JPH035805Y2 - - Google Patents

Description

[Detailed Description of the Invention] <Industrial Application Field> This invention relates to an air volume adjustment mechanism for a fan filter unit used in a clean room.

<Prior Art> Conventionally, there is an air volume adjustment mechanism for this type of fan filter unit as shown in FIG. In this air volume adjustment mechanism, a filter 4, an air volume adjustment damper 5, and a fan 6 are sequentially arranged in a line from below on a ceiling surface 1 of a clean room. and,
When adjusting the air volume, remove the filter 4, adjust the opening degree of the air volume adjustment damper 5, attach the filter 4 to the ceiling surface 1 again, measure the wind speed on the underside of the filter 4, and adjust the air volume to a predetermined value. It is determined whether the airflow rate is adjusted to a predetermined level, and if the airflow rate is not adjusted to a predetermined level, the filter 4 is removed again and the adjustment is made.

In this manner, in the air volume adjustment mechanism described above, the filter 4 is operated until the air volume adjustment damper 5 sets the air volume to a predetermined value.
must be removed from the ceiling surface 1 many times, which is a big burden on the workers, and it is virtually impossible to finely adjust the air volume.

Therefore, an air volume adjustment mechanism as shown in FIG. 4 is used. In this air volume adjustment mechanism, a filter 4, a fan 8, and an air volume adjustment damper 9 are sequentially arranged in a line from below on a ceiling 1 of a clean room, and a maintenance passage 11 is provided above the filter 4, a fan 8, and an air volume adjustment damper 9. Then, while one worker measures the wind speed on the lower surface of the filter 4, another worker adjusts the opening degree of the air volume adjustment damper 9 in the maintenance passage 11 behind the air volume adjustment damper 9 to adjust the air volume.

However, in the above-mentioned air volume adjustment mechanism, the maintenance passage 11 is placed in the space above the ceiling surface 1 that should be narrow.
Therefore, there is a problem that the space above the ceiling surface 1 becomes large. Another problem is that two workers are required to adjust the air volume.

<Purpose of the invention> Therefore, the purpose of this invention is to create a device that can fit in a narrow space and allows a single worker to easily and easily adjust and fine-tune the air volume while measuring the air velocity on the filter surface. .

<Configuration of the invention> In order to achieve the above object, the air volume adjustment mechanism of the fan filter unit of this invention is provided on one side of the casing forming the ceiling of the clean room, and is installed on the upstream side of the filter that partitions the clean area and the contaminated area. A fan is provided on the other side of the casing in the contaminated area, and a slide damper is provided on the outside of the casing, a feed rod that is threadedly engaged with the slide damper and sends the slide damper, and a fan is provided on the outside of the casing. The present invention is characterized in that an operating rod rotatable from the clean area side of the ceiling surface is provided, and the feeding rod and the operating rod are connected by a worm gear device. Further, in the air volume adjustment mechanism of the fan filter unit, a portion of the ceiling surface where the operating rod is accessed can be sealed with a liquid sealant.

<Operation of the invention> With the above configuration, when the operating rod 21 is rotated from the clean area 20, as illustrated in FIG. The air is transmitted to the perpendicular feed rod 24, and the rotation of the feed rod 24 causes the slide damper 25 to slide, thereby adjusting the air volume. At this time, since the area of the operating rod 21 is under negative pressure due to the suction action of the fan 28 on the outside of the casing 31, the contaminated air in the contaminated area 27 is transferred from the area on the ceiling where the operating rod 21 is accessed to the clean area. 20 will not be mixed in.
In addition, the above-mentioned access point is sealed with a liquid sealing material 55.
By sealing, the operating rod can be operated while maintaining the sealed state.

<Example> This invention will be explained in detail below with reference to the illustrated example.

FIG. 2 is a diagram showing the overall arrangement, in which a plurality of fan filter units 30, 30 are arranged adjacent to each other in parallel to form a clean room, 26, 26, . . .
is installed on the ceiling of the clean room to clean area 2.
0 and a filter that partitions the contaminated area 27, 28, 28,
... is the fan installed above the filters 26, 26, ..., and 25, 25, ... is the fan 28,
28,... is a slide damper that adjusts the discharge amount. The filter 26 and two fans 28, 28
Each fan filter unit 30, 30 is constituted by the two slide dampers 25, 25.

The fan filter unit 30 is shown in FIG.
As shown in FIG. 1b, a filter 26 is provided on the lower surface of a box-shaped casing 31 with an open lower surface. The casing 31 is fixed to the ceiling with a hanging bolt (not shown). A substantially L-shaped mounting portion 32 is provided at the lower end of the side portion of the casing 31, and a substantially L-shaped mounting portion 34 is provided at the lower end of both sides of the filter 26.
A gasket 35 is interposed between the mounting portion 32 of the casing 31 and the mounting portion 34 of the filter 26, and the stopper 70 shown in FIGS. 5 and 6,
Attachment part 3 of filter 26 from below by 70,...
4 is pressed upward to fix the filter 26 to the mounting portion 32 of the casing 31. These stoppers 70, 70, ... are connected to the casings 31, 31,
Support members 71, 71, attached to the lower end of...
It is bolted to... Clean area 20 and contaminated area 2
7 is completely sealed. In addition, the upper part of the fan filter unit 30 is attached to the plate 3.
1a and 31b are formed into two stages, an upper stage A and a lower stage B, while substantially U-shaped shaped steels 36a, 36b, and 36b are provided at the center and both ends, respectively, straddling the upper stage A and the lower stage B. Rectangular air suction ports 38, 38 are provided at the bottom surface of the upper stage A at equal distances on the left and right sides of the central shaped steel 36a, respectively.
Slide dampers 25, 25 each having a hollow interior and a rectangular cross section are provided to open and close the two suction ports 38, 38, respectively. Above left and right slide dampers 2
A plurality of screw rods 39, 39, ... and nuts 41, 41, which pass through the central steel mold 36a
...is connected. A guide plate 42 is provided in a rectangular hole 44 provided at the bottom end of one slide damper 25.
The upper end of the is inserted. A feed nut 45 is fixed to the lower end of the guide plate 42. This feed nut 45 is screwed into a feed rod 24 provided on the lower stage B. The tip of the feed rod 24 is supported by a central shaped steel 36a, and a nut 46 is fixed to the tip of the feed rod 24 with a pin 48 to prevent the feed rod 24 from falling off the shaped steel 36a. On the other hand, the rear end of the feed rod 24 is attached to a wheel gear 48 by protruding from the end steel section 36b. A worm gear 49 is meshed with the wheel gear 48. The wheel gear 48 and the worm gear 49 constitute the worm gear device 22. The upper and lower ends of the worm gear 49 are rotatably supported by a substantially U-shaped steel 50 fixed to the steel 36b. The lower end of the worm gear 49 is connected to the upper end of the operating rod 21 via a connecting plate 51 and a pin, and a driver groove 21a is provided in the lower end surface of the operating rod 21. Further, the lower end of the operating rod 21 is slidably fitted into a short pipe 54 which is erected and fixed on the back surface of the mounting portion 32 corresponding to the hole 53 provided in the mounting portion 32 of the casing 31. ing. Above mounting part 3
A liquid sealing material 55 is filled into the pipe 54 through the hole 53 of No. 2, and the hole 53 is plugged with a grommet 52. On the bottom surface of the lower stage B of the upper surface of the fan filter unit 30, guide ducts 56, 56 for the fans 28, 28 are provided at equal distances on the left and right sides of the central shaped steel 36a. Before the fan filter unit 30 configured as described above is installed on the ceiling, the filter 26, the mounting portion 34, and other members except the gasket 35 are assembled into the casing 31 in advance, and the casing 31 is attached to the ceiling. After fixing the filter 26, the mounting part 34 and the packing 35 together with the hanging bolts, the casing 31 is assembled with the stoppers 70, 70, . . . as described above.
It is fixed to the mounting part 32 of.

According to the air volume adjustment mechanism of the fan filter unit configured as described above, while the fan 28 is driven after the filter 26 is installed, the grommet 52 is removed from the clean area 20, and the liquid sealing material inside the pipe 54 is removed.
Take out 5. Thereafter, while measuring the wind speed on the lower surface of the filter 26, a screwdriver is fitted into the groove 21a on the lower end surface of the operating rod 21 and the operating rod 21 is rotated. When the operating rod 21 rotates, the worm gear 49 rotates, the wheel gear 48 perpendicular to the worm gear 49 rotates, and the feed rod 24 rotates. The feed rod 24 rotates, but its movement in the left and right direction is restricted, so the plate 31b of the casing 31 prevents it from rotating, and the slide dampers 25, 25 only slide.
A feed nut 45 connected to moves left and right.
This causes both slide dampers 25, 25 to move to the left or right. As a result, the opening degree of the suction port 38 is adjusted, and the wind speed on the lower surface of the filter 26 changes. In this manner, by rotating the lower end of the operating rod 21 from the clean area 20 while measuring the wind speed at the outlet side of the filter 26, a predetermined wind speed, or air volume, can be easily set. of course,
Fine adjustment of the air volume is also possible. At this time, since the operating rod 21 is under negative pressure due to the suction action of the fan 28 on the outside of the casing 31, the contaminated area 27 is
Contaminated air will not enter the clean area 20.
After adjusting the slide damper 25 to a predetermined air volume, the pipe 54 is again filled with the liquid sealing material 55 and the hole 53 is plugged with the grommet 52. In this way, since the pipe 54 is plugged with the grommet 52 in addition to the liquid sealing material 55, airtightness is high. Further, since the liquid sealing material 55 does not harden, it can be reused, and the air volume can be easily adjusted from the clean area 20 at any time even after the construction is completed. Furthermore, since the operating position of the operating rod 21 is set at the mounting portion 32 between the adjacent filters 26, 26, the operating space for the operating rod 21 can be reduced, and the effective area of the filter 26 is not obstructed. .

In the above embodiment, a case has been described in which the fan 28 is provided below the slide damper 25, but the fan may be provided behind the slide damper.

As shown in FIGS. 5 and 6, if the stoppers 70, 70, . The advantage is that the member 71 can be shared, the space required for the support member 71 can be reduced, and the effective area of the filter 26 can be increased.

<Effects of the invention> As is clear from the above explanation, the air volume adjustment mechanism of the fan filter unit of this invention includes a fan, a slide damper, a slide damper, and a screw in the contaminated area on the back side of the filter that separates the clean area and the contaminated area. Since we have provided a feed rod that matches the feed rod and an operating rod that runs perpendicular to the feed rod, even one worker can rotate the operating rod from the clean area while measuring the wind speed at the outlet of the filter without removing the filter. You can easily adjust the air volume. Also,
According to this invention, the air volume can be easily changed and set to a predetermined air volume at any time even after construction is completed. In addition, since the operating rod is operated in a clean area, there is no need for a maintenance passage in the ceiling space, which allows the ceiling space to be narrowed and used effectively. Furthermore, a small space is required to operate the slide damper using the feed rod, the operating rod orthogonal to the feed rod, and the worm gear device, and the effective area of the filter can be increased. Further, since the operating rod is disposed outside the casing to which the filter is attached, the contaminated area where the operating rod exists becomes under negative pressure, and it is possible to prevent contaminated air from the contaminated area from entering the clean area. Furthermore, since there are no protrusions such as operating rods below the filter, the flow of air is not obstructed, which is particularly effective in vertical laminar flow systems that create ultra-clean spaces.

[Brief explanation of the drawing]

Figure 1a is a sectional view showing an embodiment of this invention;
Figure 1b is a view taken along the - line in Figure 1a, Figure 2 is a schematic diagram of the embodiment, Figure 3 is a schematic diagram of the conventional example, and Figure 4 is a schematic diagram of the conventional example.
The figure is a schematic diagram of another conventional example, Figure 5 is a layout diagram of a stopper for attaching a filter, and Figure 6 is the same as in Figure 5.
It is a line arrow view. 20...Clean area, 21...Operation rod, 22...
... Worm gear device, 24 ... Feed rod, 25
...Slide damper, 26...Filter, 27...
...Contaminated area, 28... Juan.

Claims (1)

[Scope of Claim for Utility Model Registration] (1) A fan is provided on the other side of the casing in the contaminated area upstream of a filter that is provided on one side of the casing that forms the ceiling of the clean room and partitions the clean area and contaminated area. In addition, a slide damper is provided on the outside of the casing, a feed rod that is threadedly engaged with the slide damper to send the slide damper, and an operating rod that is rotatable in a direction perpendicular to the feed rod and from the clean area side of the ceiling surface. An air volume adjustment mechanism for a fan filter unit, further comprising: a feeding rod and an operating rod connected by a worm gear device. (2) Utility Model Registration The air volume adjustment mechanism according to claim 1, wherein a portion of the ceiling surface where the operating rod is accessed is sealed with a liquid sealant.