JPH0351579Y2 - - Google Patents

Info

Publication number
JPH0351579Y2
JPH0351579Y2 JP1985147466U JP14746685U JPH0351579Y2 JP H0351579 Y2 JPH0351579 Y2 JP H0351579Y2 JP 1985147466 U JP1985147466 U JP 1985147466U JP 14746685 U JP14746685 U JP 14746685U JP H0351579 Y2 JPH0351579 Y2 JP H0351579Y2
Authority
JP
Japan
Prior art keywords
rotor
flow path
stator
switching
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985147466U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6255779U (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985147466U priority Critical patent/JPH0351579Y2/ja
Publication of JPS6255779U publication Critical patent/JPS6255779U/ja
Application granted granted Critical
Publication of JPH0351579Y2 publication Critical patent/JPH0351579Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Multiple-Way Valves (AREA)
  • Treatment Of Liquids With Adsorbents In General (AREA)
  • Indication Of The Valve Opening Or Closing Status (AREA)
JP1985147466U 1985-09-27 1985-09-27 Expired JPH0351579Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985147466U JPH0351579Y2 (de) 1985-09-27 1985-09-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985147466U JPH0351579Y2 (de) 1985-09-27 1985-09-27

Publications (2)

Publication Number Publication Date
JPS6255779U JPS6255779U (de) 1987-04-07
JPH0351579Y2 true JPH0351579Y2 (de) 1991-11-06

Family

ID=31060852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985147466U Expired JPH0351579Y2 (de) 1985-09-27 1985-09-27

Country Status (1)

Country Link
JP (1) JPH0351579Y2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3372883B1 (de) * 2017-03-09 2019-12-11 VAT Holding AG Vakuumventil mit optischem sensor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5548853Y2 (de) * 1975-08-04 1980-11-14

Also Published As

Publication number Publication date
JPS6255779U (de) 1987-04-07

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