JPH0355750A - Electron gun device - Google Patents
Electron gun deviceInfo
- Publication number
- JPH0355750A JPH0355750A JP1188768A JP18876889A JPH0355750A JP H0355750 A JPH0355750 A JP H0355750A JP 1188768 A JP1188768 A JP 1188768A JP 18876889 A JP18876889 A JP 18876889A JP H0355750 A JPH0355750 A JP H0355750A
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- heater
- electron gun
- temperature
- power supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 6
- 238000009529 body temperature measurement Methods 0.000 claims description 2
- 230000005855 radiation Effects 0.000 abstract description 7
- 238000010894 electron beam technology Methods 0.000 abstract description 6
- 238000005259 measurement Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010406 cathode material Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は電子銃加熱蒸発装置用の電子銃装置に係わり、
特にリニア型の電子銃装置に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an electron gun device for an electron gun heating evaporation device.
In particular, it relates to a linear type electron gun device.
従来の電子銃装置は、米国特許第４，１７１，４６２号
に記載のように、電子ビームを放出するカソード，カソ
ード加熱用のヒータ手段、及びヒータ手段の電源を備え
，ヒータ手段は単一の加熱要素から構戊されていた。A conventional electron gun device, as described in U.S. Pat. No. 4,171,462, includes a cathode for emitting an electron beam, heater means for heating the cathode, and a power source for the heater means, where the heater means is a single It consisted of a heating element.
しかしながら、上記従来技術ではカソード面の温度分布
の均一化の点について配慮がされておらず、カソート端
で熱の逃げ易い部位ではカソード面の温度に低下し、こ
れに対応して電子ビームの出力が低下するという問題が
あった。また、カソードの中央部分では、逆に温度が高
くなり、カソード素材の劣化が進という問題があった。However, in the above conventional technology, no consideration is given to making the temperature distribution on the cathode surface uniform, and the temperature at the cathode end where heat easily escapes decreases to that of the cathode surface, and the electron beam output corresponding to this decreases. There was a problem that the value decreased. In addition, the temperature in the central portion of the cathode increases, which causes the deterioration of the cathode material.
本発明の目的は、カソード面の温度分布を制御できる電
子銃装置を提供することである。An object of the present invention is to provide an electron gun device that can control the temperature distribution on the cathode surface.
上記目的は、ヒータ手段を複数のヒータで構或すると共
に、カソードの表面温度を測定する温度測定手段と、温
度測定手段の測定値に基づきヒータ電源手段を制御し、
ヒータの出力を個別に制御するヒータ電源制御手段を設
けることにより達戊される。The above object is to configure the heater means with a plurality of heaters, a temperature measuring means for measuring the surface temperature of the cathode, and controlling the heater power supply means based on the measured value of the temperature measuring means,
This can be achieved by providing heater power supply control means that individually controls the output of the heaters.
温度測定手段の測定値に基づき複数のヒータの出力を個
別に制御するヒータ電源制御手段を設けることにより、
複数のヒータに対応してカソード面の温度を変えること
ができ、カソード面の温度分布を制御できる。By providing a heater power supply control means that individually controls the output of a plurality of heaters based on the measured value of the temperature measurement means,
The temperature of the cathode surface can be changed in response to multiple heaters, and the temperature distribution of the cathode surface can be controlled.
以下・本発明の一実施例を第１図〜第３図レこより説明
する。An embodiment of the present invention will be described below with reference to FIGS. 1 to 3.
第１図において、本実施例の電子銃装置は、電子を放出
し、電子ブーム６を形成するカソート１，カソートｌに
隣接してその長手方向に配置された、カソード加熱用の
複数のヒータ２，複数のヒータ２に対応して設けられた
複数のヒータ電源３，複数のヒータ＠’ＦＡ３を制御す
るヒータ電源制御回路４、及びカソート１の表面温度を
ｉｌｌ！Ｉ定し，そのａｌｌ＋定データをヒータ電源制
御回路４に出力する放躬温度計５からなっている。In FIG. 1, the electron gun device of this embodiment includes a cathode 1 that emits electrons and forms an electronic boom 6, and a plurality of heaters 2 for heating the cathode arranged adjacent to the cathode 1 in its longitudinal direction. , a plurality of heater power supplies 3 provided corresponding to the plurality of heaters 2, a heater power supply control circuit 4 that controls the plurality of heaters @'FA3, and the surface temperature of the cathode 1. It consists of a radiation thermometer 5 which outputs the all + constant data to the heater power supply control circuit 4.
本実施例の動作原理を従来装置と比較して第２図及び第
３図により説明する。The operating principle of this embodiment will be explained in comparison with a conventional device with reference to FIGS. 2 and 3.
従来の電子銃装置では、電子を放出するカソードを単一
のヒータで加熱してる。このため、熱の逃げ易いカソー
ド端では温度が低下するので，力ソード面上で第２図に
示すような温度分布を持ってしまう。カソード面の温度
がこのように低下すると、その部分で電子の放出が弱め
られ、電子ビームの出力分布も同様に布均一となる。In conventional electron gun devices, a single heater heats the cathode that emits electrons. For this reason, the temperature decreases at the cathode end where heat easily escapes, resulting in a temperature distribution as shown in FIG. 2 on the cathode surface. When the temperature of the cathode surface decreases in this way, electron emission is weakened in that area, and the output distribution of the electron beam also becomes uniform.
これに対して、本実施例では、カソード１の加熱を複数
のヒータ２で行っているので、それによって，カソード
面の温度分布の劇定値を基に各ヒータ２の出力を制御し
、カンード面の温度分布を変えることができ，第３図に
示すようにカソード面の温度分布を一様に制御できる。On the other hand, in this embodiment, since the cathode 1 is heated by a plurality of heaters 2, the output of each heater 2 is controlled based on the dramatic value of the temperature distribution on the cathode surface. As shown in FIG. 3, the temperature distribution on the cathode surface can be uniformly controlled.
本実施例においてカソード１の表面温度を一様にする場
合は、まず、放射温度計５によりカソート面の温度分布
を劃定する。ヒータ電源制御回路４では、放射温度計５
により測定した温度分布に裁づき各ヒータ電ｇ３を制御
し、温度分布の低温部にあるヒータ２の出力を上げ，高
温部にあるヒータ２の出力を下げることにより、カソー
ド１の表面温度を一様にする。In this embodiment, when making the surface temperature of the cathode 1 uniform, first, the temperature distribution on the cathode surface is determined using the radiation thermometer 5. In the heater power supply control circuit 4, a radiation thermometer 5
The surface temperature of the cathode 1 is kept constant by controlling each heater electric current g3 based on the temperature distribution measured by increasing the output of the heater 2 in the low-temperature part of the temperature distribution and decreasing the output of the heater 2 in the high-temperature part. I'll do it like that.
このように本実施例によれば、カソード１の表面温度分
布を制御できるため、カソードエからの電子放出がカソ
ード表面温度に比例することから電子ビーム６の出力分
布についても制御可能となる・また、カソード表面温度
が一様になるので、カソードが部分的に高温になること
が防止でき、カソードの劣化がなくなり、カソードの寿
命が延びる。According to this embodiment, since the surface temperature distribution of the cathode 1 can be controlled, the output distribution of the electron beam 6 can also be controlled because the electron emission from the cathode is proportional to the cathode surface temperature. Since the cathode surface temperature becomes uniform, it is possible to prevent the cathode from becoming partially high temperature, thereby eliminating deterioration of the cathode and extending the life of the cathode.
なお、以上の実施例では、ヒータ電源制御回路４は、放
射温度計５により測定したカソード１の実際の表面温度
分布を用いて表面温度が一様になるようにヒータ出力を
制御したが、カソード端で熱の逃げ易い部位に位置する
ヒータ２の出力が予め高くむるように電源３を制御して
もよい。In the above embodiment, the heater power supply control circuit 4 controlled the heater output so that the surface temperature was uniform using the actual surface temperature distribution of the cathode 1 measured by the radiation thermometer 5. The power source 3 may be controlled so that the output of the heater 2 located at the end where heat easily escapes is increased in advance.
本発明によれば、電子を放出するカソードの表面温度分
布を制御可能となるので、カソードからの電子放出がカ
ソード表面温度に比例することから、電子ビーム出力分
布も制御できる。また、カソード上で局所的に温度が高
くなることが防止できるので、カソードの劣化が低減で
き、寿命が延びる。According to the present invention, the surface temperature distribution of the cathode that emits electrons can be controlled, and since the electron emission from the cathode is proportional to the cathode surface temperature, the electron beam output distribution can also be controlled. Furthermore, since it is possible to prevent the temperature from becoming locally high on the cathode, deterioration of the cathode can be reduced and its life span can be extended.
第１図は本発明の一実施例による電子銃装置の１核略図
であり、第２図は従来の電子銃装置によるカソード表面
温度分布の説明図であり、第３図は本発明の電子銃装置
によるカソート表面温度分布の説明図である。
２・・・カソート、２・ ヒータ、３・・電源、４・・
ヒータ電源制御回路、５ ・放射温度計、６ 電子ビー
馬
図FIG. 1 is a schematic diagram of one nucleus of an electron gun device according to an embodiment of the present invention, FIG. 2 is an explanatory diagram of the cathode surface temperature distribution in a conventional electron gun device, and FIG. 3 is a diagram showing the electron gun of the present invention. FIG. 3 is an explanatory diagram of the cathode surface temperature distribution by the device. 2... cathode, 2. heater, 3... power supply, 4...
Heater power supply control circuit, 5 ・Radiation thermometer, 6 Electronic bee horse diagram
Claims (1)
手段、及び前記ヒータ手段の電源手段を備えた電子銃装
置において、 前記ヒータ手段を複数のヒータで構成すると共に、前記
カソードの表面温度を測定する温度測定手段と、前記温
度測定手段の測定値に基づき前記電源手段を制御し、前
記ヒータの出力を個別に制御するヒータ電源制御手段を
設けたことを特徴とする電子銃装置。 ２、請求項１記載の電子銃装置において、前記温度測定
手段は前記カソードの表面温度分布を測定する手段であ
り、前記ヒータ電源制御手段は、前記カソードの表面温
度分布を調節することにより、電子ビーム出力分布を制
御することを特徴とする電子銃装置。 ３、電子を放出するカソード、カソード加熱用のヒータ
手段、及び前記ヒータ手段の電源手段を備えた電子銃装
置において、 前記ヒータ手段を複数のヒータで構成すると共に、前記
電源手段を複数のヒータに対応して複数の電源で構成し
、カソード端で熱の逃げ易い部位に位置するヒータの出
力が予め高くなるように前記電源手段を制御するヒータ
電源制御手段を設けたことを特徴とする電子銃装置。[Scope of Claims] 1. An electron gun device comprising a cathode that emits electrons, heater means for heating the cathode, and power supply means for the heater means, wherein the heater means is composed of a plurality of heaters, and the cathode an electron gun, comprising: a temperature measuring means for measuring the surface temperature of the electron gun; and a heater power supply controlling means for controlling the power supply means based on the measured value of the temperature measuring means and individually controlling the output of the heater. Device. 2. In the electron gun device according to claim 1, the temperature measurement means is means for measuring the surface temperature distribution of the cathode, and the heater power supply control means controls the electron gun by adjusting the surface temperature distribution of the cathode. An electron gun device characterized by controlling beam output distribution. 3. In an electron gun device comprising a cathode that emits electrons, a heater means for heating the cathode, and a power supply means for the heater means, the heater means is composed of a plurality of heaters, and the power supply means is composed of a plurality of heaters. An electron gun correspondingly comprises a plurality of power supplies and is further provided with a heater power supply control means for controlling the power supply means so that the output of the heater located at the cathode end where heat easily escapes is increased in advance. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1188768A JPH0355750A (en) | 1989-07-24 | 1989-07-24 | Electron gun device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1188768A JPH0355750A (en) | 1989-07-24 | 1989-07-24 | Electron gun device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0355750A true JPH0355750A (en) | 1991-03-11 |
Family
ID=16229440
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1188768A Pending JPH0355750A (en) | 1989-07-24 | 1989-07-24 | Electron gun device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0355750A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6676288B1 (en) * | 1998-09-14 | 2004-01-13 | The United States Of America As Represented By The Administrator Of National Aeronautics And Space Administration | Process for thermal imaging scanning of a swaged heater for an anode subassembly of a hollow cathode assembly |
| JP2009187767A (en) * | 2008-02-06 | 2009-08-20 | Sumitomo Electric Ind Ltd | Electron source structure, and electron source structure drive device |
-
1989
- 1989-07-24 JP JP1188768A patent/JPH0355750A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6676288B1 (en) * | 1998-09-14 | 2004-01-13 | The United States Of America As Represented By The Administrator Of National Aeronautics And Space Administration | Process for thermal imaging scanning of a swaged heater for an anode subassembly of a hollow cathode assembly |
| JP2009187767A (en) * | 2008-02-06 | 2009-08-20 | Sumitomo Electric Ind Ltd | Electron source structure, and electron source structure drive device |
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