JPS6275824U - - Google Patents
Info
- Publication number
- JPS6275824U JPS6275824U JP15728785U JP15728785U JPS6275824U JP S6275824 U JPS6275824 U JP S6275824U JP 15728785 U JP15728785 U JP 15728785U JP 15728785 U JP15728785 U JP 15728785U JP S6275824 U JPS6275824 U JP S6275824U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- impurity removal
- clean
- utility
- temperature control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012535 impurity Substances 0.000 claims description 2
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 239000000498 cooling water Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Separating Particles In Gases By Inertia (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15728785U JPS6275824U (de) | 1985-10-14 | 1985-10-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15728785U JPS6275824U (de) | 1985-10-14 | 1985-10-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6275824U true JPS6275824U (de) | 1987-05-15 |
Family
ID=31079691
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15728785U Pending JPS6275824U (de) | 1985-10-14 | 1985-10-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6275824U (de) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5232497A (en) * | 1975-09-08 | 1977-03-11 | Hitachi Ltd | Combination of separators |
JPS5448384A (en) * | 1977-09-22 | 1979-04-16 | Nippon Steel Corp | Separating method of mixed gas into each composition gas |
-
1985
- 1985-10-14 JP JP15728785U patent/JPS6275824U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5232497A (en) * | 1975-09-08 | 1977-03-11 | Hitachi Ltd | Combination of separators |
JPS5448384A (en) * | 1977-09-22 | 1979-04-16 | Nippon Steel Corp | Separating method of mixed gas into each composition gas |