JPH0356624U - - Google Patents

Info

Publication number
JPH0356624U
JPH0356624U JP11552889U JP11552889U JPH0356624U JP H0356624 U JPH0356624 U JP H0356624U JP 11552889 U JP11552889 U JP 11552889U JP 11552889 U JP11552889 U JP 11552889U JP H0356624 U JPH0356624 U JP H0356624U
Authority
JP
Japan
Prior art keywords
valve
trap pipe
flow path
switching
catalyst
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11552889U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11552889U priority Critical patent/JPH0356624U/ja
Publication of JPH0356624U publication Critical patent/JPH0356624U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Separation Of Gases By Adsorption (AREA)
JP11552889U 1989-09-29 1989-09-29 Pending JPH0356624U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11552889U JPH0356624U (cs) 1989-09-29 1989-09-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11552889U JPH0356624U (cs) 1989-09-29 1989-09-29

Publications (1)

Publication Number Publication Date
JPH0356624U true JPH0356624U (cs) 1991-05-30

Family

ID=31663855

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11552889U Pending JPH0356624U (cs) 1989-09-29 1989-09-29

Country Status (1)

Country Link
JP (1) JPH0356624U (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012148912A (ja) * 2011-01-18 2012-08-09 Sumitomo Seika Chem Co Ltd ヘリウムガスの精製方法および精製装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5861816A (ja) * 1981-10-09 1983-04-13 Osaka Oxgen Ind Ltd 高純度ガス精製装置の再生方法
JPS62269728A (ja) * 1986-03-31 1987-11-24 ザ・ビ−オ−シ−・グル−プ・インコ−ポレ−テツド 不活性ガスを精製する１工程方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5861816A (ja) * 1981-10-09 1983-04-13 Osaka Oxgen Ind Ltd 高純度ガス精製装置の再生方法
JPS62269728A (ja) * 1986-03-31 1987-11-24 ザ・ビ−オ−シ−・グル−プ・インコ−ポレ−テツド 不活性ガスを精製する１工程方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012148912A (ja) * 2011-01-18 2012-08-09 Sumitomo Seika Chem Co Ltd ヘリウムガスの精製方法および精製装置

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