JPH0353835U - - Google Patents
Info
- Publication number
- JPH0353835U JPH0353835U JP11485589U JP11485589U JPH0353835U JP H0353835 U JPH0353835 U JP H0353835U JP 11485589 U JP11485589 U JP 11485589U JP 11485589 U JP11485589 U JP 11485589U JP H0353835 U JPH0353835 U JP H0353835U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust port
- control device
- pressure control
- heat treatment
- treatment apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11485589U JPH0353835U (de) | 1989-09-29 | 1989-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11485589U JPH0353835U (de) | 1989-09-29 | 1989-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0353835U true JPH0353835U (de) | 1991-05-24 |
Family
ID=31663203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11485589U Pending JPH0353835U (de) | 1989-09-29 | 1989-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0353835U (de) |
-
1989
- 1989-09-29 JP JP11485589U patent/JPH0353835U/ja active Pending