JPH0354774U - - Google Patents
Info
- Publication number
- JPH0354774U JPH0354774U JP11265489U JP11265489U JPH0354774U JP H0354774 U JPH0354774 U JP H0354774U JP 11265489 U JP11265489 U JP 11265489U JP 11265489 U JP11265489 U JP 11265489U JP H0354774 U JPH0354774 U JP H0354774U
- Authority
- JP
- Japan
- Prior art keywords
- base portion
- coating
- coating liquid
- discharge portion
- coating nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011248 coating agent Substances 0.000 claims description 8
- 238000000576 coating method Methods 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
Landscapes
- Nozzles (AREA)
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989112654U JPH0632873Y2 (ja) | 1989-09-26 | 1989-09-26 | 自動シリコン塗布装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989112654U JPH0632873Y2 (ja) | 1989-09-26 | 1989-09-26 | 自動シリコン塗布装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0354774U true JPH0354774U (xx) | 1991-05-27 |
| JPH0632873Y2 JPH0632873Y2 (ja) | 1994-08-31 |
Family
ID=31661097
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989112654U Expired - Lifetime JPH0632873Y2 (ja) | 1989-09-26 | 1989-09-26 | 自動シリコン塗布装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0632873Y2 (xx) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100719999B1 (ko) * | 2005-12-09 | 2007-05-21 | 두영전자 주식회사 | 실리콘 도포장치 및 방법 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63193545U (xx) * | 1987-05-30 | 1988-12-13 |
-
1989
- 1989-09-26 JP JP1989112654U patent/JPH0632873Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63193545U (xx) * | 1987-05-30 | 1988-12-13 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0632873Y2 (ja) | 1994-08-31 |