JPH03103249U - - Google Patents
Info
- Publication number
- JPH03103249U JPH03103249U JP1037190U JP1037190U JPH03103249U JP H03103249 U JPH03103249 U JP H03103249U JP 1037190 U JP1037190 U JP 1037190U JP 1037190 U JP1037190 U JP 1037190U JP H03103249 U JPH03103249 U JP H03103249U
- Authority
- JP
- Japan
- Prior art keywords
- bonding surface
- sputtering
- periphery
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1037190U JPH03103249U (cs) | 1990-02-05 | 1990-02-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1037190U JPH03103249U (cs) | 1990-02-05 | 1990-02-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03103249U true JPH03103249U (cs) | 1991-10-28 |
Family
ID=31513943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1037190U Pending JPH03103249U (cs) | 1990-02-05 | 1990-02-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03103249U (cs) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS623387U (cs) * | 1985-06-24 | 1987-01-10 | ||
| JPS6277461A (ja) * | 1985-09-30 | 1987-04-09 | Shinku Kikai Kogyo Kk | 高周波スパツタ電極のバツキングプレ−ト |
-
1990
- 1990-02-05 JP JP1037190U patent/JPH03103249U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS623387U (cs) * | 1985-06-24 | 1987-01-10 | ||
| JPS6277461A (ja) * | 1985-09-30 | 1987-04-09 | Shinku Kikai Kogyo Kk | 高周波スパツタ電極のバツキングプレ−ト |