JPH0355651U - - Google Patents
Info
- Publication number
- JPH0355651U JPH0355651U JP11726989U JP11726989U JPH0355651U JP H0355651 U JPH0355651 U JP H0355651U JP 11726989 U JP11726989 U JP 11726989U JP 11726989 U JP11726989 U JP 11726989U JP H0355651 U JPH0355651 U JP H0355651U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- faraday case
- case
- faraday
- magnetic field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000004907 flux Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11726989U JPH0355651U (fi) | 1989-10-04 | 1989-10-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11726989U JPH0355651U (fi) | 1989-10-04 | 1989-10-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0355651U true JPH0355651U (fi) | 1991-05-29 |
Family
ID=31665490
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11726989U Pending JPH0355651U (fi) | 1989-10-04 | 1989-10-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0355651U (fi) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61227357A (ja) * | 1985-03-30 | 1986-10-09 | Toshiba Corp | イオン注入装置 |
| JPS63299043A (ja) * | 1987-05-29 | 1988-12-06 | Tokyo Electron Ltd | イオン注入装置 |
-
1989
- 1989-10-04 JP JP11726989U patent/JPH0355651U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61227357A (ja) * | 1985-03-30 | 1986-10-09 | Toshiba Corp | イオン注入装置 |
| JPS63299043A (ja) * | 1987-05-29 | 1988-12-06 | Tokyo Electron Ltd | イオン注入装置 |