JPH0363569U - - Google Patents

Info

Publication number
JPH0363569U
JPH0363569U JP12306389U JP12306389U JPH0363569U JP H0363569 U JPH0363569 U JP H0363569U JP 12306389 U JP12306389 U JP 12306389U JP 12306389 U JP12306389 U JP 12306389U JP H0363569 U JPH0363569 U JP H0363569U
Authority
JP
Japan
Prior art keywords
thin film
film forming
forming apparatus
evaporation source
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12306389U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0523572Y2 (US20100268047A1-20101021-C00003.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989123063U priority Critical patent/JPH0523572Y2/ja
Publication of JPH0363569U publication Critical patent/JPH0363569U/ja
Application granted granted Critical
Publication of JPH0523572Y2 publication Critical patent/JPH0523572Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
JP1989123063U 1989-10-20 1989-10-20 Expired - Lifetime JPH0523572Y2 (US20100268047A1-20101021-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989123063U JPH0523572Y2 (US20100268047A1-20101021-C00003.png) 1989-10-20 1989-10-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989123063U JPH0523572Y2 (US20100268047A1-20101021-C00003.png) 1989-10-20 1989-10-20

Publications (2)

Publication Number Publication Date
JPH0363569U true JPH0363569U (US20100268047A1-20101021-C00003.png) 1991-06-20
JPH0523572Y2 JPH0523572Y2 (US20100268047A1-20101021-C00003.png) 1993-06-16

Family

ID=31671056

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989123063U Expired - Lifetime JPH0523572Y2 (US20100268047A1-20101021-C00003.png) 1989-10-20 1989-10-20

Country Status (1)

Country Link
JP (1) JPH0523572Y2 (US20100268047A1-20101021-C00003.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009034906A (ja) * 2007-08-01 2009-02-19 Kokuyo Co Ltd 綴じ具の取付構造及びファイル

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5397983A (en) * 1977-02-09 1978-08-26 Toshiba Corp Controlling method and apparatus for thickness of vacuum deposited film
JPS61186284A (ja) * 1985-02-13 1986-08-19 Nec Corp 分子線エピタキシ−装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5397983A (en) * 1977-02-09 1978-08-26 Toshiba Corp Controlling method and apparatus for thickness of vacuum deposited film
JPS61186284A (ja) * 1985-02-13 1986-08-19 Nec Corp 分子線エピタキシ−装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009034906A (ja) * 2007-08-01 2009-02-19 Kokuyo Co Ltd 綴じ具の取付構造及びファイル

Also Published As

Publication number Publication date
JPH0523572Y2 (US20100268047A1-20101021-C00003.png) 1993-06-16

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