JPH0345645U - - Google Patents

Info

Publication number
JPH0345645U
JPH0345645U JP10684089U JP10684089U JPH0345645U JP H0345645 U JPH0345645 U JP H0345645U JP 10684089 U JP10684089 U JP 10684089U JP 10684089 U JP10684089 U JP 10684089U JP H0345645 U JPH0345645 U JP H0345645U
Authority
JP
Japan
Prior art keywords
wafer carrier
wafer
shock
storing
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10684089U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10684089U priority Critical patent/JPH0345645U/ja
Publication of JPH0345645U publication Critical patent/JPH0345645U/ja
Pending legal-status Critical Current

Links

JP10684089U 1989-09-12 1989-09-12 Pending JPH0345645U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10684089U JPH0345645U (cs) 1989-09-12 1989-09-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10684089U JPH0345645U (cs) 1989-09-12 1989-09-12

Publications (1)

Publication Number Publication Date
JPH0345645U true JPH0345645U (cs) 1991-04-26

Family

ID=31655560

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10684089U Pending JPH0345645U (cs) 1989-09-12 1989-09-12

Country Status (1)

Country Link
JP (1) JPH0345645U (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999040623A1 (en) * 1998-02-04 1999-08-12 Nikon Corporation Exposure system and apparatus for positioning substrate storing cassette

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999040623A1 (en) * 1998-02-04 1999-08-12 Nikon Corporation Exposure system and apparatus for positioning substrate storing cassette

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