JPH0344656U

JPH0344656U -

Info

Publication number: JPH0344656U
Application number: JP10587289U
Authority: JP
Priority date: 1989-09-08
Filing date: 1989-09-08
Publication date: 1991-04-25

Description

[Brief explanation of drawings]

第１図は本考案の実施例１を示す制御ブロツク
図、第２図ａは従来の不良解析用顕微鏡を示す構
成図、第２図ｂは量産ライン向き外観チエツカー
を示す制御ブロツク図、第３図は本考案の実施例
２を示す制御ブロツク図である。１……Ｘ−Ｙテーブル、２……顕微鏡、３……
画像入力手段、４……Ｘ−Ｙテーブル制御手段、
５……Ｘ−Ｙテーブル移動スイツチ、６……Ｘ−
Ｙテーブル現在位置記憶手段、７……キー入力手
段、８……不良モードコード表データ記憶手段、
９……情報制御手段、１０……画像処理手段、１
１……画像記録手段、１２……画像再生手段、１
３……ロツトデータ記憶手段。 Fig. 1 is a control block diagram showing the first embodiment of the present invention, Fig. 2a is a configuration diagram showing a conventional defect analysis microscope, Fig. 2b is a control block diagram showing an external checker suitable for mass production lines, and Fig. The figure is a control block diagram showing a second embodiment of the present invention. 1...X-Y table, 2...Microscope, 3...
Image input means, 4...X-Y table control means,
5...X-Y table movement switch, 6...X-
Y table current position storage means, 7...key input means, 8...failure mode code table data storage means,
9... Information control means, 10... Image processing means, 1
1... Image recording means, 12... Image reproducing means, 1
3...Lot data storage means.

Claims

[Scope of utility model registration request]

Place the sample stage on the X-Y table and
- In an appearance checker that drives and controls a Y table with a motor and observes a sample with a microscope while moving the sample stage, an image input means for capturing a microscope observation image as an image signal, and a key input means;
a storage means for storing sample stage position information and failure mode code table information; an image processing means for converting character information into image information and superimposing it on the image signal obtained by the image input means; and an image recording means for recording the image signal. and information control means for controlling the storage means, image processing means, and image recording means.