JPH0355408B2 - - Google Patents

Info

Publication number
JPH0355408B2
JPH0355408B2 JP16089286A JP16089286A JPH0355408B2 JP H0355408 B2 JPH0355408 B2 JP H0355408B2 JP 16089286 A JP16089286 A JP 16089286A JP 16089286 A JP16089286 A JP 16089286A JP H0355408 B2 JPH0355408 B2 JP H0355408B2
Authority
JP
Japan
Prior art keywords
catalyst
reaction
tetrachlorosilane
silica
trichlorosilane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16089286A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6325211A (ja
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chiyoda Corp
Original Assignee
Chiyoda Chemical Engineering and Construction Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chiyoda Chemical Engineering and Construction Co Ltd filed Critical Chiyoda Chemical Engineering and Construction Co Ltd
Priority to JP16089286A priority Critical patent/JPS6325211A/ja
Priority to DE8787109942T priority patent/DE3782213T2/de
Priority to EP87109942A priority patent/EP0255877B1/en
Priority to US07/071,964 priority patent/US4956326A/en
Publication of JPS6325211A publication Critical patent/JPS6325211A/ja
Publication of JPH0355408B2 publication Critical patent/JPH0355408B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
  • Catalysts (AREA)
JP16089286A 1986-07-10 1986-07-10 トリクロロシランの製造方法 Granted JPS6325211A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP16089286A JPS6325211A (ja) 1986-07-10 1986-07-10 トリクロロシランの製造方法
DE8787109942T DE3782213T2 (de) 1986-07-10 1987-07-09 Verfahren zur enthalogenierung eines halogenids und katalysator hierfuer.
EP87109942A EP0255877B1 (en) 1986-07-10 1987-07-09 Method for dehalogenation of a halide and catalyst used therefor
US07/071,964 US4956326A (en) 1986-07-10 1987-07-10 Method for dehalogenation of a halide and catalyst used therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16089286A JPS6325211A (ja) 1986-07-10 1986-07-10 トリクロロシランの製造方法

Publications (2)

Publication Number Publication Date
JPS6325211A JPS6325211A (ja) 1988-02-02
JPH0355408B2 true JPH0355408B2 (cg-RX-API-DMAC7.html) 1991-08-23

Family

ID=15724619

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16089286A Granted JPS6325211A (ja) 1986-07-10 1986-07-10 トリクロロシランの製造方法

Country Status (1)

Country Link
JP (1) JPS6325211A (cg-RX-API-DMAC7.html)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2667516B2 (ja) * 1989-06-19 1997-10-27 日本トムソン株式会社 有限直動案内ユニット
JPH0312616U (cg-RX-API-DMAC7.html) * 1989-06-22 1991-02-08
DE102005046703A1 (de) * 2005-09-29 2007-04-05 Wacker Chemie Ag Verfahren und Vorrichtung zur Hydrierung von Chlorsilanen
WO2008062629A1 (fr) * 2006-11-21 2008-05-29 Mitsubishi Materials Corporation Appareil pour la fabrication de trichlorosilane
KR101291840B1 (ko) 2009-12-28 2013-07-31 가부시키가이샤 나카타 세이사쿠쇼 턱스 헤드 스탠드
DE102010000980A1 (de) * 2010-01-18 2011-07-21 Evonik Degussa GmbH, 45128 Katalytische Systeme zur kontinuierlichen Umsetzung von Siliciumtetrachlorid zu Trichlorsilan
BR112013013894A2 (pt) * 2010-12-17 2016-09-13 Dow Corning método para fabricação de um tri-halossilano

Also Published As

Publication number Publication date
JPS6325211A (ja) 1988-02-02

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