JPS573356A - Electron gun - Google Patents

Electron gun

Info

Publication number
JPS573356A
JPS573356A JP7618580A JP7618580A JPS573356A JP S573356 A JPS573356 A JP S573356A JP 7618580 A JP7618580 A JP 7618580A JP 7618580 A JP7618580 A JP 7618580A JP S573356 A JPS573356 A JP S573356A
Authority
JP
Japan
Prior art keywords
chip
support rods
control electrode
heated
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7618580A
Other languages
Japanese (ja)
Inventor
Seiichi Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP7618580A priority Critical patent/JPS573356A/en
Publication of JPS573356A publication Critical patent/JPS573356A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns

Abstract

PURPOSE:To obtain a desired stable electron beam current by controllably configuring a gap between an electron beam generation emitter and a control electrode. CONSTITUTION:When current is applied to flow between pole braces 2 and 3, holding elements 4 and 5 are turned on and generate heat. This heat is transmitted to an emitter chip 6. This chip 6 is heated up to desired temperatures and emits thermoelectrons. Before the chip 6 is heated, heating current is applied to support rods 13 and 14 and the support rods 13 and 14 are heated. The heat of the support rods 13 and 14 is transmitted to a control electrode 12 and the support rods 13 and 14 and a control electrode 12 are thermally expanded in the longitudinal direction of the support rods 13 and 14. After the thermoelectrons are emitted from the chip 6, the distance between the chip 6 and the control electrode 12 is kept constant.
JP7618580A 1980-06-06 1980-06-06 Electron gun Pending JPS573356A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7618580A JPS573356A (en) 1980-06-06 1980-06-06 Electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7618580A JPS573356A (en) 1980-06-06 1980-06-06 Electron gun

Publications (1)

Publication Number Publication Date
JPS573356A true JPS573356A (en) 1982-01-08

Family

ID=13598057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7618580A Pending JPS573356A (en) 1980-06-06 1980-06-06 Electron gun

Country Status (1)

Country Link
JP (1) JPS573356A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5112407A (en) * 1987-05-29 1992-05-12 Kabushiki Kaisha Hayashibara Seibutsu Kagaku Kenkyujo Process to prepare maltose powder
US5118622A (en) * 1988-02-04 1992-06-02 Kabushiki Kaisha Hayashibara Seibutsu Kagaku Kenkyujo Polypeptide possessing isoamylase activity, and its use in the hydrolysis of amylaceous substances
US5538883A (en) * 1993-07-20 1996-07-23 Kabushiki Kaisha Hayashibara Seibutsu Kagaku Kenkyujo Maltose-trehalose converting enzyme
US5747300A (en) * 1994-07-19 1998-05-05 Kabushiki Kaisha Hayashibara Seibutsu Kaguku Kenkyujo Trehalose and its production and use
US7183265B2 (en) 2001-08-22 2007-02-27 Kabushiki Kaisha Hayashibara Seibutsu Kagaku Kenkyujo Powdery product comprising crystalline β-maltose monohydrate, its preparation, and uses
JP2011528489A (en) * 2008-07-16 2011-11-17 カール ツァイス エヌティーエス エルエルシー Current increase in charged particle sources and systems.

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5112407A (en) * 1987-05-29 1992-05-12 Kabushiki Kaisha Hayashibara Seibutsu Kagaku Kenkyujo Process to prepare maltose powder
US5118622A (en) * 1988-02-04 1992-06-02 Kabushiki Kaisha Hayashibara Seibutsu Kagaku Kenkyujo Polypeptide possessing isoamylase activity, and its use in the hydrolysis of amylaceous substances
US5538883A (en) * 1993-07-20 1996-07-23 Kabushiki Kaisha Hayashibara Seibutsu Kagaku Kenkyujo Maltose-trehalose converting enzyme
US5736380A (en) * 1993-07-20 1998-04-07 Kabushiki Kaisha Hayashibara Seibutsu Kagaku Kenkyujo Maltose-trehalose converting enzyme, and preparation and uses thereof
US5965411A (en) * 1993-07-20 1999-10-12 Kabushiki Kaisha Hayashibara Seibutsu Kagaku Kenkyujo Maltose-trehalose converting enzyme, and preparation and uses thereof
US6090792A (en) * 1993-07-20 2000-07-18 Kabushiki Kaisha Hayashibara Seibutsu Kagaku Kenkyujo Maltose-trehalose converting enzyme, and preparation and uses thereof
US5747300A (en) * 1994-07-19 1998-05-05 Kabushiki Kaisha Hayashibara Seibutsu Kaguku Kenkyujo Trehalose and its production and use
US5759610A (en) * 1994-07-19 1998-06-02 Kabushiki Kaisha Hayashibara Seibutsu Kagaku Kenkyujo Trehalose and its production and use
US5935636A (en) * 1994-07-19 1999-08-10 Kabushiki Kaisha Hayashibara Seibutsu Kagaku Kenkyujo Trehalose and its production and use
US7183265B2 (en) 2001-08-22 2007-02-27 Kabushiki Kaisha Hayashibara Seibutsu Kagaku Kenkyujo Powdery product comprising crystalline β-maltose monohydrate, its preparation, and uses
JP2011528489A (en) * 2008-07-16 2011-11-17 カール ツァイス エヌティーエス エルエルシー Current increase in charged particle sources and systems.

Similar Documents

Publication Publication Date Title
JPS573356A (en) Electron gun
US4346330A (en) Laser generated high electron density source
US3388280A (en) Laser energized hot cathode type of electron discharge device
JPS5519782A (en) Electron gun
JPS5578452A (en) Electron gun
MY118366A (en) Microwave oven equipped with a structurally simple apparatus for generating a microwave frequency energy
Basov et al. Closed cycle CW CO 2 laser employing an electron beam ionizer
SU1396173A1 (en) Microwave radiation with relative electronic beam
JP3117261B2 (en) filament
JPS5763828A (en) Electron bean exposure appartus
US3287582A (en) Apparatus for increasing ion engine beam density
JPS54127272A (en) Hot-cathode electron source unit
JPS54143063A (en) Electron source for picture display
US4047070A (en) Pyroelectric vidicon having target heating means on accelerating anode
JPH0228221B2 (en)
JPS5797886A (en) Laser device
SU321875A1 (en) Electron gun
KNIGHT Reverse current in solar flares[Ph. D. Thesis]
Valyanskii et al. Behaviour of the Delivery Pressure in the Process of Establishing a Schedule of Developed Metal Vaporization Under the Action of Optical Radiation
GB2021810A (en) X-ray tube filament current predictive control circuit
JPH02100283A (en) Far infrared ray heater
KR0139279Y1 (en) Multi-baem cathode
KR200267715Y1 (en) Extreme high prequency oscillation apparatus
JPS6476643A (en) Electron current source
JPH03261056A (en) High frequency electron gun