JPH0344252Y2 - - Google Patents

Info

Publication number
JPH0344252Y2
JPH0344252Y2 JP1984201282U JP20128284U JPH0344252Y2 JP H0344252 Y2 JPH0344252 Y2 JP H0344252Y2 JP 1984201282 U JP1984201282 U JP 1984201282U JP 20128284 U JP20128284 U JP 20128284U JP H0344252 Y2 JPH0344252 Y2 JP H0344252Y2
Authority
JP
Japan
Prior art keywords
waste gas
cleaning liquid
pipe
bubbling plate
supply pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984201282U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61115129U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984201282U priority Critical patent/JPH0344252Y2/ja
Publication of JPS61115129U publication Critical patent/JPS61115129U/ja
Application granted granted Critical
Publication of JPH0344252Y2 publication Critical patent/JPH0344252Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Treating Waste Gases (AREA)
  • Gas Separation By Absorption (AREA)
JP1984201282U 1984-12-28 1984-12-28 Expired JPH0344252Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984201282U JPH0344252Y2 (cs) 1984-12-28 1984-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984201282U JPH0344252Y2 (cs) 1984-12-28 1984-12-28

Publications (2)

Publication Number Publication Date
JPS61115129U JPS61115129U (cs) 1986-07-21
JPH0344252Y2 true JPH0344252Y2 (cs) 1991-09-18

Family

ID=30762924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984201282U Expired JPH0344252Y2 (cs) 1984-12-28 1984-12-28

Country Status (1)

Country Link
JP (1) JPH0344252Y2 (cs)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51105679A (ja) * 1975-03-13 1976-09-18 Sony Corp Gasusenjosochi
JPS5327961U (cs) * 1976-08-13 1978-03-09
JPS5541883A (en) * 1978-09-20 1980-03-24 Hideto Fujii Explosion preventing method and apparatus for dust collector using bag filter
JPS5657423A (en) * 1979-10-16 1981-05-19 Matsushita Electric Industrial Co Ltd Central cleaner
JPS5794323A (en) * 1980-12-03 1982-06-11 Stanley Electric Co Ltd Treating method for waste gas of cvd apparatus
JPS6142321A (ja) * 1984-08-06 1986-02-28 Sony Corp シランガス処理装置

Also Published As

Publication number Publication date
JPS61115129U (cs) 1986-07-21

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