JPH0358447B2 - - Google Patents
Info
- Publication number
- JPH0358447B2 JPH0358447B2 JP8895983A JP8895983A JPH0358447B2 JP H0358447 B2 JPH0358447 B2 JP H0358447B2 JP 8895983 A JP8895983 A JP 8895983A JP 8895983 A JP8895983 A JP 8895983A JP H0358447 B2 JPH0358447 B2 JP H0358447B2
- Authority
- JP
- Japan
- Prior art keywords
- main
- electrode
- electrodes
- sensing electrode
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003990 capacitor Substances 0.000 claims description 25
- 238000006073 displacement reaction Methods 0.000 claims description 18
- 230000003111 delayed effect Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 description 17
- 239000011810 insulating material Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8895983A JPS59214712A (ja) | 1983-05-20 | 1983-05-20 | 静電容量形変位検出器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8895983A JPS59214712A (ja) | 1983-05-20 | 1983-05-20 | 静電容量形変位検出器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59214712A JPS59214712A (ja) | 1984-12-04 |
JPH0358447B2 true JPH0358447B2 (pl) | 1991-09-05 |
Family
ID=13957371
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8895983A Granted JPS59214712A (ja) | 1983-05-20 | 1983-05-20 | 静電容量形変位検出器 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59214712A (pl) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62235504A (ja) * | 1986-04-04 | 1987-10-15 | Mitsutoyo Corp | 容量型位置測定トランスデユ−サ |
US4982509A (en) * | 1988-08-19 | 1991-01-08 | Delta International Machinery Corp. | Measurement system having multiple display orientations |
US5428355A (en) * | 1992-03-23 | 1995-06-27 | Hewlett-Packard Corporation | Position encoder system |
US5414420A (en) * | 1992-03-23 | 1995-05-09 | Hewlett-Packard Corporation | Switch interconnect for position encoder system |
JP2007093287A (ja) * | 2005-09-27 | 2007-04-12 | Tietech Co Ltd | リニアモータ |
JP6486766B2 (ja) * | 2015-04-24 | 2019-03-20 | 株式会社ミツトヨ | エンコーダスケール及びその製造・取付方法 |
-
1983
- 1983-05-20 JP JP8895983A patent/JPS59214712A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS59214712A (ja) | 1984-12-04 |
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