JPH0353696Y2 - - Google Patents

Info

Publication number
JPH0353696Y2
JPH0353696Y2 JP16366686U JP16366686U JPH0353696Y2 JP H0353696 Y2 JPH0353696 Y2 JP H0353696Y2 JP 16366686 U JP16366686 U JP 16366686U JP 16366686 U JP16366686 U JP 16366686U JP H0353696 Y2 JPH0353696 Y2 JP H0353696Y2
Authority
JP
Japan
Prior art keywords
chamber
support
support member
stage
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16366686U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6369535U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16366686U priority Critical patent/JPH0353696Y2/ja
Publication of JPS6369535U publication Critical patent/JPS6369535U/ja
Application granted granted Critical
Publication of JPH0353696Y2 publication Critical patent/JPH0353696Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Glanulating (AREA)
JP16366686U 1986-10-25 1986-10-25 Expired JPH0353696Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16366686U JPH0353696Y2 (enExample) 1986-10-25 1986-10-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16366686U JPH0353696Y2 (enExample) 1986-10-25 1986-10-25

Publications (2)

Publication Number Publication Date
JPS6369535U JPS6369535U (enExample) 1988-05-10
JPH0353696Y2 true JPH0353696Y2 (enExample) 1991-11-25

Family

ID=31092075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16366686U Expired JPH0353696Y2 (enExample) 1986-10-25 1986-10-25

Country Status (1)

Country Link
JP (1) JPH0353696Y2 (enExample)

Also Published As

Publication number Publication date
JPS6369535U (enExample) 1988-05-10

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