JPH034224Y2 - - Google Patents
Info
- Publication number
- JPH034224Y2 JPH034224Y2 JP603386U JP603386U JPH034224Y2 JP H034224 Y2 JPH034224 Y2 JP H034224Y2 JP 603386 U JP603386 U JP 603386U JP 603386 U JP603386 U JP 603386U JP H034224 Y2 JPH034224 Y2 JP H034224Y2
- Authority
- JP
- Japan
- Prior art keywords
- frame
- pump chamber
- balance ring
- discharge
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005406 washing Methods 0.000 claims description 20
- 239000007788 liquid Substances 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000005086 pumping Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP603386U JPH034224Y2 (US07923587-20110412-C00001.png) | 1986-01-20 | 1986-01-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP603386U JPH034224Y2 (US07923587-20110412-C00001.png) | 1986-01-20 | 1986-01-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62117982U JPS62117982U (US07923587-20110412-C00001.png) | 1987-07-27 |
| JPH034224Y2 true JPH034224Y2 (US07923587-20110412-C00001.png) | 1991-02-04 |
Family
ID=30788168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP603386U Expired JPH034224Y2 (US07923587-20110412-C00001.png) | 1986-01-20 | 1986-01-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH034224Y2 (US07923587-20110412-C00001.png) |
-
1986
- 1986-01-20 JP JP603386U patent/JPH034224Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62117982U (US07923587-20110412-C00001.png) | 1987-07-27 |
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