JPH0354285B2 - - Google Patents
Info
- Publication number
- JPH0354285B2 JPH0354285B2 JP8980683A JP8980683A JPH0354285B2 JP H0354285 B2 JPH0354285 B2 JP H0354285B2 JP 8980683 A JP8980683 A JP 8980683A JP 8980683 A JP8980683 A JP 8980683A JP H0354285 B2 JPH0354285 B2 JP H0354285B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- fixed plate
- transmitting
- noise
- receiving electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 claims description 38
- 230000008878 coupling Effects 0.000 claims description 15
- 238000010168 coupling process Methods 0.000 claims description 15
- 238000005859 coupling reaction Methods 0.000 claims description 15
- 238000002955 isolation Methods 0.000 claims description 2
- 239000003990 capacitor Substances 0.000 description 14
- 238000001514 detection method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000011109 contamination Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8980683A JPS59214713A (ja) | 1983-05-20 | 1983-05-20 | 静電容量型変位検出器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8980683A JPS59214713A (ja) | 1983-05-20 | 1983-05-20 | 静電容量型変位検出器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59214713A JPS59214713A (ja) | 1984-12-04 |
| JPH0354285B2 true JPH0354285B2 (de) | 1991-08-19 |
Family
ID=13980960
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8980683A Granted JPS59214713A (ja) | 1983-05-20 | 1983-05-20 | 静電容量型変位検出器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59214713A (de) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0660823B2 (ja) * | 1989-04-12 | 1994-08-10 | 株式会社ミツトヨ | 静電容量型変位検出器 |
| JPH07111355B2 (ja) * | 1991-01-16 | 1995-11-29 | 株式会社ミツトヨ | 静電容量形変位測定装置 |
| JP2006047135A (ja) * | 2004-08-05 | 2006-02-16 | Olympus Corp | 静電エンコーダ |
| CN108195293B (zh) * | 2018-03-26 | 2024-05-10 | 磐石电气（常州）有限公司 | 一种数字式位移传感器及其位移测量方法 |
-
1983
- 1983-05-20 JP JP8980683A patent/JPS59214713A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59214713A (ja) | 1984-12-04 |
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