, nitrogen (N2) gas is introduced from the nozzle 6, and the pressure adjustment valve 3 is adjusted to reduce the pressure inside the ion implantation chamber 1 to 2.
7 with the ion beam source 7 while maintaining the pressure at X10-3Pa.
Boron (B
+) ion beam with ion amount I x 10 '7io
The surface of stainless steel 4 was treated by injecting it into stainless steel 4 at ns/cd for an injection time of 18 minutes.
そして、表面処理されたステンレス鋼４を圧力ＩＸ］、
０−３Ｐａの真空中でボールオンディスク試験法で擦り
、その表面に摩擦こんをつけた。Then, the surface-treated stainless steel 4 is heated under pressure IX],
It was rubbed using the ball-on-disc test method in a vacuum of 0-3 Pa, and abrasion was applied to the surface.
尚、ボールオンディスク試験法の試験条件は、材質５Ｕ
Ｓ４４０Ｃステンレス鋼から成る直径１０ｍｍのボール
ベアリングを用い、荷重は０．２ｋｇ、速度は２２ ａ
ｍ ／ ｓｅｅ、時間は５分間、回数は１５００回とし
た。In addition, the test conditions for the ball-on-disk test method are as follows: Material: 5U
A ball bearing with a diameter of 10 mm made of S440C stainless steel is used, the load is 0.2 kg, and the speed is 22 a.
m/see, time was 5 minutes, and number of times was 1500.
摩擦こんがつけられたステンレス鋼の表面を光学顕微鏡
（倍率２００倍）で観察し、その観察結果を第２図Ａに
示す。また、該表面を触針法で測定し、そのａｌ１１定
結果を第２図Ｂに示す。The surface of the friction-scorched stainless steel was observed using an optical microscope (200x magnification), and the observation results are shown in FIG. 2A. Further, the surface was measured by a stylus method, and the al11 determination results are shown in FIG. 2B.
比較例１
イオン注入室１内をＮ２ガスを導入せずに真空雰囲気と
し、また注入するＢ＋のイオン量を２ Ｘ １０１７ｉ
ｏｎｓ／ ｃｄとした以外は前記実施例１と同様の方法
でステンレス鋼の表面処理を行った。Comparative Example 1 The inside of the ion implantation chamber 1 was made into a vacuum atmosphere without introducing N2 gas, and the amount of B+ ions to be implanted was 2 x 1017i.
Stainless steel was surface treated in the same manner as in Example 1 except that ons/cd was used.
そして、表面処理されたステンレス鋼の表面に前記実施
例１と同様の方法で摩擦こんをつけた。Then, abrasion was applied to the surface of the surface-treated stainless steel in the same manner as in Example 1 above.
摩擦こんがつけられたステンレス鋼の表面を前記実施例
１と同様に光学顕微鏡で観察し、その観察結果を第２図
Ｃに示す。また、該表面を前記実施例１と同様に触針法
で測定し、その測定結果を第２図りに示す。The surface of the friction-scorched stainless steel was observed using an optical microscope in the same manner as in Example 1, and the observation results are shown in FIG. 2C. Further, the surface was measured by the stylus method in the same manner as in Example 1, and the measurement results are shown in the second figure.
比較例２
表面処理を全く行わなかった祠質５ＵＳ３０４ステンレ
ス鋼の表面に前記実施例１と同様の方法で摩擦こんをつ
けた。Comparative Example 2 The surface of abrasive 5US304 stainless steel, which had not been subjected to any surface treatment, was abraded in the same manner as in Example 1 above.
摩擦こんがつけられたステンレス鋼の表面を前記実施例
１と同様に光学顕微鏡で観察し、その観察結果を第２図
Ｅに示す。また、該表面を前記実施例１と同様に触針法
で測定し、その測定結果を第２図Ｆに示す。The surface of the friction-scorched stainless steel was observed using an optical microscope in the same manner as in Example 1, and the observation results are shown in FIG. 2E. Further, the surface was measured by the stylus method in the same manner as in Example 1, and the measurement results are shown in FIG. 2F.
第２図から明らかなように、窒素ガス雰囲気中でステン
レス鋼にＢ＋イオンを注入する本発明法の実施例１は、
単にＢ＋イオンを注入する従来法の比較例１、全く表面
処理を行わなかった比較例２に比して表面の摩擦こんの
荒れ（表面の凹凸形状）が極めて小さかった。従って本
発明法の実施例１は従来法の比較例１に比してステンレ
ス鋼の耐摩耗性が更に向上することが確認された。As is clear from FIG. 2, Example 1 of the present invention method, in which B+ ions are implanted into stainless steel in a nitrogen gas atmosphere,
Compared to Comparative Example 1, which was a conventional method in which B+ ions were simply implanted, and Comparative Example 2, in which no surface treatment was performed at all, the roughness of the friction burrs on the surface (surface irregularities) was extremely small. Therefore, it was confirmed that the wear resistance of stainless steel in Example 1 of the method of the present invention was further improved compared to Comparative Example 1 of the conventional method.
また、本発明の実施例１は従来法の比較例１に比してイ
オン量が少なくてもステンレス鋼の表面の耐摩耗性を向
上させることが出来る。Further, Example 1 of the present invention can improve the wear resistance of the surface of stainless steel even if the amount of ions is smaller than Comparative Example 1 of the conventional method.
次に前記装置を用いて炭素を含むガス雰囲気中でイオン
を注入する表面処理法の具体的実施例を比較例と共に説
明する。Next, a specific example of a surface treatment method in which ions are implanted in a carbon-containing gas atmosphere using the above-mentioned apparatus will be described together with a comparative example.
実施例２
先ず、イオン注入室１内の基板ホルダー５に厚さ５ ｍ
ｍの材質５ＵＳ４４０Ｃステンレス鋼４を保持した状態
で該イオン処理室１内の圧力を真空排気系２を介して６
Ｘ１０−５Ｐａに設定する。Example 2 First, a substrate holder 5 in the ion implantation chamber 1 is coated with a thickness of 5 m.
The pressure inside the ion processing chamber 1 is increased to 6 through the vacuum evacuation system 2 while holding the material 5 US440C stainless steel 4.
Set to X10-5Pa.
次に、ノズル６よりアセチレン（Ｃ２Ｈ２）ガスを流量
０．５ＳＣＣＭで導入し、圧力調整バルブ３を調整して
、該イオン注入室１内の圧力を６Ｘ１０−４Ｐａに保っ
た状態で、イオンビーム７で４０ｋｅＶの高エネルギー
に加速されたチタン（Ｔｉ”）のイオンビームをイオン
量５ Ｘ １０１５ｉｏｎｓ／ ｃａで、注入時間３分
間ステンレス鋼４に注入してステンレス鋼４の表面処理
を行った。Next, acetylene (C2H2) gas is introduced from the nozzle 6 at a flow rate of 0.5SCCM, and the pressure adjustment valve 3 is adjusted to maintain the pressure inside the ion implantation chamber 1 at 6X10-4Pa. A titanium (Ti'') ion beam accelerated to a high energy of 40 keV was injected into the stainless steel 4 at an ion dose of 5 x 1015 ions/ca for 3 minutes to perform surface treatment on the stainless steel 4.
そして、表面処理されたステンレス鋼４を圧力ｌＸ１Ｏ
−３Ｐａの真空中でボールオンディスク試験法で擦り、
その表面に摩擦こんをつけた。Then, the surface-treated stainless steel 4 was heated to a pressure of 1×10
Rub with ball-on-disk test method in a vacuum of -3 Pa,
I put a rub on the surface.
尚、ボールオンディスク試験法の試験条件は、材質５Ｕ
Ｓ４４００ステンレス鋼から成る直径１０ｎ＋ｍのボー
ルベアリングを用い、荷重は０，４ｋｇ、速度は２２ｃ
ｍ／ｓｅｅ、時間は２分間、回数は１２００回とした。In addition, the test conditions for the ball-on-disk test method are as follows: Material: 5U
Using ball bearings made of S4400 stainless steel with a diameter of 10n+m, the load is 0.4kg, and the speed is 22c.
m/see, time was 2 minutes, and number of times was 1200.
摩擦こんがつけられたステンレス鋼の表面を光学顕微鏡
（倍率５０倍）で観察し、その観察結果を第３図Ａに示
す。また、該表面を前記実施例１と同様に触針法で測定
し、その測定結果を第３図Ｂに示す。The surface of the friction-scorched stainless steel was observed using an optical microscope (50x magnification), and the observation results are shown in FIG. 3A. Further, the surface was measured by the stylus method in the same manner as in Example 1, and the measurement results are shown in FIG. 3B.
実施例３
ステンレス＠４に注入するイオンをタンタル］ ］
（Ｔａ”）とした以外は実施例２と同様の方法でステン
レス鋼４に表面処理を行った。Example 3 Stainless steel 4 was surface-treated in the same manner as in Example 2, except that the ions implanted into stainless steel 4 were tantalum] (Ta").
そして、表面処理されたステンレス鋼の表面に前記実施
例２と同様の方法で摩擦こんをつけた。Then, abrasion was applied to the surface of the surface-treated stainless steel in the same manner as in Example 2 above.
摩擦こんがつけられたステンレス鋼の表面を前記実施例
２と同様に光学顕微鏡で観察し、その観察結果を第３図
Ｃに示す。また、該表面を前記実施例１と同様に触針法
で測定し、その測定結果を第３図りに示す。The surface of the friction-scorched stainless steel was observed using an optical microscope in the same manner as in Example 2, and the observation results are shown in FIG. 3C. Further, the surface was measured by the stylus method in the same manner as in Example 1, and the measurement results are shown in the third figure.
実施例４
ステンレス鋼４に注入するイオンをタングテン（Ｗ＋）
とした以外は実施例２と同様の方法でステンレス鋼４に
表面処理を行った。Example 4 Tungten (W+) ions are implanted into stainless steel 4.
Stainless steel 4 was surface-treated in the same manner as in Example 2, except for the following.
そして、表面処理されたステンレス鋼の表面に前記実施
例２と同様の方法で摩擦こんをつけた。Then, abrasion was applied to the surface of the surface-treated stainless steel in the same manner as in Example 2 above.
摩擦こんがつけられたステンレス鋼の表面を前記実施例
２と同様に光学顕微鏡で観察し、その観察結果を第３図
Ｅに示す。また、該表面を２
前記実施例１と同様に触針法で測定し、その測定結果を
第３図Ｆに示す。The surface of the friction-scorched stainless steel was observed using an optical microscope in the same manner as in Example 2, and the observation results are shown in FIG. 3E. Further, the surface was measured by the stylus method in the same manner as in Example 1, and the measurement results are shown in FIG. 3F.
比較例３
表面処理を全く行わなかった材質Ｓ Ｕ Ｓ ４４ＤＣ
ステンレス鋼の表面に前記実施例２と同様の方法で摩擦
こんをつけた。Comparative Example 3 Material SUS 44DC without any surface treatment
Abrasion was applied to the surface of stainless steel in the same manner as in Example 2 above.
摩擦こんがつけられたステンレス鋼の表面を前記実施例
２と同様に光学顕微鏡で観察し、その観察結果を第３図
Ｇに示す。また、該表面を前記実施例１と同様に触針法
で測定し、その測定結果を第３図Ｈに示す。The surface of the friction-scorched stainless steel was observed using an optical microscope in the same manner as in Example 2, and the observation results are shown in FIG. 3G. Further, the surface was measured by the stylus method in the same manner as in Example 1, and the measurement results are shown in FIG. 3H.
比較例４
イオン処理室１内をＣ２Ｈ２ガスを導入せずに真空雰囲
気とし、また注入するＴａ＋のイオン量をＩ Ｘ １０
１７ｉｏｎｓ／ ｃｉとした以外は前記実施例２と同様
の方法でステンレス鋼の表面処理を行った。Comparative Example 4 The inside of the ion processing chamber 1 was made into a vacuum atmosphere without introducing C2H2 gas, and the amount of Ta+ ions to be implanted was I x 10
Stainless steel was surface treated in the same manner as in Example 2 except that the treatment rate was 17 ions/ci.
そして、表面処理されたステンレス鋼の表面に前記実施
例２と同様の方法で摩擦こんをつけた。Then, abrasion was applied to the surface of the surface-treated stainless steel in the same manner as in Example 2 above.
摩擦こんがつけられたステンレス鋼の表面を前記実施例
２と同様に光学顕微鏡で観察し、その観察結果を第３図
■に示す。また、該表面を前記実施例１と同様に触針法
で測定し、その測定結果を第３図Ｊに示す。The surface of the friction-scorched stainless steel was observed using an optical microscope in the same manner as in Example 2, and the observation results are shown in Figure 3 (3). Further, the surface was measured by the stylus method in the same manner as in Example 1, and the measurement results are shown in FIG. 3J.
第３図から明らかなように、炭素を含むガス雰囲気中で
ステンレス鋼にイオンを注入する本発明法の実施例２，
３．４は、全く表面処理を行わなかった比較例３、単に
Ｔａ＋イオンを注入する従来法の比較例４に比して表面
の摩擦こんの荒れ（表面の凹凸形状）が極めて小さかっ
た。従って本発明法の実施例２，３．４は従来法の比較
例４に比してステンレス鋼の耐摩耗性が更に向上するこ
とが確認された。As is clear from FIG. 3, Example 2 of the method of the present invention in which ions are implanted into stainless steel in a gas atmosphere containing carbon,
In Sample No. 3.4, the surface roughness of the friction ring (surface irregularity) was extremely small compared to Comparative Example 3, in which no surface treatment was performed, and Comparative Example 4, which was a conventional method in which Ta+ ions were simply implanted. Therefore, it was confirmed that Examples 2, 3, and 4 of the method of the present invention further improved the wear resistance of stainless steel compared to Comparative Example 4 of the conventional method.
また、本発明実施例２，３．４は従来法の比較例４に比
してイオン量が少なくてもステンレス鋼の耐摩耗性を向
上させることが出来る。In addition, Examples 2, 3, and 4 of the present invention can improve the wear resistance of stainless steel even if the amount of ions is smaller than Comparative Example 4 of the conventional method.
また、前記実施例３で表面処理を行ったステンレス鋼を
オージェ電子分光法によりその表面層の元素分布を測定
し、その結果を第４図に示す。尚、横軸はオージェ電子
分光法での測定の除用いたＡｒイオンのスパッタリング
時間を示す。これはステンレス鋼の表面からの深さ方向
に対応しており、スパッタリング時間１分間が深さ２ｎ
ｍに相応する。また、縦軸はステンレス鋼の表面からの
各深さにおけるステンレス鋼の各元素の組成比を示す。Further, the element distribution of the surface layer of the stainless steel subjected to the surface treatment in Example 3 was measured by Auger electron spectroscopy, and the results are shown in FIG. Note that the horizontal axis indicates the sputtering time of Ar ions, which was excluded from the measurement by Auger electron spectroscopy. This corresponds to the depth direction from the surface of stainless steel, and 1 minute of sputtering time corresponds to a depth of 2 nm.
Corresponds to m. Further, the vertical axis indicates the composition ratio of each element in the stainless steel at each depth from the surface of the stainless steel.
第４図から明らかなようにステンレス鋼の表面層付近に
炭素が多く含まれていることが分かる。これはＴａ＋イ
オン注入の際雰囲気ガスであるＣ ２ Ｈ２ガス即ち炭
素を含むガスより炭素が供給されたものであり、耐摩耗
性の向上に大きく関与していることを示している。As is clear from FIG. 4, it can be seen that a large amount of carbon is contained near the surface layer of the stainless steel. This indicates that carbon is supplied from C 2 H 2 gas, that is, a gas containing carbon, which is an atmospheric gas during Ta+ ion implantation, and is greatly involved in improving the wear resistance.
前記実施例では１種類の雰囲気ガス中で１種類のイオン
をステンレス鋼に注入する方法について説明したが、本
発明はこれに限定されるものではない。複数の雰囲気ガ
スを用いる場合については、例えばアンモニアガスとア
セチレンガスを雰囲気ガスとして供給し、Ｔｉ＋イオン
注入を行い、ステンレス鋼の表面層にＴ１ＣＮ ５
の形成を行えばよい。また、複数のイオンを用いる場合
については、例えばＴｉ＋イオンとＮ４イオンをアセチ
レン（Ｃ２Ｈ２）ガス雰囲気中で注入し、ステンレス鋼
の表面層にＴ１ＣＮの形成を行えばよい。また、複数の
雰囲気ガスと複数のイオンを組み合わせてステンレス鋼
にイオンを注入するようにしてもよい。Although the above embodiment describes a method of implanting one type of ion into stainless steel in one type of atmospheric gas, the present invention is not limited to this. When using a plurality of atmospheric gases, for example, ammonia gas and acetylene gas may be supplied as the atmospheric gases, Ti+ ions may be implanted, and T1CN 5 may be formed on the surface layer of stainless steel. Furthermore, in the case of using a plurality of ions, for example, Ti+ ions and N4 ions may be implanted in an acetylene (C2H2) gas atmosphere to form T1CN on the surface layer of stainless steel. Alternatively, ions may be implanted into stainless steel by combining a plurality of atmospheric gases and a plurality of ions.
（発明の効果）
このように本発明によるときは、窒素を含むガス雰囲気
中、或いは炭素を含むガス雰囲気中でステンレス鋼にイ
オンを注入するようにしたので、イオンビームまたはガ
スの形でステンレス鋼の表面に導入された元素は、相互
に或いはステンレス鋼内の元素と反応して、ステンレス
鋼表面層近傍に非晶質または結晶質の化合物相または混
合相が形成されるので、ステンレス鋼の耐摩耗性を向上
させることが出来、また、ステンレス鋼に２種類以上の
元素を導入する場合１種類の元素のイオンの注入だけで
表面処理が完了するので、従来法のような各元素毎のイ
第 ６
ンの注入を要しないから表面処理を効率よく行うことが
出来、かつ従来法に比して少ないイオン量でステンレス
鋼の耐摩耗性を向上させることが出来る等の効果を有す
る。(Effects of the Invention) According to the present invention, since ions are implanted into stainless steel in a gas atmosphere containing nitrogen or a gas atmosphere containing carbon, stainless steel can be implanted in the form of an ion beam or gas. The elements introduced to the surface of the stainless steel react with each other or with the elements in the stainless steel, forming an amorphous or crystalline compound phase or a mixed phase near the stainless steel surface layer, which reduces the durability of the stainless steel. Abrasion resistance can be improved, and when two or more types of elements are introduced into stainless steel, surface treatment can be completed by implanting ions of one type of element. Since no implantation is required, surface treatment can be carried out efficiently, and the wear resistance of stainless steel can be improved with a smaller amount of ions compared to conventional methods.
第１図は本発明イオン注入法によるステンレス鋼の表面
処理法を実施するための装置の１例の截面図、第２図Ａ
、Ｃ，Ｅおよび第３図Ａ。
Ｃ，Ｅ、Ｇ、Ｉは本発明実施例および比較例におけるス
テンレス鋼の摩擦こんのこん跡写真、第２図Ｂ、Ｄ、Ｆ
および第３図Ｂ、Ｄ、Ｆ、Ｈ。
Ｊは本発明実施例および比較例におけるステンレス鋼の
摩擦こんの触針法による表面形状特性線図、第４図は本
発明法で表面処理されたステンレス鋼のオージェ電子分
光法による表面層の元素分布の特性線図、第５図は従来
法のステンレス鋼の表面処理法を実施するための装置の
裁断面図である。
特開平３
６３６２ （６）
２
０．６
０
４
１．８（ｍｍ）
０２
０．６
０
４
１．８ （ｍｍ）
Ｏン
０．６
１．０
４
１．６（ｍｍ）
第
３図
０．２
６
０
１．４
１．８（ｍｍ）
０．２
０６
０
１．４
１、ｌｌ！＋（ｍｍ）Fig. 1 is a cross-sectional view of an example of an apparatus for carrying out the surface treatment method of stainless steel by the ion implantation method of the present invention, and Fig. 2A
, C, E and Figure 3A. C, E, G, I are photographs of friction pit marks on stainless steel in Examples and Comparative Examples of the present invention, Figure 2 B, D, F
and Figure 3 B, D, F, H. J is a characteristic diagram of the surface shape of the stainless steel in Examples and Comparative Examples of the present invention measured by the friction stylus method, and Figure 4 is the surface layer elements measured by Auger electron spectroscopy of the stainless steel surface-treated by the method of the present invention. The distribution characteristic diagram, FIG. 5, is a cross-sectional view of an apparatus for performing a conventional stainless steel surface treatment method. JP-A-3 6362 (6) 2 0.6 0 4 1.8 (mm) 02 0.6 0 4 1.8 (mm) On 0.6 1.0 4 1.6 (mm) Fig. 3 0 .2 6 0 1.4 1.8 (mm) 0.2 06 0 1.4 1,ll! +(mm)
Claims (2)
面処理を行う方法において、イオンの注入を窒素を含む
ガス雰囲気中で行うことを特徴とするイオン注入法によ
るステンレス鋼の表面処理法。1. A method for surface treating stainless steel by implanting ions into stainless steel, the method comprising implanting ions in a gas atmosphere containing nitrogen.
面処理を行う方法において、イオンの注入を炭素を含む
ガス雰囲気中で行うことを特徴とするイオン注入法によ
るステンレス鋼の表面処理法。2. A method for surface treating stainless steel by implanting ions into stainless steel, the method comprising implanting ions in a gas atmosphere containing carbon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13930089A JP2821903B2 (en) | 1989-06-02 | 1989-06-02 | Surface treatment of stainless steel by ion implantation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13930089A JP2821903B2 (en) | 1989-06-02 | 1989-06-02 | Surface treatment of stainless steel by ion implantation |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH036362A true JPH036362A (en) | 1991-01-11 |
| JP2821903B2 JP2821903B2 (en) | 1998-11-05 |
Family
ID=15242074
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13930089A Expired - Lifetime JP2821903B2 (en) | 1989-06-02 | 1989-06-02 | Surface treatment of stainless steel by ion implantation |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2821903B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10222453A1 (en) * | 2002-05-22 | 2003-12-04 | Voith Paper Patent Gmbh | Process for the surface treatment of a doctor element |
| EP1548139A1 (en) * | 2002-07-31 | 2005-06-29 | National Institute of Advanced Industrial Science and Technology | Ultra-low carbon stainless steel |
| CN103898469A (en) * | 2012-12-26 | 2014-07-02 | 核工业西南物理研究院 | Method for interface-less strengthening treatment on material surface under conditions of low temperature and high load |
-
1989
- 1989-06-02 JP JP13930089A patent/JP2821903B2/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10222453A1 (en) * | 2002-05-22 | 2003-12-04 | Voith Paper Patent Gmbh | Process for the surface treatment of a doctor element |
| EP1548139A1 (en) * | 2002-07-31 | 2005-06-29 | National Institute of Advanced Industrial Science and Technology | Ultra-low carbon stainless steel |
| EP1548139A4 (en) * | 2002-07-31 | 2005-08-31 | Nat Inst Of Advanced Ind Scien | Ultra-low carbon stainless steel |
| US7648586B2 (en) | 2002-07-31 | 2010-01-19 | National Institute Of Advanced Industrial & Technology | Ultra-low carbon stainless steel |
| CN103898469A (en) * | 2012-12-26 | 2014-07-02 | 核工业西南物理研究院 | Method for interface-less strengthening treatment on material surface under conditions of low temperature and high load |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2821903B2 (en) | 1998-11-05 |
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