JPH0345630U - - Google Patents

Info

Publication number
JPH0345630U
JPH0345630U JP10680589U JP10680589U JPH0345630U JP H0345630 U JPH0345630 U JP H0345630U JP 10680589 U JP10680589 U JP 10680589U JP 10680589 U JP10680589 U JP 10680589U JP H0345630 U JPH0345630 U JP H0345630U
Authority
JP
Japan
Prior art keywords
bottle
photosensitizing agent
agent bottle
photosensitizing
photosensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10680589U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10680589U priority Critical patent/JPH0345630U/ja
Publication of JPH0345630U publication Critical patent/JPH0345630U/ja
Pending legal-status Critical Current

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  • Coating Apparatus (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示す薬液供給部の
断面図である。 １……フレーム、２……配管、３……空気抜き
用配管、４，６，１１，１２，１３……継手、５
……感光剤瓶、７……感光剤出口、８……ポンプ
、９……感光剤溶液、１０……フイルタ。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体基板に感光剤を塗布するための感光剤溶
    液が貯えられる感光剤瓶と、この感光剤瓶の底位
    置より低位に置かれる感光剤溶液を叶出するポン
    プとを有し、このポンプ及び前記感光剤瓶とを接
    続する配管の継手が前記感光剤瓶の底位置より低
    く取り付けられていることを特徴とする回転塗布
    装置の薬液供給部。
JP10680589U 1989-09-11 1989-09-11 Pending JPH0345630U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10680589U JPH0345630U (ja) 1989-09-11 1989-09-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10680589U JPH0345630U (ja) 1989-09-11 1989-09-11

Publications (1)

Publication Number Publication Date
JPH0345630U true JPH0345630U (ja) 1991-04-26

Family

ID=31655527

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10680589U Pending JPH0345630U (ja) 1989-09-11 1989-09-11

Country Status (1)

Country Link
JP (1) JPH0345630U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001340702A (ja) * 2000-06-01 2001-12-11 Kurita Water Ind Ltd 脱泡装置および薬注装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62129178A (ja) * 1985-11-29 1987-06-11 Canon Inc 薬液供給装置用薬液回収装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62129178A (ja) * 1985-11-29 1987-06-11 Canon Inc 薬液供給装置用薬液回収装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001340702A (ja) * 2000-06-01 2001-12-11 Kurita Water Ind Ltd 脱泡装置および薬注装置

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