JPH0353833U - - Google Patents

Info

Publication number
JPH0353833U
JPH0353833U JP11529789U JP11529789U JPH0353833U JP H0353833 U JPH0353833 U JP H0353833U JP 11529789 U JP11529789 U JP 11529789U JP 11529789 U JP11529789 U JP 11529789U JP H0353833 U JPH0353833 U JP H0353833U
Authority
JP
Japan
Prior art keywords
reaction chamber
vapor phase
growth apparatus
infrared lamp
phase growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11529789U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11529789U priority Critical patent/JPH0353833U/ja
Publication of JPH0353833U publication Critical patent/JPH0353833U/ja
Pending legal-status Critical Current

Links

JP11529789U 1989-09-29 1989-09-29 Pending JPH0353833U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11529789U JPH0353833U (enrdf_load_stackoverflow) 1989-09-29 1989-09-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11529789U JPH0353833U (enrdf_load_stackoverflow) 1989-09-29 1989-09-29

Publications (1)

Publication Number Publication Date
JPH0353833U true JPH0353833U (enrdf_load_stackoverflow) 1991-05-24

Family

ID=31663629

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11529789U Pending JPH0353833U (enrdf_load_stackoverflow) 1989-09-29 1989-09-29

Country Status (1)

Country Link
JP (1) JPH0353833U (enrdf_load_stackoverflow)

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