JPH0351579Y2 - - Google Patents
Info
- Publication number
- JPH0351579Y2 JPH0351579Y2 JP1985147466U JP14746685U JPH0351579Y2 JP H0351579 Y2 JPH0351579 Y2 JP H0351579Y2 JP 1985147466 U JP1985147466 U JP 1985147466U JP 14746685 U JP14746685 U JP 14746685U JP H0351579 Y2 JPH0351579 Y2 JP H0351579Y2
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- flow path
- stator
- switching
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 description 7
- 230000013011 mating Effects 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Multiple-Way Valves (AREA)
- Treatment Of Liquids With Adsorbents In General (AREA)
- Indication Of The Valve Opening Or Closing Status (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985147466U JPH0351579Y2 (de) | 1985-09-27 | 1985-09-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985147466U JPH0351579Y2 (de) | 1985-09-27 | 1985-09-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6255779U JPS6255779U (de) | 1987-04-07 |
JPH0351579Y2 true JPH0351579Y2 (de) | 1991-11-06 |
Family
ID=31060852
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985147466U Expired JPH0351579Y2 (de) | 1985-09-27 | 1985-09-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0351579Y2 (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3372883B1 (de) * | 2017-03-09 | 2019-12-11 | VAT Holding AG | Vakuumventil mit optischem sensor |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5548853Y2 (de) * | 1975-08-04 | 1980-11-14 |
-
1985
- 1985-09-27 JP JP1985147466U patent/JPH0351579Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS6255779U (de) | 1987-04-07 |
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