JPH0356132U - - Google Patents
Info
- Publication number
- JPH0356132U JPH0356132U JP11621189U JP11621189U JPH0356132U JP H0356132 U JPH0356132 U JP H0356132U JP 11621189 U JP11621189 U JP 11621189U JP 11621189 U JP11621189 U JP 11621189U JP H0356132 U JPH0356132 U JP H0356132U
- Authority
- JP
- Japan
- Prior art keywords
- recess
- semiconductor wafer
- outer edge
- hole
- diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 4
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11621189U JPH0356132U (tr) | 1989-10-04 | 1989-10-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11621189U JPH0356132U (tr) | 1989-10-04 | 1989-10-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0356132U true JPH0356132U (tr) | 1991-05-30 |
Family
ID=31664507
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11621189U Pending JPH0356132U (tr) | 1989-10-04 | 1989-10-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0356132U (tr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006091616A (ja) * | 2004-09-27 | 2006-04-06 | Shimonishi Giken Kogyo Kk | 開閉装置 |
-
1989
- 1989-10-04 JP JP11621189U patent/JPH0356132U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006091616A (ja) * | 2004-09-27 | 2006-04-06 | Shimonishi Giken Kogyo Kk | 開閉装置 |
| JP4623633B2 (ja) * | 2004-09-27 | 2011-02-02 | 下西技研工業株式会社 | 開閉装置 |