JPH0343244U

JPH0343244U -

Info

Publication number: JPH0343244U
Application number: JP10447989U
Authority: JP
Priority date: 1989-09-06
Filing date: 1989-09-06
Publication date: 1991-04-23

Description

[Brief explanation of drawings]

第１図は、この考案の一実施例に係るイオン源
構成部品の着脱構造を示す図である。第２図は、
第１図の絶縁碍子周りを同図の左側から見た図で
ある。第３図は、イオン注入装置のイオン源周り
の一例を部分的に示す図である。２…イオン源、４…プラズマ生成部、６…イオ
ン源ヘツド、１０…ヘツド固定フランジ、１０ａ
…平坦面、１０ｂ…中心軸、１４…絶縁碍子、２
０…イオン源チヤンバー、２０ｂ…中心軸、２４
…ゲートバルブ（相手側機器）、３４…支持盤、
３６…ガイドレール、４０…台車、４２…碍子受
、４４…ヘツド固定フランジ位置決め部材、４４
ａ…平坦面。 FIG. 1 is a diagram showing a structure for attaching and detaching ion source components according to an embodiment of this invention. Figure 2 shows
FIG. 2 is a view of the insulator and its surroundings in FIG. 1 as viewed from the left side of the same figure. FIG. 3 is a diagram partially showing an example of the ion source surroundings of the ion implantation apparatus. 2... Ion source, 4... Plasma generation section, 6... Ion source head, 10... Head fixing flange, 10a
...Flat surface, 10b... Central axis, 14... Insulator, 2
0... Ion source chamber, 20b... Central axis, 24
...Gate valve (opposite device), 34...Support board,
36...Guide rail, 40...Dolly, 42...Insulator holder, 44...Head fixing flange positioning member, 44
a...Flat surface.

Claims

[Scope of utility model registration request]

A ring-shaped insulator with a head fixing flange attached to the end face for fixing the ion source head containing the plasma generation part to and from the ion source chamber attached to the other device. The structure is such that two flat surfaces are provided on the lower peripheral surface of the head fixing flange, and a guide rail is provided on the support plate of the ion source section, and two flat surfaces are provided on the support plate of the ion source section, and two flat surfaces are provided on the support plate of the ion source section. an insulator holder; and two flat surfaces that come into contact with each flat surface of the head fixing flange to align the central axis of the head fixing flange with the central axis of the ion source chamber when the insulator is placed on the insulator holder. A cart to which a head fixing flange positioning member having a surface is attached is movably mounted, and the insulator can be attached to and detached from the ion source chamber using such a cart. Features a detachable structure for ion source components.