JPH0359156U - - Google Patents

Info

Publication number
JPH0359156U
JPH0359156U JP11951789U JP11951789U JPH0359156U JP H0359156 U JPH0359156 U JP H0359156U JP 11951789 U JP11951789 U JP 11951789U JP 11951789 U JP11951789 U JP 11951789U JP H0359156 U JPH0359156 U JP H0359156U
Authority
JP
Japan
Prior art keywords
polishing liquid
rotating shaft
grindstone
grinding wheel
main body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11951789U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11951789U priority Critical patent/JPH0359156U/ja
Publication of JPH0359156U publication Critical patent/JPH0359156U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Polishing Bodies And Polishing Tools (AREA)
JP11951789U 1989-10-12 1989-10-12 Pending JPH0359156U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11951789U JPH0359156U (zh) 1989-10-12 1989-10-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11951789U JPH0359156U (zh) 1989-10-12 1989-10-12

Publications (1)

Publication Number Publication Date
JPH0359156U true JPH0359156U (zh) 1991-06-11

Family

ID=31667637

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11951789U Pending JPH0359156U (zh) 1989-10-12 1989-10-12

Country Status (1)

Country Link
JP (1) JPH0359156U (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014126174A1 (ja) * 2013-02-13 2014-08-21 昭和電工株式会社 単結晶ＳｉＣ基板の表面加工方法、その製造方法及び単結晶ＳｉＣ基板の表面加工用研削プレート
KR20180138144A (ko) * 2017-06-19 2018-12-28 가부시기가이샤 디스코 연삭 휠

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59124575A (ja) * 1982-12-31 1984-07-18 Seiichiro Ichikawa 石材の艶出し砥石
JPS61209880A (ja) * 1985-03-12 1986-09-18 Kanebo Ltd 硬質金属平面の精密研磨方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59124575A (ja) * 1982-12-31 1984-07-18 Seiichiro Ichikawa 石材の艶出し砥石
JPS61209880A (ja) * 1985-03-12 1986-09-18 Kanebo Ltd 硬質金属平面の精密研磨方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014126174A1 (ja) * 2013-02-13 2014-08-21 昭和電工株式会社 単結晶ＳｉＣ基板の表面加工方法、その製造方法及び単結晶ＳｉＣ基板の表面加工用研削プレート
US9620374B2 (en) 2013-02-13 2017-04-11 Showa Denko K.K. Surface machining method for single crystal SiC substrate, manufacturing method thereof, and grinding plate for surface machining single crystal SiC substrate
US9960048B2 (en) 2013-02-13 2018-05-01 Showa Denko K.K. Surface machining method for single crystal SiC substrate, manufacturing method thereof, and grinding plate for surface machining single crystal SiC substrate
US10453693B2 (en) 2013-02-13 2019-10-22 Showa Denko K.K. Surface machining method for single crystal SiC substrate, manufacturing method thereof, and grinding plate for surface machining single crystal SiC substrate
KR20180138144A (ko) * 2017-06-19 2018-12-28 가부시기가이샤 디스코 연삭 휠
JP2019000966A (ja) * 2017-06-19 2019-01-10 株式会社ディスコ 研削ホイール

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