JPH0351310U - - Google Patents
Info
- Publication number
- JPH0351310U JPH0351310U JP11308689U JP11308689U JPH0351310U JP H0351310 U JPH0351310 U JP H0351310U JP 11308689 U JP11308689 U JP 11308689U JP 11308689 U JP11308689 U JP 11308689U JP H0351310 U JPH0351310 U JP H0351310U
- Authority
- JP
- Japan
- Prior art keywords
- scanning
- circuit
- measuring device
- scanning beam
- parallel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007493 shaping process Methods 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 4
- 238000003708 edge detection Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
第１図は、本考案に係る光学式走査型測定装置
の実施例で用いられている波形整形回路の構成を
示すブロツク線図、第２図は、実施例の全体構成
を示す、一部ブロツク線図を含む光路図、第３図
は、前記波形整形回路のピークホールド回路の構
成を示す回路図、第４図は、実施例の各部動作波
形を示す線図である。
１０……レーザ光源、１２……レーザビーム、
１４……ポリゴンミラー、１６……回転走査ビー
ム、１８……コリメータレンズ、２０……平行走
査ビーム、２２……測定対象物、２６，３２……
受光素子、５０……エツジ検出回路、５２……リ
セツト回路、７０……波形整形回路、７２……ピ
ークホールド回路、７４……ホールド回路、７６
……抵抗分圧回路、７８……コンパレータ。
FIG. 1 is a block diagram showing the configuration of a waveform shaping circuit used in an embodiment of the optical scanning measuring device according to the present invention, and FIG. 2 is a partial block diagram showing the overall configuration of the embodiment. FIG. 3 is a circuit diagram showing the configuration of the peak hold circuit of the waveform shaping circuit, and FIG. 4 is a diagram showing the operation waveforms of each part of the embodiment. 10... Laser light source, 12... Laser beam,
14... Polygon mirror, 16... Rotating scanning beam, 18... Collimator lens, 20... Parallel scanning beam, 22... Measurement object, 26, 32...
Light receiving element, 50... Edge detection circuit, 52... Reset circuit, 70... Waveform shaping circuit, 72... Peak hold circuit, 74... Hold circuit, 76
...Resistance voltage divider circuit, 78...Comparator.
Claims (1)
とするコリメータレンズと、測定対象を通過した
前記平行走査ビームの明暗を検出する計測用の受
光素子と、該受光素子出力を波形整形する波形整
形回路とを有し、測定対象によつて前記平行走査
ビームの一部が遮られて生じる暗部又は明部への
切替りを検出して、測定対象の走査方向寸法を求
めるようにした光学式走査型測定装置において、 前記走査時の受光信号のピーク値を保持するピ
ークホールド回路と、 該ピーク値に応じて今回走査時の波形整形用比
較信号を発生する比較信号発生回路と、 を備えたことを特徴とする光学式走査型測定装置
。 (2) 請求項１において、更に、次回走査開始前
に、前記ピークホールド回路の保持信号の一部だ
けを放電する放電回路を備えたことを特徴とする
光学式走査型測定装置。[Claims for Utility Model Registration] (1) A collimator lens that converts a rotating or oscillating scanning beam into a parallel scanning beam, a measurement light-receiving element that detects the brightness of the parallel scanning beam that has passed through a measurement object, and the light-receiving element. A waveform shaping circuit that shapes the output, detects a switch to a dark area or a bright area that occurs when a part of the parallel scanning beam is blocked by the object to be measured, and determines the dimension of the object to be measured in the scanning direction. The optical scanning measuring device configured to perform the above-mentioned scanning includes a peak hold circuit that holds the peak value of the received light signal during the scanning, and a comparison signal generator that generates a comparison signal for waveform shaping during the current scanning according to the peak value. An optical scanning measuring device comprising: a circuit; (2) The optical scanning measuring device according to claim 1, further comprising a discharge circuit that discharges only a part of the signal held by the peak hold circuit before starting the next scan.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989113086U JPH0714803Y2 (en) | 1989-09-27 | 1989-09-27 | Optical scanning measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989113086U JPH0714803Y2 (en) | 1989-09-27 | 1989-09-27 | Optical scanning measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0351310U true JPH0351310U (en) | 1991-05-20 |
| JPH0714803Y2 JPH0714803Y2 (en) | 1995-04-10 |
Family
ID=31661512
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989113086U Expired - Fee Related JPH0714803Y2 (en) | 1989-09-27 | 1989-09-27 | Optical scanning measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0714803Y2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6179106A (en) * | 1984-09-27 | 1986-04-22 | Mitsutoyo Mfg Co Ltd | Edge detecting device of optical measuring instrument |
| JPS62174210U (en) * | 1986-04-25 | 1987-11-05 |
-
1989
- 1989-09-27 JP JP1989113086U patent/JPH0714803Y2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6179106A (en) * | 1984-09-27 | 1986-04-22 | Mitsutoyo Mfg Co Ltd | Edge detecting device of optical measuring instrument |
| JPS62174210U (en) * | 1986-04-25 | 1987-11-05 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0714803Y2 (en) | 1995-04-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |