JPH0357957U - - Google Patents
Info
- Publication number
- JPH0357957U JPH0357957U JP11832589U JP11832589U JPH0357957U JP H0357957 U JPH0357957 U JP H0357957U JP 11832589 U JP11832589 U JP 11832589U JP 11832589 U JP11832589 U JP 11832589U JP H0357957 U JPH0357957 U JP H0357957U
- Authority
- JP
- Japan
- Prior art keywords
- sputtering
- substrate
- substrate holder
- space
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 239000010409 thin film Substances 0.000 claims description 5
- 239000010408 film Substances 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 claims 4
- 239000000498 cooling water Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Tests Of Electronic Circuits (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11832589U JPH0357957U (cs) | 1989-10-11 | 1989-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11832589U JPH0357957U (cs) | 1989-10-11 | 1989-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0357957U true JPH0357957U (cs) | 1991-06-05 |
Family
ID=31666499
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11832589U Pending JPH0357957U (cs) | 1989-10-11 | 1989-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0357957U (cs) |
-
1989
- 1989-10-11 JP JP11832589U patent/JPH0357957U/ja active Pending