JPH0358861U - - Google Patents

Info

Publication number
JPH0358861U
JPH0358861U JP12117589U JP12117589U JPH0358861U JP H0358861 U JPH0358861 U JP H0358861U JP 12117589 U JP12117589 U JP 12117589U JP 12117589 U JP12117589 U JP 12117589U JP H0358861 U JPH0358861 U JP H0358861U
Authority
JP
Japan
Prior art keywords
holes
extraction
electrode
plasma
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12117589U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12117589U priority Critical patent/JPH0358861U/ja
Publication of JPH0358861U publication Critical patent/JPH0358861U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP12117589U 1989-10-16 1989-10-16 Pending JPH0358861U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12117589U JPH0358861U (enExample) 1989-10-16 1989-10-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12117589U JPH0358861U (enExample) 1989-10-16 1989-10-16

Publications (1)

Publication Number Publication Date
JPH0358861U true JPH0358861U (enExample) 1991-06-10

Family

ID=31669213

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12117589U Pending JPH0358861U (enExample) 1989-10-16 1989-10-16

Country Status (1)

Country Link
JP (1) JPH0358861U (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001321210A (ja) * 2000-03-09 2001-11-20 Gunma Seimitsu:Kk リング装身具
KR20150070309A (ko) * 2012-10-15 2015-06-24 베리안 세미콘덕터 이큅먼트 어소시에이츠, 인크. 셔터 어셈블리를 갖는 이온 소스
JP2022167278A (ja) * 2021-04-23 2022-11-04 日新イオン機器株式会社 イオン源

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001321210A (ja) * 2000-03-09 2001-11-20 Gunma Seimitsu:Kk リング装身具
KR20150070309A (ko) * 2012-10-15 2015-06-24 베리안 세미콘덕터 이큅먼트 어소시에이츠, 인크. 셔터 어셈블리를 갖는 이온 소스
JP2016500901A (ja) * 2012-10-15 2016-01-14 ヴァリアン セミコンダクター イクイップメント アソシエイツ インコーポレイテッド シャッターアセンブリを有するイオン源
JP2022167278A (ja) * 2021-04-23 2022-11-04 日新イオン機器株式会社 イオン源

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