JPH0356624U - - Google Patents
Info
- Publication number
- JPH0356624U JPH0356624U JP11552889U JP11552889U JPH0356624U JP H0356624 U JPH0356624 U JP H0356624U JP 11552889 U JP11552889 U JP 11552889U JP 11552889 U JP11552889 U JP 11552889U JP H0356624 U JPH0356624 U JP H0356624U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- trap pipe
- flow path
- switching
- catalyst
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003054 catalyst Substances 0.000 claims description 4
- 238000000746 purification Methods 0.000 claims description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims 2
- 239000012159 carrier gas Substances 0.000 claims 2
- 238000001816 cooling Methods 0.000 claims 2
- 239000007789 gas Substances 0.000 claims 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 229910002092 carbon dioxide Inorganic materials 0.000 claims 1
- 239000001569 carbon dioxide Substances 0.000 claims 1
- 229910002091 carbon monoxide Inorganic materials 0.000 claims 1
- 239000013043 chemical agent Substances 0.000 claims 1
- 229930195733 hydrocarbon Natural products 0.000 claims 1
- 150000002430 hydrocarbons Chemical class 0.000 claims 1
- 239000001257 hydrogen Substances 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 1
- VUZPPFZMUPKLLV-UHFFFAOYSA-N methane;hydrate Chemical compound C.O VUZPPFZMUPKLLV-UHFFFAOYSA-N 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 238000001179 sorption measurement Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 229910001868 water Inorganic materials 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Separation Of Gases By Adsorption (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11552889U JPH0356624U (cs) | 1989-09-29 | 1989-09-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11552889U JPH0356624U (cs) | 1989-09-29 | 1989-09-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0356624U true JPH0356624U (cs) | 1991-05-30 |
Family
ID=31663855
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11552889U Pending JPH0356624U (cs) | 1989-09-29 | 1989-09-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0356624U (cs) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012148912A (ja) * | 2011-01-18 | 2012-08-09 | Sumitomo Seika Chem Co Ltd | ヘリウムガスの精製方法および精製装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5861816A (ja) * | 1981-10-09 | 1983-04-13 | Osaka Oxgen Ind Ltd | 高純度ガス精製装置の再生方法 |
JPS62269728A (ja) * | 1986-03-31 | 1987-11-24 | ザ・ビ−オ−シ−・グル−プ・インコ−ポレ−テツド | 不活性ガスを精製する1工程方法 |
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1989
- 1989-09-29 JP JP11552889U patent/JPH0356624U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5861816A (ja) * | 1981-10-09 | 1983-04-13 | Osaka Oxgen Ind Ltd | 高純度ガス精製装置の再生方法 |
JPS62269728A (ja) * | 1986-03-31 | 1987-11-24 | ザ・ビ−オ−シ−・グル−プ・インコ−ポレ−テツド | 不活性ガスを精製する1工程方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012148912A (ja) * | 2011-01-18 | 2012-08-09 | Sumitomo Seika Chem Co Ltd | ヘリウムガスの精製方法および精製装置 |