JPH0353552U - - Google Patents
Info
- Publication number
- JPH0353552U JPH0353552U JP11547389U JP11547389U JPH0353552U JP H0353552 U JPH0353552 U JP H0353552U JP 11547389 U JP11547389 U JP 11547389U JP 11547389 U JP11547389 U JP 11547389U JP H0353552 U JPH0353552 U JP H0353552U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation
- substances
- blocks
- multiple types
- flight path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11547389U JPH069014Y2 (ja) | 1989-09-29 | 1989-09-29 | 真空蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11547389U JPH069014Y2 (ja) | 1989-09-29 | 1989-09-29 | 真空蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0353552U true JPH0353552U (online.php) | 1991-05-23 |
| JPH069014Y2 JPH069014Y2 (ja) | 1994-03-09 |
Family
ID=31663801
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11547389U Expired - Lifetime JPH069014Y2 (ja) | 1989-09-29 | 1989-09-29 | 真空蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069014Y2 (online.php) |
-
1989
- 1989-09-29 JP JP11547389U patent/JPH069014Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH069014Y2 (ja) | 1994-03-09 |
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