JPH0353781B2 - - Google Patents

Info

Publication number
JPH0353781B2
JPH0353781B2 JP54029713A JP2971379A JPH0353781B2 JP H0353781 B2 JPH0353781 B2 JP H0353781B2 JP 54029713 A JP54029713 A JP 54029713A JP 2971379 A JP2971379 A JP 2971379A JP H0353781 B2 JPH0353781 B2 JP H0353781B2
Authority
JP
Japan
Prior art keywords
thin film
tantalum
film
alpha
anodic oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54029713A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55121673A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2971379A priority Critical patent/JPS55121673A/ja
Publication of JPS55121673A publication Critical patent/JPS55121673A/ja
Publication of JPH0353781B2 publication Critical patent/JPH0353781B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/80—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple passive components, e.g. resistors, capacitors or inductors
    • H10D86/85—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple passive components, e.g. resistors, capacitors or inductors characterised by only passive components

Landscapes

  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
JP2971379A 1979-03-14 1979-03-14 Manufacture of hybrid integrated circuit Granted JPS55121673A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2971379A JPS55121673A (en) 1979-03-14 1979-03-14 Manufacture of hybrid integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2971379A JPS55121673A (en) 1979-03-14 1979-03-14 Manufacture of hybrid integrated circuit

Publications (2)

Publication Number Publication Date
JPS55121673A JPS55121673A (en) 1980-09-18
JPH0353781B2 true JPH0353781B2 (enrdf_load_stackoverflow) 1991-08-16

Family

ID=12283741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2971379A Granted JPS55121673A (en) 1979-03-14 1979-03-14 Manufacture of hybrid integrated circuit

Country Status (1)

Country Link
JP (1) JPS55121673A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS55121673A (en) 1980-09-18

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