JPH0345630U - - Google Patents
Info
- Publication number
- JPH0345630U JPH0345630U JP10680589U JP10680589U JPH0345630U JP H0345630 U JPH0345630 U JP H0345630U JP 10680589 U JP10680589 U JP 10680589U JP 10680589 U JP10680589 U JP 10680589U JP H0345630 U JPH0345630 U JP H0345630U
- Authority
- JP
- Japan
- Prior art keywords
- bottle
- photosensitizing agent
- agent bottle
- photosensitizing
- photosensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003504 photosensitizing agent Substances 0.000 claims description 7
- 239000000126 substance Substances 0.000 claims description 2
- 239000003795 chemical substances by application Substances 0.000 claims 3
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Description
第１図は本考案の一実施例を示す薬液供給部の
断面図である。 １……フレーム、２……配管、３……空気抜き
用配管、４，６，１１，１２，１３……継手、５
……感光剤瓶、７……感光剤出口、８……ポンプ
、９……感光剤溶液、１０……フイルタ。
断面図である。 １……フレーム、２……配管、３……空気抜き
用配管、４，６，１１，１２，１３……継手、５
……感光剤瓶、７……感光剤出口、８……ポンプ
、９……感光剤溶液、１０……フイルタ。
Claims (1)
- 半導体基板に感光剤を塗布するための感光剤溶
液が貯えられる感光剤瓶と、この感光剤瓶の底位
置より低位に置かれる感光剤溶液を叶出するポン
プとを有し、このポンプ及び前記感光剤瓶とを接
続する配管の継手が前記感光剤瓶の底位置より低
く取り付けられていることを特徴とする回転塗布
装置の薬液供給部。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10680589U JPH0345630U (ja) | 1989-09-11 | 1989-09-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10680589U JPH0345630U (ja) | 1989-09-11 | 1989-09-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0345630U true JPH0345630U (ja) | 1991-04-26 |
Family
ID=31655527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10680589U Pending JPH0345630U (ja) | 1989-09-11 | 1989-09-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0345630U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001340702A (ja) * | 2000-06-01 | 2001-12-11 | Kurita Water Ind Ltd | 脱泡装置および薬注装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62129178A (ja) * | 1985-11-29 | 1987-06-11 | Canon Inc | 薬液供給装置用薬液回収装置 |
-
1989
- 1989-09-11 JP JP10680589U patent/JPH0345630U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62129178A (ja) * | 1985-11-29 | 1987-06-11 | Canon Inc | 薬液供給装置用薬液回収装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001340702A (ja) * | 2000-06-01 | 2001-12-11 | Kurita Water Ind Ltd | 脱泡装置および薬注装置 |