JPS62162382U - - Google Patents

Info

Publication number
JPS62162382U
JPS62162382U JP4971386U JP4971386U JPS62162382U JP S62162382 U JPS62162382 U JP S62162382U JP 4971386 U JP4971386 U JP 4971386U JP 4971386 U JP4971386 U JP 4971386U JP S62162382 U JPS62162382 U JP S62162382U
Authority
JP
Japan
Prior art keywords
panel
less
cryopump
cooled
freezing source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4971386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4971386U priority Critical patent/JPS62162382U/ja
Publication of JPS62162382U publication Critical patent/JPS62162382U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP4971386U 1986-04-04 1986-04-04 Pending JPS62162382U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4971386U JPS62162382U (enrdf_load_stackoverflow) 1986-04-04 1986-04-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4971386U JPS62162382U (enrdf_load_stackoverflow) 1986-04-04 1986-04-04

Publications (1)

Publication Number Publication Date
JPS62162382U true JPS62162382U (enrdf_load_stackoverflow) 1987-10-15

Family

ID=30872420

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4971386U Pending JPS62162382U (enrdf_load_stackoverflow) 1986-04-04 1986-04-04

Country Status (1)

Country Link
JP (1) JPS62162382U (enrdf_load_stackoverflow)

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