JPH0344535U - - Google Patents
Info
- Publication number
- JPH0344535U JPH0344535U JP10416389U JP10416389U JPH0344535U JP H0344535 U JPH0344535 U JP H0344535U JP 10416389 U JP10416389 U JP 10416389U JP 10416389 U JP10416389 U JP 10416389U JP H0344535 U JPH0344535 U JP H0344535U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- suction
- thin film
- opening
- film member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 5
- 238000001179 sorption measurement Methods 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Jigs For Machine Tools (AREA)
- Automatic Assembly (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10416389U JPH0344535U (en, 2012) | 1989-09-05 | 1989-09-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10416389U JPH0344535U (en, 2012) | 1989-09-05 | 1989-09-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0344535U true JPH0344535U (en, 2012) | 1991-04-25 |
Family
ID=31652966
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10416389U Pending JPH0344535U (en, 2012) | 1989-09-05 | 1989-09-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0344535U (en, 2012) |
-
1989
- 1989-09-05 JP JP10416389U patent/JPH0344535U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0344535U (en, 2012) | ||
| JPH01121930U (en, 2012) | ||
| JP2002144270A (ja) | 吸着ジグ及び被搬送物の搬送方法 | |
| JPH0429532U (en, 2012) | ||
| JPH03232640A (ja) | 吸着装置 | |
| JP2531653Y2 (ja) | 露光装置のベース板装置 | |
| JPS59117696U (ja) | シ−ト状物吸着保持台 | |
| JPH03116903U (en, 2012) | ||
| JP2529796Y2 (ja) | 吸着用パッド | |
| JPH0441375U (en, 2012) | ||
| JPS6253931U (en, 2012) | ||
| JPH0311584U (en, 2012) | ||
| JPH04176580A (ja) | 搬送装置 | |
| JPH0185833U (en, 2012) | ||
| JPH04800U (en, 2012) | ||
| JPH0325300U (en, 2012) | ||
| JPS6060631U (ja) | レンジフ−ド用付着油汚れ除去装置 | |
| JPH0326483U (en, 2012) | ||
| JPS61182031U (en, 2012) | ||
| JPS6118860U (ja) | 半導体ウエ−ハのレ−ザ刻印装置 | |
| JPS649939U (en, 2012) | ||
| JPH03116528U (en, 2012) | ||
| JPH01171082U (en, 2012) | ||
| JPH0467940U (en, 2012) | ||
| JPH0339889U (en, 2012) |