JPH0355483B2 - - Google Patents
Info
- Publication number
- JPH0355483B2 JPH0355483B2 JP7679487A JP7679487A JPH0355483B2 JP H0355483 B2 JPH0355483 B2 JP H0355483B2 JP 7679487 A JP7679487 A JP 7679487A JP 7679487 A JP7679487 A JP 7679487A JP H0355483 B2 JPH0355483 B2 JP H0355483B2
- Authority
- JP
- Japan
- Prior art keywords
- group
- photocurable resin
- electron
- radical generator
- substituent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003999 initiator Substances 0.000 claims description 17
- 239000011342 resin composition Substances 0.000 claims description 15
- 239000000203 mixture Substances 0.000 claims description 10
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 10
- 125000001424 substituent group Chemical group 0.000 claims description 10
- 150000001875 compounds Chemical class 0.000 claims description 8
- GZEFZLXJPGMRSP-UHFFFAOYSA-N 37,38,39,40-tetrazanonacyclo[28.6.1.13,10.112,19.121,28.04,9.013,18.022,27.031,36]tetraconta-1(37),2,4,6,8,10,12(39),13,15,17,19,21,23,25,27,29,31,33,35-nonadecaene Chemical compound c1ccc2c3cc4[nH]c(cc5nc(cc6[nH]c(cc(n3)c2c1)c1ccccc61)c1ccccc51)c1ccccc41 GZEFZLXJPGMRSP-UHFFFAOYSA-N 0.000 claims description 7
- 125000000217 alkyl group Chemical group 0.000 claims description 7
- 150000004696 coordination complex Chemical class 0.000 claims description 7
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical group C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 claims description 6
- 125000003118 aryl group Chemical group 0.000 claims description 5
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 4
- 238000002848 electrochemical method Methods 0.000 claims description 3
- 229920005989 resin Polymers 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims description 3
- -1 triazine compound Chemical class 0.000 description 15
- 239000000463 material Substances 0.000 description 12
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 9
- 206010034972 Photosensitivity reaction Diseases 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 230000036211 photosensitivity Effects 0.000 description 8
- 229920000642 polymer Polymers 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- 150000003839 salts Chemical class 0.000 description 5
- 125000004429 atom Chemical group 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical compound [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 125000005520 diaryliodonium group Chemical group 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 125000005843 halogen group Chemical group 0.000 description 3
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 3
- 125000001624 naphthyl group Chemical group 0.000 description 3
- 150000004032 porphyrins Chemical class 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 2
- AZQWKYJCGOJGHM-UHFFFAOYSA-N 1,4-benzoquinone Chemical compound O=C1C=CC(=O)C=C1 AZQWKYJCGOJGHM-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- 206010070834 Sensitisation Diseases 0.000 description 2
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 2
- 229910052793 cadmium Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 125000004076 pyridyl group Chemical group 0.000 description 2
- 230000027756 respiratory electron transport chain Effects 0.000 description 2
- 230000008313 sensitization Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 125000005537 sulfoxonium group Chemical group 0.000 description 2
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- DNIAPMSPPWPWGF-VKHMYHEASA-N (+)-propylene glycol Chemical compound C[C@H](O)CO DNIAPMSPPWPWGF-VKHMYHEASA-N 0.000 description 1
- VPQAFOWBKWKVQQ-UHFFFAOYSA-N (4-methoxyphenyl)methyl-phenyliodanium Chemical compound C1=CC(OC)=CC=C1C[I+]C1=CC=CC=C1 VPQAFOWBKWKVQQ-UHFFFAOYSA-N 0.000 description 1
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical group C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 1
- YHMYGUUIMTVXNW-UHFFFAOYSA-N 1,3-dihydrobenzimidazole-2-thione Chemical compound C1=CC=C2NC(S)=NC2=C1 YHMYGUUIMTVXNW-UHFFFAOYSA-N 0.000 description 1
- YPFDHNVEDLHUCE-UHFFFAOYSA-N 1,3-propanediol Substances OCCCO YPFDHNVEDLHUCE-UHFFFAOYSA-N 0.000 description 1
- NCTJLYBMQJZUQP-UHFFFAOYSA-N 1-(4-chlorophenyl)-2-sulfanylethanone Chemical compound SCC(=O)C1=CC=C(Cl)C=C1 NCTJLYBMQJZUQP-UHFFFAOYSA-N 0.000 description 1
- CCHRVFZBKRIKIX-UHFFFAOYSA-N 1-nitro-3-(3-nitrophenyl)benzene Chemical compound [O-][N+](=O)C1=CC=CC(C=2C=C(C=CC=2)[N+]([O-])=O)=C1 CCHRVFZBKRIKIX-UHFFFAOYSA-N 0.000 description 1
- DIYFBIOUBFTQJU-UHFFFAOYSA-N 1-phenyl-2-sulfanylethanone Chemical class SCC(=O)C1=CC=CC=C1 DIYFBIOUBFTQJU-UHFFFAOYSA-N 0.000 description 1
- RICRAVHJCLFPFF-UHFFFAOYSA-N 2,4,6-tris(chloromethyl)-1,3,5-triazine Chemical compound ClCC1=NC(CCl)=NC(CCl)=N1 RICRAVHJCLFPFF-UHFFFAOYSA-N 0.000 description 1
- SDSMQJYIBMHORW-UHFFFAOYSA-N 2,4,6-tris(trichloromethyl)-1h-triazine Chemical compound ClC(Cl)(Cl)N1NC(C(Cl)(Cl)Cl)=CC(C(Cl)(Cl)Cl)=N1 SDSMQJYIBMHORW-UHFFFAOYSA-N 0.000 description 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- XHSCAKZNLQMGHQ-UHFFFAOYSA-N 2-[keto(dimethyl)sulfuraniumyl]-1-phenyl-ethanone Chemical class C[S+](C)(=O)CC(=O)C1=CC=CC=C1 XHSCAKZNLQMGHQ-UHFFFAOYSA-N 0.000 description 1
- DCKBLZSETFJGRS-UHFFFAOYSA-N 2-[keto(diphenyl)sulfuraniumyl]-1-phenyl-ethanone Chemical compound C=1C=CC=CC=1C(=O)C[S+](=O)(C=1C=CC=CC=1)C1=CC=CC=C1 DCKBLZSETFJGRS-UHFFFAOYSA-N 0.000 description 1
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 1
- IWTYTFSSTWXZFU-UHFFFAOYSA-N 3-chloroprop-1-enylbenzene Chemical group ClCC=CC1=CC=CC=C1 IWTYTFSSTWXZFU-UHFFFAOYSA-N 0.000 description 1
- HUNNTRBJLDQJMD-UHFFFAOYSA-N 4,5,6-tris(tribromomethyl)triazine Chemical compound BrC(Br)(Br)C1=C(C(=NN=N1)C(Br)(Br)Br)C(Br)(Br)Br HUNNTRBJLDQJMD-UHFFFAOYSA-N 0.000 description 1
- JRSSEKWRPPNHIT-UHFFFAOYSA-N 6-methyl-2,4-bis(trichloromethyl)-1h-triazine Chemical compound CC1=CC(C(Cl)(Cl)Cl)=NN(C(Cl)(Cl)Cl)N1 JRSSEKWRPPNHIT-UHFFFAOYSA-N 0.000 description 1
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
- 229910017008 AsF 6 Inorganic materials 0.000 description 1
- NJQFCQXFOHVYQJ-PMACEKPBSA-N BF 4 Chemical compound C1([C@@H]2CC(=O)C=3C(O)=C(C)C4=C(C=3O2)[C@H](C(C)C)C2=C(O4)C(C)=C(C(C2=O)(C)C)OC)=CC=CC=C1 NJQFCQXFOHVYQJ-PMACEKPBSA-N 0.000 description 1
- FBPFZTCFMRRESA-FSIIMWSLSA-N D-Glucitol Natural products OC[C@H](O)[C@H](O)[C@@H](O)[C@H](O)CO FBPFZTCFMRRESA-FSIIMWSLSA-N 0.000 description 1
- FBPFZTCFMRRESA-KVTDHHQDSA-N D-Mannitol Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@H](O)CO FBPFZTCFMRRESA-KVTDHHQDSA-N 0.000 description 1
- FBPFZTCFMRRESA-JGWLITMVSA-N D-glucitol Chemical compound OC[C@H](O)[C@@H](O)[C@H](O)[C@H](O)CO FBPFZTCFMRRESA-JGWLITMVSA-N 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- QZRGKCOWNLSUDK-UHFFFAOYSA-N Iodochlorine Chemical compound ICl QZRGKCOWNLSUDK-UHFFFAOYSA-N 0.000 description 1
- 229930195725 Mannitol Natural products 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical group COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 1
- WHNWPMSKXPGLAX-UHFFFAOYSA-N N-Vinyl-2-pyrrolidone Chemical compound C=CN1CCCC1=O WHNWPMSKXPGLAX-UHFFFAOYSA-N 0.000 description 1
- WHFRZILVNPDDGV-UHFFFAOYSA-N O=C(C[SH]=O)C1=CC=CC=C1 Chemical class O=C(C[SH]=O)C1=CC=CC=C1 WHFRZILVNPDDGV-UHFFFAOYSA-N 0.000 description 1
- ALQSHHUCVQOPAS-UHFFFAOYSA-N Pentane-1,5-diol Chemical compound OCCCCCO ALQSHHUCVQOPAS-UHFFFAOYSA-N 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 125000003545 alkoxy group Chemical group 0.000 description 1
- 125000004453 alkoxycarbonyl group Chemical group 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 150000008365 aromatic ketones Chemical class 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 230000006399 behavior Effects 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- MWPUSWNISCYUNR-UHFFFAOYSA-N bis(3-nitrophenyl)iodanium Chemical compound [O-][N+](=O)C1=CC=CC([I+]C=2C=C(C=CC=2)[N+]([O-])=O)=C1 MWPUSWNISCYUNR-UHFFFAOYSA-N 0.000 description 1
- DNFSNYQTQMVTOK-UHFFFAOYSA-N bis(4-tert-butylphenyl)iodanium Chemical compound C1=CC(C(C)(C)C)=CC=C1[I+]C1=CC=C(C(C)(C)C)C=C1 DNFSNYQTQMVTOK-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 125000004093 cyano group Chemical group *C#N 0.000 description 1
- FOTKYAAJKYLFFN-UHFFFAOYSA-N decane-1,10-diol Chemical compound OCCCCCCCCCCO FOTKYAAJKYLFFN-UHFFFAOYSA-N 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- JTNDNBUJMQNEGL-UHFFFAOYSA-N dimethyl(phenacyl)sulfanium Chemical compound C[S+](C)CC(=O)C1=CC=CC=C1 JTNDNBUJMQNEGL-UHFFFAOYSA-N 0.000 description 1
- OZLBDYMWFAHSOQ-UHFFFAOYSA-N diphenyliodanium Chemical compound C=1C=CC=CC=1[I+]C1=CC=CC=C1 OZLBDYMWFAHSOQ-UHFFFAOYSA-N 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- XXMIOPMDWAUFGU-UHFFFAOYSA-N hexane-1,6-diol Chemical compound OCCCCCCO XXMIOPMDWAUFGU-UHFFFAOYSA-N 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 239000000976 ink Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 150000002605 large molecules Chemical class 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 229920002521 macromolecule Polymers 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- 239000000594 mannitol Substances 0.000 description 1
- 235000010355 mannitol Nutrition 0.000 description 1
- DZVCFNFOPIZQKX-LTHRDKTGSA-M merocyanine Chemical compound [Na+].O=C1N(CCCC)C(=O)N(CCCC)C(=O)C1=C\C=C\C=C/1N(CCCS([O-])(=O)=O)C2=CC=CC=C2O\1 DZVCFNFOPIZQKX-LTHRDKTGSA-M 0.000 description 1
- FQPSGWSUVKBHSU-UHFFFAOYSA-N methacrylamide Chemical compound CC(=C)C(N)=O FQPSGWSUVKBHSU-UHFFFAOYSA-N 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- CXKWCBBOMKCUKX-UHFFFAOYSA-M methylene blue Chemical compound [Cl-].C1=CC(N(C)C)=CC2=[S+]C3=CC(N(C)C)=CC=C3N=C21 CXKWCBBOMKCUKX-UHFFFAOYSA-M 0.000 description 1
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 1
- 229960000907 methylthioninium chloride Drugs 0.000 description 1
- 239000012046 mixed solvent Substances 0.000 description 1
- OMNKZBIFPJNNIO-UHFFFAOYSA-N n-(2-methyl-4-oxopentan-2-yl)prop-2-enamide Chemical compound CC(=O)CC(C)(C)NC(=O)C=C OMNKZBIFPJNNIO-UHFFFAOYSA-N 0.000 description 1
- KKFHAJHLJHVUDM-UHFFFAOYSA-N n-vinylcarbazole Chemical compound C1=CC=C2N(C=C)C3=CC=CC=C3C2=C1 KKFHAJHLJHVUDM-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000001451 organic peroxides Chemical class 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 125000003367 polycyclic group Chemical group 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000166 polytrimethylene carbonate Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- GGCZERPQGJTIQP-UHFFFAOYSA-N sodium;9,10-dioxoanthracene-2-sulfonic acid Chemical compound [Na+].C1=CC=C2C(=O)C3=CC(S(=O)(=O)O)=CC=C3C(=O)C2=C1 GGCZERPQGJTIQP-UHFFFAOYSA-N 0.000 description 1
- 239000000600 sorbitol Substances 0.000 description 1
- 125000001174 sulfone group Chemical group 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 125000003944 tolyl group Chemical group 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- 238000006276 transfer reaction Methods 0.000 description 1
- 150000003918 triazines Chemical class 0.000 description 1
- 125000004953 trihalomethyl group Chemical group 0.000 description 1
- QXJQHYBHAIHNGG-UHFFFAOYSA-N trimethylolethane Chemical compound OCC(C)(CO)CO QXJQHYBHAIHNGG-UHFFFAOYSA-N 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/029—Inorganic compounds; Onium compounds; Organic compounds having hetero atoms other than oxygen, nitrogen or sulfur
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Polymerisation Methods In General (AREA)
Description
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INDUSTRIAL APPLICATION FIELD The present invention relates to a novel photocurable resin composition. More specifically, the present invention relates to a photocurable resin composition containing a specific photopolymerization initiator, which is particularly suitable as an image forming material by laser beam scanning. Background Art In recent years, photocurable resin compositions have attracted attention not only as materials for photoresists, inks, paints, varnishes, and printing plates, but also as image-forming materials that use laser light and photosensitive materials that replace silver salts. has been done. In the photocurable resin composition used as such a material, it is important for its performance to increase the photosensitive speed as much as possible, and many studies have been conducted for this purpose. However, most of the research to date has focused on photopolymerization initiators that are active in ultraviolet light, and conventional ones have insufficient photosensitivity for laser beams, so they are not suitable for laser beam scanning. Therefore, in order to form images, it was necessary to expand the photosensitive wavelength range and dramatically increase the photosensitive speed. Conventionally, photopolymerizable resins sensitive to visible light have been prepared using various compositions, such as S having at least one trihalomethyl group and at least one chromophore moiety, in which an ethylenically unsaturated compound and a triazine ring are conjugated. -Those using a triazine compound as a photopolymerization initiator (Japanese Patent Application Laid-open No. 1973-36281), those using an unsaturated ketone conjugated with p-dialkylaminoallylidene as a photopolymerization initiator (Japanese Patent Laid-Open No. 155292-1989) Publications), those using a combination of a polycyclic quinone and a tertiary amine as a photopolymerization initiator (Japanese Unexamined Patent Publication No. 134692/1983), and those using an organic peroxide such as 1,10-oxyester and a thiapyrylium salt as a photopolymerization initiator. Photopolymerization initiators [Journal of the Chemical Society of Japan, No. 1, page 119 (1985
2003)], merocyanine dye or aromatic ketones and 2,4,6-trichloromethyl-1,3,5-triazine and 2-mercaptobenzimidazole as photopolymerization initiators [Journal of the Chemical Society of Japan, Vol.
No. 192 (1984)] have been proposed. However, although all of these photocurable resin compositions exhibit photosensitivity to light with longer wavelengths than conventional ones, they have low or almost no photosensitivity to long wavelengths of 600 nm or more. Another drawback is that it is not possible to use light sources such as HE-Ne lasers (633 nm) and semiconductor lasers (780 nm or more), which are advantageous in that they are small and stable, as laser light sources. On the other hand, a photocurable composition consisting of methylene blue, p-toluenesulfonic acid, and barium acrylate, which exhibits high photosensitivity to He-Ne lasers, has been proposed.ã»Engineering (Photogr.Sci.Eng.), Vol. 12, Page 177 (1968)], this material has the disadvantage of being water-soluble and not suitable for oil-soluble resin compositions. In addition, as an oil-soluble photocurable resin composition that is sensitive to long wavelength light sources such as He-Ne lasers or semiconductor lasers, combinations of porphyrins, azaporphyrins, or their metal complexes and diaryliodonium salts can be used. A composition using as a photopolymerization initiator has been proposed.
78422), these porphyrins have low photosensitivity to long wavelength light, and azaporphyrins such as phthalocyanines have low sensitization efficiency. In order to use it as a silver salt substitute material, even higher photosensitivity is desired. Problems to be Solved by the Invention The present invention overcomes the drawbacks of such conventional photocurable resin compositions, has excellent photosensitivity to long wavelength light of 600 nm or more, and has He-Ne The purpose of this invention is to provide a photocurable resin composition that can use light sources such as lasers and semiconductor lasers. Means for Solving the Problems As a result of extensive research to develop a photocurable resin composition that has excellent photosensitivity to long wavelength light of 600 nm or more, the present inventors found that photopolymerization started. It has been discovered that the above object can be achieved by using a combination of a tetrabenzoporphyrin with a specific structure or a metal complex thereof and an electron-accepting radical generator as an agent, and based on this knowledge, the present invention has been developed. It was completed. That is, the present invention provides (A) a compound having at least one polymerizable ethylenically unsaturated bond; and (B)
In the photocurable resin composition comprising a photopolymerization initiator, as the photopolymerization initiator, (a) the general formula (R in the formula is a hydrogen atom, an alkyl group, or an aromatic residue with or without a substituent, and each benzene ring may or may not have a substituent, and A photocurable resin characterized by using a combination of a tetrabenzoporphyrin (which may have another condensed benzene ring) or a metal complex thereof, and (b) an electron-accepting radical generator. A composition is provided. The present invention will be explained in detail below. In the composition of the present invention, at least one polymerizable ethylenically unsaturated bond used as component (A)
In addition to vinyl monomers, compounds having
It may be an oligomer or a high molecular weight compound, such as acrylic acid, methacrylic acid, itaconic acid, maleic acid, acrylamide, methacrylamide, diacetone acrylamide, 2-hydroxyethyl acrylate, N-
High-boiling monomers such as vinyl carbazole and N-vinylpyrrolidone, ethylene glycol, diethylene glycol, 1,3-propanediol,
di- or polyacrylic esters or polymethacrylic esters such as 1,4-butanediol, 1,5-pentanediol, 1,6-hexanediol, 1,10-decanediol, trimethylolethane, pentaerythritol, sorbitol, mannitol, Other examples include, but are not limited to, acrylated or methacrylated epoxy resins, polyester acrylate oligomers, acrylated or methacrylated urethane oligomers, and acroleinated polyvinyl alcohol. As the photopolymerization initiator of component (B) in the composition of the present invention, one consisting of a combination of a tetrabenzoporphyrin represented by the above general formula () or a metal complex thereof and an electron-accepting radical generator is used. It will be done. R in the tetrabenzoporphyrins represented by the general formula () is a hydrogen atom, an alkyl group, or an aromatic residue such as a phenyl group, a naphthyl group, or a pyridyl group, and this aromatic residue has no substituent. It may have a substituent or it may have no substituent. Each benzene ring may or may not have a substituent, and examples of the substituent include a halogen atom, a lower alkyl group having 1 to 5 carbon atoms, a lower alkoxy group, an alkoxycarbonyl group,
Examples include carboxyl group, nitro group, amino group, sulfone group, etc., and one or more of these substituents may be introduced into each benzene ring. Furthermore, each benzene ring may be fused with another benzene ring to form a naphthalene ring. Specific examples of such tetrabenzoporphyrins include unsubstituted tetrabenzoporphyrin, meso-phenyl group tetrabenzoporphyrin in which at least one meso position is substituted with a phenyl group, and naphthyl group in which at least one meso position is substituted with a phenyl group. meso-naphthyltetrabenzoporphyrin substituted with a group, meso-pyridyltetrabenzoporphyrin substituted with a pyridyl group in at least one meso position, 5,5â²,5â³,5-tetra-t-butyltetrabenzo Porphyrin, 4, 6, 4â², 6â², 4â³, 6â³,
4,6-octamethyltetrabenzoporphyrin, 5,5â²,5â³,5-tetraethoxytetrabenzoporphyrin, meso-methyltetrabenzoporphyrin substituted with a methyl group at least one meso position, meso position meso-benzyltetrabenzoporphyrin in which at least one of the meso positions is substituted with a benzyl group, meso-tolyltetrabenzoporphyrin in which at least one meso position is substituted with a tolyl group, and tetranaphthoporphyrin in which a benzene ring is further bonded as a condensed ring. Examples of metal complexes of tetrabenzoporphyrins include the above-mentioned tetrabenzoporphyrins and Mg, Zn, Cd, Pd, Ni, Co, Cu, Pb
complexes with divalent metal atoms such as Al, In, etc. with vertically coordinated hydroxyl groups and halogen atoms,
Examples include complexes with trivalent metal atoms such as Ga, Fe, and Cr or tetravalent metal atoms such as Si and Sn, and complexes with tetravalent metal atoms such as V and Ti coordinated with oxygen atoms. I can do it. On the other hand, as the electron-accepting radical generator, which is another component constituting the photopolymerization initiator, a compound exhibiting a reduction potential of -1.5 eV or more in electrochemical measurement is particularly preferably used. Such compounds have the general formula (R 1 and R 2 in the formula are a hydrogen atom, a halogen atom, a lower alkyl group, a methoxy group, a cyano group, or a nitro group, respectively, X - is a halogen ion, BF 4 ,
Diaryliodonium salt represented by PF 6 or AsF 6 [Macromolecules No. 10,
Page 1307 (1977)], general formula (In the formula, R 3 and R 4 are each an alkyl group, and R 1 and X - have the same meaning as above.)
Polym.Sci) Volume 17, Page 2877 (1979)],
general formula (R 5 and R 6 in the formula are each an alkyl group or an aryl group, R 1 and X - have the same meanings as above)
Phenacyl sulfoxonium salt represented by (European Patent No. 44274), general formula (R 1 , R 5 , R 6 and X - in the formula have the same meanings as above) A sulfoxonium salt represented by (In the formula, R 7 , R 8 and R 9 are each a methyl group or a trihalogenated methyl group.) Triazine compounds represented by the following can be mentioned. Examples of diaryliodonium salts represented by the general formula () include diphenyliodonium, ditolyliodonium, phenyl(p-anisyl)iodonium, bis(m-nitrophenyl)iodonium, and bis(p-tert-butylphenyl)iodonium. Examples of the phenacylsulfonium salts represented by the general formula () include iodonium chloride, bromide, borofluoride salt, hexafluorophosphate salt, hexafluoroarsenate salt, etc., such as dimethylphenacylsulfonium, phenacyltetramethylenesulfonium, Examples of the phenacylsulfoxonium salt represented by the general formula () include chloride, bromide, tetrafluoroborate salt, hexafluorophosphate salt, hexafluoroarsenate salt, etc. such as p-chlorophenacylsulfonium.
For example, dimethylphenacyl sulfoxonium salt,
chloride, bromide, and tetrafluoroporate salts such as diphenyl phenacyl sulfoxonium;
Sulfoxonium salts represented by the general formula () include hexafluorophosphate salts, hexafluoroarsenate salts, etc.; Examples of the triazine compound represented by the general formula () include fluoroborate salt, hexafluorophosphate salt, hexafluoroarsenate salt, etc., such as 2,4,6-tris(trichloromethyl)triazine, 2,4,6- Examples include tris(tribromomethyl)triazine, 2,4-bis(trichloromethyl)-6-methyltriazine, and the like. Regarding the usage ratio of the ethylenically unsaturated compound as the component (A) and the photopolymerization initiator as the component (B) in the composition of the present invention, the weight of the tetrabenzoporphyrin or its metal complex and the ethylenically unsaturated compound is determined. The ratio is usually chosen to be in the range 1:5 to 1:500. The ratio of the tetrabenzoporphyrins or their metal complexes to the electron-accepting radical generator is usually such that the weight ratio is 10:1 to 1:10, preferably 2:1 to 1:5. Selected based on percentage. If desired, the photocurable resin composition of the present invention may contain various additives conventionally used in photocurable resin compositions, such as binders, thermal polymerization inhibitors, plasticizers, and the like. Effect The mechanism of sensitized decomposition of the electron-accepting radical generator by tetrabenzoporphyrins or its metal complex in the composition of the present invention is not necessarily clear, but the excitation formed by the sensitizer and the initiator Due to the electron transfer reaction from the plexus [The Journal of Imaging Technology (J.Imaging.Tech.) Vol. 11, No. 4, No.
Page 146 (1985)], a certain degree of explanation is possible. In other words, the oxidation potential in electrochemical measurements of tetrabenzoporphyrins or their metal complexes is approximately in the range of 0.5 eV to 1.0 eV, and the excitation energy level is
Since it is in the range of 1.5 eV to 2.0 eV, if the reduction potential of the electron-accepting radical generator that is sensitized and decomposed by electron transfer is lower than -1.5 eV, the formula â³G = (Eox - Ered) -Eex...() (Eox is the oxidation potential of the tetrabenzoporphyrins or its metal complex, Ered is the reduction potential of the radical generator, Eex is the excitation energy level of the tetrabenzoporphyrins, â³G is free ÎG, which is an energy change), has a positive value. A positive value of ÎG indicates that the reaction system is endothermic, and means that the electron-accepting radical generator is difficult to be decomposed by sensitization. Effects of the Invention The photocurable resin composition of the present invention can be used as a light source,
In addition to being able to use high-pressure mercury lamps, ultra-high-pressure mercury lamps, high-pressure xenon lamps, halogen lamps, fluorescent lamps, etc., it shows high sensitivity to long wavelength light of 600 nm or more, and is particularly sensitive to industrially useful laser light.
Gas lasers such as He-Cd, Ar, He-Ne, and Kr, and semiconductor lasers of Ga, Al, and As can be used because they exhibit extremely high sensitivity of 0.1 mJ/cm 2 to several mJ/cm 2 In addition, since it does not exhibit reciprocity law failure behavior that is likely to occur especially when exposed to high-intensity irradiation, it can be used for image forming materials by laser beam scanning, such as plate-making materials for lithography and letterpress, photoresists for printed wiring plates, materials for creating dry film reliefs, and non-silver salts. It can be applied to a wide range of fields, such as image creation materials and photosensitive materials for holograms. Examples Next, the present invention will be explained in more detail with reference to Examples, but the present invention is not limited to these Examples in any way. Examples 1 to 4 Copolymers having chloromethylstyrene units and methyl methacrylate units in a molar ratio of 1:1
1.35g and 3,4-dihydro-2H-pyran-2
- After reacting 1.86 g of sodium carboxylate in 20 ml of dimethylacetamide at 60 to 80°C for 1 hour, the reaction solution was poured into a mixed solvent of water and methanol (weight ratio 2:1), and the polymer was precipitated. This polymer was filtered off, thoroughly washed with methanol, dissolved in dioxane, and purified by precipitation in methanol. The resulting polymer was dissolved in dioxane,
A solution with a concentration of 5% by weight was prepared, and diphenyliodonium hexafluorophosphate having a reduction potential of -0.26 eV and various tetrabenzoporphyrins shown in Table 1 were each added at 4% by weight based on the polymer. A photosensitive solution was prepared. Next, this solution was spin-coated onto an anodized aluminum plate to a thickness of about 1 ÎŒm.
A 122 mW/wave with a beam diameter of 1.0 mm is applied to this photosensitive layer.
We irradiate a He-Ne laser beam of 633 nm in cm 2 and measure the amount of energy that gives the same diameter as the beam diameter.
Sensitivity was determined. The results are shown in Table 1.
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ã«ç€ºãã[Table] Examples 5 to 8 Meso-phenyltetrabenzoporphyrin zinc complex and various electron-accepting radical generators shown in Table 2 were added to polymer solutions prepared in the same manner as in Examples 1 to 4, respectively. 4% by weight based on polymer
After each addition was made to prepare a photosensitive solution, it was evaluated in the same manner as in Examples 1 to 4. The results are shown in Table 2.
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Claims (1)
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ç©ã[Scope of Claims] 1. A photocurable resin composition comprising (A) a compound having at least one polymerizable ethylenically unsaturated bond, and (B) a photopolymerization initiator; As an initiator, (a) general formula (R in the formula is a hydrogen atom, an alkyl group, or an aromatic residue with or without a substituent, and each benzene ring may or may not have a substituent, and A photocurable resin characterized by using a combination of a tetrabenzoporphyrin (which may have another condensed benzene ring) or a metal complex thereof, and (b) an electron-accepting radical generator. Composition. 2. The composition according to claim 1, wherein the electron-accepting radical generator exhibits a reduction potential of -1.5 eV or more in electrochemical measurements.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7679487A JPS63243102A (en) | 1987-03-30 | 1987-03-30 | Photo-setting resin composition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7679487A JPS63243102A (en) | 1987-03-30 | 1987-03-30 | Photo-setting resin composition |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63243102A JPS63243102A (en) | 1988-10-11 |
JPH0355483B2 true JPH0355483B2 (en) | 1991-08-23 |
Family
ID=13615538
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7679487A Granted JPS63243102A (en) | 1987-03-30 | 1987-03-30 | Photo-setting resin composition |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63243102A (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03278082A (en) * | 1990-03-27 | 1991-12-09 | Agency Of Ind Science & Technol | Photosensitive material for hologram recording |
JP2005300908A (en) * | 2004-04-12 | 2005-10-27 | Konica Minolta Medical & Graphic Inc | Photosensitive composition and photosensitive lithographic printing plate material |
-
1987
- 1987-03-30 JP JP7679487A patent/JPS63243102A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS63243102A (en) | 1988-10-11 |
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