JPH0342190A - Laser beam machine - Google Patents

Abstract

PURPOSE:To enable machining to complicated shape by fitting a nozzle constituted with an electrode part to a lens holder, constituting this lens holder with a lens holder electrode part and connecting this lens holder electrode part with the electrode part and a capacitance detector, respectively. CONSTITUTION:The electrode constituting the nozzle 13 is electrically connected with the lens holder electrode part 14d and further, to the lens holder electrode part 14d, the capacitance detector 11 is electrically connected through a first electric wire 10 and a second electric wire 10b. While holding distance to a material 12 to be machined constant, the material 12 to be machined is machined with the laser beam. Breakage of the electric wire is prevented so that the electric wire is not brought into sliding contact with the material to be machined by arranging the lens holder at the connecting part of the capacitance detector. By this method, this can be used to machining of the material to be machined having narrow width recessed part and complicated shape and the effect that the damage is hardly generated on the cable at the time of machining is obtd.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a laser processing machine that processes a workpiece by irradiating a laser beam focused by a focusing lens.

[Conventional technology]

Generally, in order to improve machining accuracy in this type of laser processing machine, it is necessary to maintain a constant distance between the workpiece and the focal position of the laser beam, that is, the nozzle tip. For this reason, there have conventionally been laser processing machines that detect changes in the distance between the workpiece and the nozzle tip due to changes in capacitance, as shown in FIG. 3, for example. In the figure, 1 is a processing head main body of a laser processing machine, and 2 is a lens holder, which holds a condensing lens 3 inside. Reference numeral 4 indicates a lens holder mounting bolt for attaching the lens holder 2 to the processing head body 1, and 5 indicates a substantially conical nozzle. An outer electrode 5c provided with an insulating portion 5b interposed therebetween, and an electrode fixing portion 5 provided with a second insulating portion 5d interposed to fix the inner electrode 5a to the outer electrode 5c.
Further, an injection port 5f through which laser light, assist gas, etc. pass is formed at the tip of the nozzle 5, that is, at the center of the lower end. 6 is an insulating plate for a nozzle, and 7 is an insulating sleeve for a nozzle. The nozzle 5 is fixed to the lens holder 2 while being electrically insulated by the insulating plate 6 for a nozzle and the insulating sleeve 7 for a nozzle. 8 is a nozzle mounting bolt for fixing the nozzle 5 to the lens holder 2; 9 is a connector screwed onto the threaded portion 5g of the outer electrode 5c; a coaxial cable 10 is fixed to this connector 9; That is, the first electric wire 10a, which is the center conductor of this coaxial cable 10, is connected to the inner electrode 5a, and the second electric wire 10b, which is the outer conductor of the coaxial cable 1o, is connected to the outer electrode 5c via the connector 9. . 11 is a capacitance detector, and a first electric wire 10a and a second electric wire 10b are connected.

12 is a workpiece to be laser processed.

Next, the operation will be explained.

Adjustment to keep the distance between the workpiece 12 and the tip of the nozzle 5 constant changes the capacitance between these two surfaces as the gap between the nozzle 5 and the workpiece 12 changes. The capacitance detector 11 detects this change, transmits this change to a control device (not shown) of the laser processing machine, and adjusts the position of the tip of the nozzle 5 to obtain a predetermined gap.

[Problem to be solved by the invention]

Since the conventional laser processing machine is configured as described above, the first and second electric wires 10a attached to the nozzle 5 are used when processing narrow valleys or complex-shaped workpieces. , 10b get in the way, making it impossible to process, and the first and second electric wires 10a, 10b are likely to be disconnected or damaged by spatter during laser processing. There was a problem.

Further, since the nozzle 5 of the conventional laser processing machine is formed into a substantially conical shape, the portion where the inner electrode 5a, the outer electrode 5c, and the first insulating portion 5b between these electrodes touch each other is also processed into a conical shape with high precision. Therefore, there were problems in that processing took time and adjustment work during assembly also took time.

This invention was made to solve the above-mentioned problems, and it is a laser that can process workpieces with narrow valleys and complex shapes, and also prevents damage to electric wires during processing. The first objective is to obtain a processing machine, and the second objective is to obtain a laser processing machine that can shorten processing time and assembly time.

[Means to solve the problem]

The laser beam processing machine according to the first aspect of the present invention provides a lens holder with a nozzle attached thereto, which is made up of an electrode part consisting of an inner electrode, an outer electrode, and an insulating part interposed between the inner electrode and the outer electrode. and a lens holder electrode section consisting of a lens holder outer electrode, a lens holder insulating section interposed between the lens holder inner electrode and the lens holder outer electrode, and this lens holder electrode section is composed of the above electrode section and the electromagnetic capacitance. They are each connected to a detector.

A laser processing machine according to a second aspect of the present invention includes a nozzle including an inner electrode, an outer electrode, and a cylindrical insulating section disposed parallel to the central axis of the nozzle at least partially between the inner electrode and the outer electrode. It is something.

[Effect]

In the laser processing machine according to the first aspect, the connecting portion of the electromagnetic capacitance detector is provided in the lens holder to prevent the wire from coming into sliding contact with the workpiece, thereby preventing disconnection of the wire.

In the laser processing machine according to the second aspect, the processing time and assembly time can be shortened by making the inner electrode, the outer electrode, and the insulating part touch each other at a portion parallel to the central axis.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings. 1st
The figure is a longitudinal cross-sectional view showing a first embodiment of the present invention, and the same or equivalent components in FIG.

In FIG. 1, 13 is a nozzle, and this nozzle 13 is composed of an electrode part consisting of an inner electrode 13a and an outer electrode 13c provided on the outer periphery of the inner electrode 13a with an insulating part 13b formed by ceramic spraying. has been done. 1
4 is a lens holder holding the focusing lens 3, and this lens holder 14 has a lens holder inner electrode 14a and a lens holder first insulating part 14b formed by ceramic spraying on the outer periphery of the lens holder inner electrode 14a. A lens holder electrode part 14d consisting of the provided lens holder outer electrode 14c, and a lens holder second insulating part 14 formed by ceramic spraying to fix the lens holder inner electrode 14a to the lens holder outer electrode 14c.
It is constituted by a lens holder electrode fixing plate 14f formed by ceramic spraying with e. The nozzle 13 is fixed to the lens holder 14 by a nozzle mounting bolt 8. For this reason, the inner electrode 13
a is electrically connected to the lens holder inner electrode 14a, the outer electrode 13c is electrically connected to the lens holder outer electrode 14c, and the insulating part 13b is electrically connected to the lens holder first insulating part 14.
It is connected to b.

15 is an insulating sleeve for a lens holder formed by ceramic spraying that penetrates the lens holder electrode fixing plate 14f and the lens holder outer electrode 14c, and 16 is interposed between the lens holder electrode fixing plate 14f and the processing head main body l. The lens holder insulating plate is formed by ceramic spraying, and the lens holder electrode fixing plate 14f and the lens holder outer electrode 14c are connected to the lens holder insulating plate by a lens holder mounting bolt 17 passing through the lens holder insulating sleeve 5. It is fixed to the processing head main body 1 with a 6 interposed therebetween. Reference numeral 14g denotes a threaded portion drilled in the lens holder outer electrode 14c, and the connector 9 is attached to this threaded portion 14g.
are screwed together. and.

The first electric wire 10a, which is the center conductor of the coaxial cable IO fixed to this connector 9, is connected to the lens holder inner electrode 14a.
The second electric wire 10b, which is the outer conductor of the coaxial cable 10, is connected to the lens holder outer electrode 1 via the connector 9.
Connected to 4c.

Next, the operation will be explained.

The electrode part that constitutes the nozzle 13 is the lens holder electrode part 14.
d, and is also electrically connected to the lens holder electrode part 14d.
Since the capacitance detector 11 is electrically connected to via the first electric wire 10a and the second electric wire IIfA10b,
Even when processing the workpiece 12 with a laser beam while keeping the distance between the workpiece 12 and the tip of the nozzle 13 constant, even when processing a narrow valley in the workpiece 12, it can be sufficiently coped with.

Next, FIG. 2 is a longitudinal sectional view showing a second embodiment of the invention.
In the figure, the electrode part 13d of the nozzle 13 is of the inner type fi.
13a and the first insulating part 13 on the outer periphery of this inner electrode 13a.
The configuration in which the outer electrode 13c is provided with the outer electrode 13c interposed is the same as that of the previous embodiment, but the LM edge 13b of the embodiment shown in FIG. 1
3b are arranged parallel to the central axis of the conical nozzle 13 at both upper and lower ends of the inner electrode 1.3a and the outer electrode 13c. The electrode portion 13d is fixed by the electrode fixing portion 13f via the second insulating portion 13e, and the nozzle 13 is electrically #! ! It is fixed to the lens holder 2 with a border.

In the above embodiment, the change in the distance between the nozzle 13 and the workpiece 12 is detected by the capacitance detector 11, but an eddy current detector or a magnetic detector may be used as another electromagnetic capacitance detector. may also be used.

Further, in the first embodiment described above, the connection portion between the nozzle 13 and the electromagnetic capacitance detector is provided in the lens holder, but it may be located at another position in the above embodiment.

Further, in the second embodiment, the insulating member is formed by sprayed ceramic, but the same effects as in the above embodiment can be obtained even if other insulating members are used.

〔Effect of the invention〕

As described above, according to the first aspect, the nozzle constituted by the electrode portion is attached to the lens holder.

This lens holder is composed of a lens holder electrode section consisting of a lens holder inner electrode, a lens holder outer electrode, and a lens holder insulating section interposed between the lens holder inner electrode and the lens holder outer electrode. Since the cable is connected to the electrode section and the electromagnetic capacitance detector, it can be used for processing workpieces with narrow valleys or rough shapes, and the cable is less likely to be damaged during processing. There is an effect that can be obtained.

Further, according to the second claim, since the nozzle is constituted by an inner electrode, an outer electrode, and a cylindrical insulating portion disposed parallel to the central axis of the nozzle at least partially between the inner electrode and the outer electrode, the nozzle This has the effect of making it possible to shorten processing time and assembly time.

[Brief explanation of drawings]

FIG. 1 is a longitudinal sectional view showing a laser processing machine according to a first embodiment of the invention, FIG. 2 is a longitudinal sectional view showing a laser processing machine according to a second embodiment of the invention, and FIG. 3 is a longitudinal sectional view showing a laser processing machine according to a second embodiment of the invention. FIG. 2 is a vertical cross-sectional view showing an example of the machine. 11 is an electromagnetic capacitance detector, 12 is a workpiece, work 3 is a nozzle, 13a is an inner electrode, 13b is an insulating part, 13c is an outer electrode, 14 is a lens holder, 14a is a lens holder inner electrode, 14b is a lens holder 14c is an insulating part, 14c is a lens holder outer electrode, and 14d is a lens holder electrode part. In addition, in the figures, the same reference numerals indicate the same or corresponding parts.

Claims (2)

[Claims] (1) The nozzle is configured with an electrode section consisting of an inner electrode, an outer electrode, and an insulating section interposed between the inner electrode and the outer electrode, and the electromagnetic capacitance between the nozzle tip and the workpiece is The distance from the nozzle tip to the workpiece is controlled to be constant by detecting it with an electromagnetic capacitance detector connected to the part, and the laser beam is irradiated from the nozzle tip to process the workpiece. In the laser processing machine,
The lens holder to which the nozzle is attached is composed of a lens holder electrode section consisting of a lens holder inner electrode, a lens holder outer electrode, and a lens holder insulating section interposed between the lens holder inner electrode and the lens outer electrode. A laser processing machine characterized in that a lens holder electrode section is connected to the electrode section and the electromagnetic capacitance detector, respectively. (2) The nozzle is configured with an electrode section consisting of an inner electrode, an outer electrode, and an insulating section interposed between the inner electrode and the outer electrode, and the electromagnetic capacitance between the nozzle tip and the workpiece is The distance from the tip of the nozzle to the workpiece is controlled to be constant through detection by an electromagnetic capacitance detector connected to the electrode part, and the workpiece is processed by irradiating laser light from the nozzle. In the laser processing machine,
A laser processing machine characterized in that the insulating part is formed in a cylindrical shape, and the cylindrical insulating part is disposed on at least a portion of the inner electrode and the outer electrode and parallel to the central axis of the nozzle. .