WO2022004022A1 - Workpiece suction device - Google Patents

Workpiece suction device Download PDF

Info

Publication number
WO2022004022A1
WO2022004022A1 PCT/JP2020/048412 JP2020048412W WO2022004022A1 WO 2022004022 A1 WO2022004022 A1 WO 2022004022A1 JP 2020048412 W JP2020048412 W JP 2020048412W WO 2022004022 A1 WO2022004022 A1 WO 2022004022A1
Authority
WO
WIPO (PCT)
Prior art keywords
electrode portion
work
electrode
suction device
wiring
Prior art date
Application number
PCT/JP2020/048412
Other languages
French (fr)
Japanese (ja)
Inventor
和宏 西川
Original Assignee
日本電産株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電産株式会社 filed Critical 日本電産株式会社
Priority to CN202080102442.0A priority Critical patent/CN115916487A/en
Priority to JP2022533048A priority patent/JPWO2022004022A1/ja
Publication of WO2022004022A1 publication Critical patent/WO2022004022A1/en

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices

Definitions

  • the present disclosure relates to a work suction device.
  • a robot hand is used for picking and transporting a work.
  • a method of sucking the work is known in addition to a method of physically sandwiching and gripping the work (see, for example, Patent Documents 1 and 2). It was
  • a grab which is a gripping tool for an article
  • a suction device (see Patent Document 1).
  • the suction device is provided with a detection switch, which switches to suction vacuum when the suction device comes into contact with an article.
  • the object holding device includes a suction device, a suction pad, and a proximity sensor (see Patent Document 2).
  • the suction device sucks the gas.
  • the suction pad is connected to a suction device and sucks an object based on suction by the suction device.
  • the proximity sensor detects that an object has approached the suction pad. Then, the suction device is controlled to perform suction when the proximity sensor detects that the object has approached the suction pad.
  • Japanese Publication Japanese Patent Application Laid-Open No. 56-52198 Japanese Publication: Japanese Patent Application Laid-Open No. 2019-48637
  • the suction pad and the proximity sensor are different and are arranged at different positions, the detection position of the work by the proximity sensor is a position deviated from the position of the suction pad. For this reason, for example, when the work is very small, there is a possibility that the work cannot be properly adsorbed due to the above-mentioned deviation. It was
  • An object of the present disclosure is to provide a technique capable of appropriately detecting the approach of a work to a predetermined suction position and sucking the work with high accuracy.
  • the exemplary work suction device of the present disclosure is a work suction device that sucks a work, in which a first electrode portion and a second electrode portion are arranged, and between the first electrode portion and the second electrode portion. Detection of capacitive coupling between the suction head that electrostatically attracts the work by the formed electric field, the third electrode portion that is electrically connected to the first electrode portion or the second electrode portion, and the third electrode portion. It has a capacitance sensor with electrodes.
  • the exemplary work suction device of the present disclosure it is possible to appropriately detect the approach of the work to a predetermined suction position and suck the work with high accuracy.
  • FIG. 1 is a schematic view of a work suction device according to an embodiment of the present disclosure.
  • FIG. 2 is a schematic perspective view of the suction head according to the embodiment of the present disclosure.
  • FIG. 3 is a block diagram showing a configuration of a control system of the work suction device according to the embodiment of the present disclosure. It is a schematic diagram for demonstrating the operation of the work suction apparatus of this disclosure. It is a schematic diagram for demonstrating the operation of the work suction apparatus of this disclosure.
  • FIG. 5 is a schematic view showing the configuration of the work suction device of the first modification.
  • FIG. 6 is a schematic plan view showing the configuration of the suction head included in the work suction device of the second modification.
  • FIG. 7 is a schematic perspective view showing the configuration of the suction head included in the work suction device of the third modification.
  • FIG. 8 is a vertical cross-sectional view of the suction head shown in FIG. 7.
  • FIG. 9A is a schematic diagram for explaining the effect when the suction head of the third modification is used.
  • FIG. 9B is a schematic diagram for explaining the effect when the suction head of the third modification is used.
  • FIG. 10 is a schematic perspective view showing the configuration of the suction head included in the work suction device of the fourth modification.
  • the direction parallel to the X direction is the left-right direction
  • the direction parallel to the Y direction is the front-back direction
  • the direction parallel to the Z direction The explanation will be given with the direction as the vertical direction. Further, the description will be given with the + X direction as the right side, the ⁇ X direction as the left side, the + Y direction as the front side, the ⁇ Y direction as the rear side, the + Z direction as the upper side, and the ⁇ Z direction as the lower side.
  • these directions are names used only for explanation, and there is no intention of limiting the actual positional relationship and direction. It was
  • FIG. 1 is a schematic view of a work suction device 100 according to an embodiment of the present disclosure.
  • the work suction device 100 sucks the work.
  • the work is an object to be processed, for example, processed, inspected, or assembled.
  • the work is made of, for example, resin or metal.
  • the work suction device 100 is applied to, for example, a robot hand.
  • the work suction device 100 has a suction head 3 in which a first electrode portion 1 and a second electrode portion 2 are arranged, a third electrode portion 4, and a capacitance sensor 5.
  • FIG. 2 is a schematic perspective view of the suction head 3 according to the embodiment of the present disclosure.
  • the suction head 3 constitutes, for example, at least a part of the end effector of the robot hand.
  • the suction head 3 has a rectangular parallelepiped shape.
  • the shape of the suction head 3 may be other than the rectangular parallelepiped shape.
  • the shape of the suction head 3 may be various shapes according to the shape of the work to be sucked.
  • the suction head 3 may have, for example, a prismatic shape other than a rectangular parallelepiped shape, a columnar shape, a hemispherical shape, a spherical shape, or a T-shaped three-dimensional shape in a plan view.
  • the suction head 3 is composed of an insulating member.
  • the suction head 3 is made of, for example, a resin.
  • the first electrode portion 1 and the second electrode portion 2 are arranged on the surface of the suction head 3 for sucking the work.
  • the electrode portion composed of the first electrode portion 1 and the second electrode portion 2 refers to at least a part of the conductor portion provided on the surface of the suction head 3 facing the work.
  • the upper surface 3a of the suction head 3 is a surface facing the work.
  • the first electrode portion 1 and the second electrode portion 2 are provided on the same surface of the suction head 3.
  • the electrode portion composed of the first electrode portion 1 and the second electrode portion 2 is as long as possible so as to include the region where the upper surface 3a of the suction head 3 faces the work when the work is sucked at the target suction position. It is preferable that it is widely provided. It was
  • the first electrode portion 1 and the second electrode portion 2 are made of a metal such as copper or aluminum.
  • the first electrode portion 1 and the second electrode portion 2 may be made of an alloy or may be made of a conductor other than a metal such as conductive carbon.
  • the first electrode portion 1 and the second electrode portion 2 may have various shapes such as a rectangular shape, a circular shape, a semicircular shape, and an annular shape. In the present embodiment, the first electrode portion 1 and the second electrode portion 2 have a rectangular shape. It was
  • the first electrode portion 1 and the second electrode portion 2 are arranged at intervals in the left-right direction.
  • the distance between the first electrode portion 1 and the second electrode portion 2 in the left-right direction may be appropriately set based on, for example, the shape or area of the work.
  • the first electrode portion 1 and the second electrode portion 2 are symmetrical with respect to the bisector plane that bisects the suction head 3 to the left and right.
  • the first electrode portion 1 and the second electrode portion 2 may be provided asymmetrically with respect to the above-mentioned bisector. It was
  • the first electrode portion 1 and the second electrode portion 2 can be formed by, for example, the MID method (Molded Interconnect Device).
  • MID method Molded Interconnect Device
  • LDS Laser Direct Structuring
  • a special resin material containing a metal catalyst is used for injection molding to form a structure, and then the structure is irradiated with a laser. This activates the metal catalyst at the irradiation site.
  • electroless plating and then electrolytic plating in this state it is possible to form a metal film pattern on the portion irradiated with the laser in the form of a resin structure. It was
  • the first electrode portion 1 and the second electrode portion 2 are covered with an insulating film (not shown).
  • the insulating film is made of a material and a film thickness that can withstand the voltage applied to the first electrode portion 1 and the second electrode portion 2.
  • the insulating film can be formed of, for example, a polyimide sheet or a polyurethane-based sheet.
  • the insulating film may be arranged on the first electrode portion 1 and the second electrode portion 2 by adhesion.
  • the insulating film may be formed by spraying or electrodeposition instead of the sheet. It was
  • the work suction device 100 is provided not only when the work is an insulating member but also when the work is a conductive member such as metal. Will be available. Further, by providing the insulating film, when a high voltage is applied between the first electrode portion 1 and the second electrode portion 2, a short circuit occurs between the first electrode portion 1 and the second electrode portion 2. It can be prevented from occurring. Further, by providing the insulating film, it is possible to prevent the work from being directly placed on the first electrode portion 1 and the second electrode portion 2, and to improve the durability of the first electrode portion 1 and the second electrode portion 2. Can be done. It was
  • the suction head 3 electrostatically sucks the work by the electric field formed between the first electrode portion 1 and the second electrode portion 2. Specifically, by applying a voltage between the first electrode portion 1 and the second electrode portion 2, an electric field is formed between the first electrode portion 1 and the second electrode portion 2.
  • the first electrode portion 1 and the second electrode portion 2 form a so-called bipolar electrostatic chuck.
  • the electrostatic chuck composed of the first electrode portion 1 and the second electrode portion 2 may be either a Coulomb force type or a Johnson-Rahbek force type.
  • the electrostatic chuck of this embodiment is a Coulomb force type. It was
  • the third electrode portion 4 is electrically connected to the first electrode portion 1 or the second electrode portion 2.
  • the third electrode portion 4 may always be electrically connected to the first electrode portion 1 or the second electrode portion 2, but may be electrically connected to the first electrode portion 1 or the second electrode portion 2 when necessary. It may be configured to be connected.
  • the third electrode portion 4 is provided in detail so as to be electrically connectable to the second electrode portion 2, and is electrically connected to the second electrode portion 2 as needed. It was
  • the third electrode portion 4 may be provided on the suction head 3, but may be provided outside the suction head 3. In the present embodiment, the third electrode portion 4 is provided at a portion different from that of the suction head 3. The portion different from the suction head 3 may be, for example, a portion other than the end effector of the robot hand. The third electrode portion 4 is electrically connected to the second electrode portion 2 via, for example, wiring provided in the robot hand. It was
  • the capacitance sensor 5 detects a change in capacitance.
  • the capacitance sensor 5 may be a known capacitance sensor.
  • the capacitance sensor 5 has a detection electrode 5a.
  • the detection electrode 5a is made of a conductive thin plate such as brass or copper.
  • the capacitance sensor 5 has an oscillation circuit (not shown) in addition to the detection electrode 5a. In the oscillation circuit, the oscillation conditions change depending on the capacitance between the detection electrode 5a and the circuit power supply (not shown). Here, it is assumed that the capacitance sensor 5 is used alone. In this case, when the capacitance value between the detection electrode 5a and the circuit power supply changes due to the approach of the object to the detection electrode 5a, the oscillation circuit starts or stops the oscillation. By detecting the start or stop of this oscillation, the capacitance sensor 5 detects a change in capacitance.
  • the detection electrode 5a is capacitively coupled to the third electrode portion 4. Therefore, when the third electrode portion 4 is electrically connected to the second electrode portion 2, when the work approaches the second electrode portion 2, the capacitance value between the detection electrode 5a and the circuit power supply of the oscillation circuit increases. Change. That is, when the work approaches the second electrode portion 2, the capacitance sensor 5 detects a change in capacitance. The capacitance sensor 5 detects when the work approaches the second electrode portion 2. It was
  • the third electrode portion 4 and the detection electrode 5a may be capacitively coupled. For this reason, the third electrode portion 4 and the detection electrode 5a may have a configuration facing each other as in the present embodiment, but may have a configuration different from this. At least one additional electrode portion may be arranged between the third electrode portion 4 and the detection electrode 5a, and a plurality of capacitive couplings may be arranged in series. In this case, the capacitances are the same among the plurality of capacitive couplings. Capacitive coupling may be formed between electrodes that move relative to each other. It was
  • the third electrode portion 4 may be configured to be electrically connected to the first electrode portion 1.
  • the capacitance sensor 5 can detect the approach of the work to the first electrode portion 1. It was
  • one of the first electrode portion 1 and the second electrode portion 2 for performing electrostatic adsorption can also be an electrode for the capacitance sensor 5 that detects the approach of the work. It will be used. Therefore, according to the configuration of the present embodiment, it is possible to reduce the deviation between the target suction position of the work and the position where the approach of the work is detected. That is, according to the configuration of the present embodiment, it is possible to appropriately detect that the work has approached the target suction position, and even a minute work can perform electrostatic suction with high accuracy. It was
  • the work suction device 100 further includes a first wiring unit 6 and a second wiring unit 7.
  • the first wiring unit 6 connects the first electrode unit 1 to the power supply unit 8.
  • the first electrode unit 1 and the power supply unit 8 are electrically connected by the first wiring unit 6.
  • the first electrode unit 1 is connected to the positive electrode of the power supply unit 8 via the first wiring unit 6.
  • the power supply unit 8 is a high voltage power supply.
  • the magnitude of the voltage applied by the power supply unit 8 is, for example, about 1 kV to 10 kV.
  • the power supply unit 8 has an on / off function.
  • the power supply unit 8 may have an adjusting function for adjusting the magnitude of the applied voltage.
  • the power supply unit 8 may be provided on the suction head 3, but in the present embodiment, the power supply unit 8 is provided outside the suction head 3. It was
  • the first wiring portion 6 is made of a metal such as copper or aluminum.
  • the first wiring portion 6 may be made of an alloy or may be made of a conductor other than a metal such as conductive carbon. At least a part of the first wiring portion 6 is provided on the suction head 3. In the present embodiment, a part of the first wiring portion 6 is provided on the surface of the suction head 3.
  • the first wiring portion 6 includes a thin wire-shaped conductor provided on the left side surface 3b of the suction head 3.
  • the first wiring portion 6 is provided, for example, in a portion other than the suction head 3 of the robot hand. It is preferable that at least a part of the first wiring portion 6 is covered with an insulator. It was
  • the portion provided on the suction head 3 of the first wiring portion 6 is provided on the surface of the suction head 3 by, for example, the MID method. Further, the portion provided outside the suction head 3 of the first wiring portion 6 may be in the form of a thin film provided on the surface of a member other than the suction head 3 by, for example, the MID method, but is a linear member such as a copper wire. It may be. It was
  • the second wiring portion 7 grounds the second electrode portion 2.
  • the second wiring portion 7 is made of a metal such as copper or aluminum.
  • the second wiring portion 7 may be made of an alloy or a conductor other than a metal such as conductive carbon.
  • the second wiring portion 7 may be made of the same material as the first wiring portion 6 or may be made of a different material. It was
  • the second wiring portion 7 includes a thin wire-shaped portion provided on the right side surface 3c of the suction head 3.
  • the second wiring portion 7 is also arranged in a portion other than the suction head 3 of the robot hand, for example. It is preferable that at least a part of the second wiring portion 7 is covered with an insulator. It was
  • the portion provided on the suction head 3 of the second wiring portion 7 is provided on the surface of the suction head 3 by, for example, the MID method. Further, the portion provided outside the suction head 3 of the second wiring portion 7 may be in the form of a thin film provided on the surface of a member other than the suction head 3 by, for example, the MID method, but is a linear member such as a copper wire. It may be. It was
  • the work can be electrostatically adsorbed by the electric field formed between the first electrode unit 1 and the second electrode unit 2 by applying a voltage by the power supply unit 8.
  • the approach of the work can be detected by using the second electrode unit 2, the third electrode unit 4, and the capacitance sensor 5.
  • One of the first electrode unit 1 and the second electrode unit 2 may be connected to the positive electrode of the power supply unit, and the other may be connected to the negative electrode of the power supply unit.
  • the third electrode unit of the first electrode unit 1 and the second electrode unit 2 is used. It is necessary to provide a switch that enables the electrode portion on the side electrically connected to 4 to be grounded. It was
  • the work suction device 100 further includes a third wiring portion 9.
  • the third wiring unit 9 branches from the second wiring unit 7 and connects the second wiring unit 7 and the third electrode unit 4.
  • the second electrode portion 2 and the third electrode portion 4 are electrically connected by a part of the second wiring portion 7 and the third wiring portion 9.
  • the second electrode portion 2 of the first electrode portion 1 and the second electrode portion 2 on the side that is grounded without being connected to the power supply portion 8 is electrostatically accommodated by the third wiring portion 9. It can be connected to the sensor 5. Therefore, the circuit configuration that enables switching from the setting used as the electrostatic chuck to the setting for detecting the approach of the work using the capacitance sensor 5 can be a simple configuration. It was
  • the third wiring portion 9 is composed of a conductor such as copper, like the first wiring portion 6 and the second wiring portion 7.
  • the third wiring portion 9 is preferably made of the same material as the second wiring portion 7.
  • the third wiring portion 9 is arranged outside the suction head 3.
  • the third wiring portion 9 is arranged, for example, in a portion other than the suction head 3 constituting the robot hand.
  • the third wiring portion 9 may be in the form of a thin film provided on the surface of a member other than the suction head 3 by, for example, the MID method, but may be a linear member such as a copper wire. It was
  • the work suction device 100 further includes a first switch 10.
  • the first switch 10 is provided at an intermediate position of the second wiring portion 7. Specifically, the first switch 10 is provided between the branch point 11 between the second wiring unit 7 and the third wiring unit 9 and the grounding point 12 of the second wiring unit 7.
  • the first switch 10 switches between grounding and non-grounding of the second electrode portion 2.
  • the first switch 10 may be, for example, a relay switch.
  • the relay method of the relay switch may be a contact relay or a non-contact relay. It was
  • the second electrode portion 2 can be in a state of not being grounded by the first switch 10. This makes it possible to accurately detect the approach of the work by reducing the possibility that the change in capacitance is caused by an external factor different from the approach of the work.
  • the first switch 10 is preferably provided closer to the branch point 11 than the intermediate position between the branch point 11 and the grounding point 12 in order to reduce the influence of an external factor different from the approach of the work as much as possible. It was
  • the work suction device 100 further includes a second switch 13.
  • the second switch 13 is provided at an intermediate position of the third wiring portion 9. Specifically, the second switch 13 is provided between the branch point 11 between the second wiring portion 7 and the third wiring portion 9 and the third electrode portion 4.
  • the second switch 13 switches between connection and non-connection between the second electrode portion 2 and the third electrode portion 4.
  • the second switch 13 may be, for example, a relay switch.
  • the relay method of the relay switch may be a contact relay or a non-contact relay. It was
  • FIG. 3 is a block diagram showing a configuration of a control system of the work suction device 100 according to the embodiment of the present disclosure.
  • the work suction device 100 further includes a control unit 14.
  • the control unit 14 has a control circuit that controls the entire work suction device 100.
  • the control unit 14 is composed of, for example, a computer having a CPU (Central Processing Unit), a RAM (Random Access Memory), a ROM (Read Only Memory), and the like. It was
  • the control unit 14 receives a signal from the capacitance sensor 5 and controls the power supply unit 8.
  • the control unit 14 controls the power supply unit 8 based on the signal input from the capacitance sensor 5. Specifically, when the control unit 14 recognizes the approach of the work to the second electrode unit 2 by the signal input from the capacitance sensor 5, the control unit 14 controls the power supply unit 8 to control the first electrode unit 1 and the second electrode unit 2. It is assumed that a predetermined voltage is applied between the unit and the unit 2. That is, the power supply unit 8 is automatically turned on under the control of the control unit 14. As a result, an electric field is formed between the first electrode portion 1 and the second electrode portion 2, and electrostatic adsorption of the work becomes possible. It was
  • the control unit 14 controls the power supply unit 8 to control the first electrode unit 1 and the second electrode unit 2. It is assumed that no voltage is applied between the electrode portion 2 and the electrode portion 2. That is, the power supply unit 8 is automatically turned off by the control of the control unit 14. This makes it possible to detect the approach of the work to the second electrode portion 2 by using the capacitance sensor 5. It was
  • a voltage can be automatically applied to the power supply unit 8 to suck the work. Further, when the work is not close to the target suction position, the power supply unit 8 can be automatically turned off to be in a monitoring state for monitoring the approach of the work. It was
  • control unit 14 also controls the first switch 10 and the second switch 13. Details of the control of the first switch 10 and the second switch 13 will be described later. It was
  • FIG. 4A and 4B are schematic views for explaining the operation of the work suction device 100 of the present disclosure.
  • FIG. 4A is a diagram for explaining an operation when the work suction device 100 is in a state of monitoring the approach of the work 200.
  • FIG. 4B is a diagram for explaining the operation when the work suction device 100 is in a state of electrostatically sucking the work 200.
  • the power supply unit 8 is turned off, the first switch 10 is turned off, and the second switch 13 is turned on according to the instruction of the control unit 14.
  • the capacitance sensor 5 detects the change in capacitance.
  • the control unit 14 recognizes the approach of the work to the second electrode unit 2 based on the information obtained from the capacitance sensor 5. It was
  • the power supply unit 8 When the approach of the work 200 is recognized by the control unit 14, as shown in FIG. 4B, the power supply unit 8 is turned on, the first switch 10 is turned on, and the second switch 13 is turned off according to the instruction of the control unit 14. ..
  • the power supply unit 8 When the power supply unit 8 is turned on, a high voltage is applied between the first electrode unit 1 and the second electrode unit 2, so that an electric field is applied between the first electrode unit 1 and the second electrode unit 2. Is formed.
  • the work 200 whose approach is detected is electrostatically attracted to the suction head 3. It was
  • the deviation between the target suction position of the work 200 and the position of detecting the approach of the work 200 is determined. It can be made smaller. That is, according to the configuration of the present embodiment, it is possible to appropriately detect that the work 200 has approached the target suction position, and even if the work 200 is minute, electrostatic suction can be performed with high accuracy. It was
  • FIG. 5 is a schematic view showing the configuration of the work suction device 100A of the first modification.
  • the first switch 10 and the second switch 13 provided in the work suction device 100 according to the above-described embodiment are omitted. That is, in the work suction device 100A of the first modification, the switch is not provided in the middle of the second wiring portion 7 and the middle of the third wiring portion 9.
  • the power supply unit 8 is turned off when the approach of the work is detected.
  • the third electrode portion 4 is electrically connected to the second electrode portion 2 and is capacitively coupled to the detection electrode 5a. Therefore, when the work approaches the second electrode portion 2, the capacitance sensor 5 detects a change in capacitance. That is, the control unit 14 can recognize the approach of the work to the second electrode unit 2. After the approach of the work is recognized, the power supply unit 8 is turned on, so that the work can be electrostatically adsorbed by the electric field generated between the first electrode unit 1 and the second electrode unit 2. In this modification, since the switches 10 and 13 can be omitted, the manufacturing cost of the work suction device 100A can be reduced. It was
  • the power supply unit 8 is turned on even if the above-mentioned second switch 13 is not provided. If this is the case, it is possible to prevent a high voltage from being applied to the capacitance sensor 5. Further, when there is a possibility that an external factor that causes a change in capacitance exists in the path provided with the second wiring portion 7, it is preferable that the first switch 10 described above is arranged. It was
  • FIG. 6 is a schematic plan view showing the configuration of the suction head 3B included in the work suction device of the second modification.
  • FIG. 6 is a view of the suction head 3B provided in a rectangular parallelepiped shape as viewed from above.
  • a first electrode portion 1B and a second electrode portion 2B are arranged on the upper surface 3aB of the suction head 3B.
  • the first electrode portion 1B and the second electrode portion 2B are arranged at intervals in the left-right direction. These points are the same as those in the above-described embodiment.
  • the first electrode portion 1B and the second electrode portion 2B are provided asymmetrically with a gap between the left and right directions interposed therebetween. This point is different from the above-described embodiment. Specifically, of the first electrode portion 1B and the second electrode portion 2B, the electrode portion connected to the third electrode portion 4 has a larger area than the other electrode portions. In this modification, the first electrode unit 1B is connected to the power supply unit 8, and the second electrode unit 2B is connected to the third electrode unit 4. Therefore, the area of the second electrode portion 2B is larger than that of the first electrode portion 1B. It was
  • the electrode portion 2B that is also used for detecting the work using the capacitance sensor 5 is the other electrode portion. Since it is provided larger than 1B, the accuracy of detecting the approach of the work can be improved. It was
  • FIG. 7 is a schematic perspective view showing the configuration of the suction head 3C included in the work suction device of the third modification.
  • FIG. 8 is a vertical sectional view of the suction head 3C shown in FIG. 7.
  • FIG. 8 is a cross-sectional view cut along a plane parallel to the vertical direction.
  • FIG. 8 is a cross-sectional view taken at the DD position of FIG.
  • the suction head 3C has a cylindrical shape. That is, the suction head 3C has a through hole 3d.
  • the suction head 3C has a through hole 3d in the central portion in a plan view from the vertical direction. The through hole 3d penetrates the suction head 3C in the vertical direction.
  • the shape of the suction head 3C may be changed according to the shape of the work, and may be a shape other than the cylindrical shape.
  • a first electrode portion 1C and a second electrode portion 2C are provided on the upper surface 3aC of the suction head 3C.
  • the first electrode portion 1C and the second electrode portion 2C at least a part of the electrode portion connected to the third electrode portion 4 is surrounded by the other electrode portion.
  • the first electrode unit 1C is connected to the power supply unit 8
  • the second electrode unit 2C is connected to the third electrode unit 4. That is, at least a part of the second electrode portion 2C is surrounded by the first electrode portion 1C. It was
  • the work may be necessary for the work to pass over the first electrode portion 1C in order to approach the second electrode portion 2C. That is, according to this configuration, the work can be detected when the work approaches both the first electrode portion 1C and the second electrode portion 2C. Therefore, when a voltage is applied between the first electrode portion 1C and the second electrode portion 2C according to the detection of the work by the capacitance sensor 5, the work can be electrostatically adsorbed with high accuracy. .. It was
  • the first electrode portion 1C and the second electrode portion 2C are annular, and more particularly annular.
  • the center positions of the first electrode portion 1C and the second electrode portion 2C are the same.
  • the first electrode portion 1C surrounds the entire second electrode portion 2C.
  • the first electrode portion 1C is provided along the outer edge of the upper surface 3aC of the suction head 3C.
  • the second electrode portion 2C is provided at intervals inside the first electrode portion 1C and surrounds the through hole 3d.
  • the first electrode portion 1C does not need to surround the entire second electrode portion 2C, and may have an arc shape, for example. It was
  • the first electrode portion 1C is connected to the power supply portion 8 via the first wiring portion 6C provided on the outer peripheral surface (outer surface) of the suction head 3C.
  • the second electrode portion 2C is grounded via the second wiring portion 7C provided on the inner peripheral surface of the suction head 3C, and is connected to the third electrode portion 4. That is, of the first electrode portion 1C and the second electrode portion 2C, the wiring portion 7C drawn out from the second electrode portion 2C connected to the third electrode portion 4 is arranged in the through hole 3d. It was
  • the suction head 3C of this modification can be manufactured by a technique (AM-MID technique) in which a MID method and an additive manufacturing method (AM: Additive Manufacturing) are combined.
  • AM-MID technique for example, the powder bed melt bonding method in the addition manufacturing method is used instead of the injection molding method in the MID method.
  • the powder bed melt-bonding method is a method in which powder materials are laminated one layer at a time, the cross-sectional shape is melted by an energy source such as a laser or an electron beam, and then solidified to form a shape.
  • the metal complex added to the powder material can be activated by laser light to perform modeling, and the conductor pattern can also be formed while performing modeling.
  • the conductor pattern can also be formed while performing modeling.
  • a method of plating a portion of the metal complex activated by laser light during modeling it is possible to form a suction head 3C having a second wiring portion 7C in the through hole 3d.
  • a conductor pattern can be freely formed not only on the surface of the suction head 3C but also inside. It was
  • FIGS. 9A and 9B are schematic views for explaining the effect when the suction head 3C of the third modification is used.
  • the work suction device is in a state of monitoring the approach of the work 200 by using the capacitance sensor 5. That is, no voltage is applied between the first electrode portion 1C and the second electrode portion 2C.
  • the height position of the work 200 with respect to the suction head 3C is the same. It was
  • the control unit 14 recognizes the approach of the work 200 when the magnitude of the change in capacitance exceeds a preset threshold value. Therefore, by setting the threshold value to a large value, the approach of the work 200 is not detected in the case of FIG. 9A, and the approach of the work 200 is detected in the case of FIG. 9B. can. It was
  • the work 200 is formed from the state of FIG. 9A so that the range in which the second electrode portion 2C and the work 200 overlap in the vertical direction becomes large.
  • the range in which the first electrode portion 1C and the work 200 overlap in the vertical direction also increases (see FIG. 9B). Therefore, when a voltage is applied between the first electrode unit 1C and the second electrode unit 2C by the power supply unit 8 when the change in capacitance exceeds the threshold value, the work 200 is electrostatically adsorbed with high accuracy. Can be done. It was
  • FIG. 10 is a schematic perspective view showing the configuration of the suction head 3D included in the work suction device of the fourth modification.
  • the first electrode portion 1D is an annular shape provided along the outer edge of the upper surface 3aD of the cylindrical suction head 3D.
  • the second electrode portion 2D has a circular shape unlike the third modification. More specifically, the second electrode portion 2D is an upper surface portion of the cylindrical member 15 inserted inside the cylindrical suction head 3D.
  • the columnar member 15 is a conductor such as copper, and also constitutes a part of the second wiring portion 7D.
  • the work is detected when the work approaches both the first electrode portion 1D and the second electrode portion 2D, as in the case of the third modification. Therefore, when a voltage is applied between the first electrode portion 1D and the second electrode portion 2D according to the detection of the work by the capacitance sensor 5, the work can be electrostatically adsorbed with high accuracy. .. It was
  • the present disclosure can be used, for example, in equipment for processing a work.

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)

Abstract

This workpiece suction device for sucking workpieces includes: a first electrode part and a second electrode part disposed therein; a suction head that electrostatically attracts a workpiece by means of an electric field generated between the first electrode part and the second electrode part; a third electrode part electrically connected to either the first electrode part or the second electrode part; and an electrostatic capacitance sensor having a detection electrode capacitively coupled with the third electrode part.

Description

ワーク吸着装置Work suction device
本開示は、ワーク吸着装置に関する。 The present disclosure relates to a work suction device.
従来、ロボットハンドによって、ワークのピッキングおよび搬送が行われている。ロボットハンドによりワークをピッキングする際に、ワークを物理的に挟んで把持する方式の他に、ワークを吸引する方式が知られる（例えば特許文献１、２参照）。　 Conventionally, a robot hand is used for picking and transporting a work. When picking a work by a robot hand, a method of sucking the work is known in addition to a method of physically sandwiching and gripping the work (see, for example, Patent Documents 1 and 2). It was
例えば、物品のつかみ具であるグラブが吸引装置として設計される（特許文献１参照）。当該吸引装置に検出スイッチが設けられ、検出スイッチは、吸引装置が物品と接触するに至ったときに、吸引真空に切換える。　 For example, a grab, which is a gripping tool for an article, is designed as a suction device (see Patent Document 1). The suction device is provided with a detection switch, which switches to suction vacuum when the suction device comes into contact with an article. It was
また、例えば、物体保持装置は、吸引装置、吸着パッド、および近接覚センサを備える（特許文献２参照）。吸引装置は、気体を吸引する。吸着パッドは、吸引装置に接続され、吸引装置による吸引に基づいて物体を吸着する。近接覚センサは、物体が吸着パッドに接近したことを検出する。そして、吸引装置は、物体が吸着パッドに接近したことを近接覚センサが検出したときに吸引を行うように制御される。 Further, for example, the object holding device includes a suction device, a suction pad, and a proximity sensor (see Patent Document 2). The suction device sucks the gas. The suction pad is connected to a suction device and sucks an object based on suction by the suction device. The proximity sensor detects that an object has approached the suction pad. Then, the suction device is controlled to perform suction when the proximity sensor detects that the object has approached the suction pad.
日本国公開公報：特開昭５６－５２１９８号公報Japanese Publication: Japanese Patent Application Laid-Open No. 56-52198 日本国公開公報：特開２０１９－４８３６７号公報Japanese Publication: Japanese Patent Application Laid-Open No. 2019-48637
従来の構成を参考として、ワークをピッキングするロボットハンドに、物体が所定の吸着位置に接近したことを検出する近接覚センサを配置することが考えられる。このような構成では、物体が所定の吸着位置に近づくと吸着動作を開始させることができるので、ピッキング動作を効率良く行うことができる。　 With reference to the conventional configuration, it is conceivable to place a proximity sensor for detecting that an object has approached a predetermined suction position on a robot hand that picks a work. In such a configuration, the suction operation can be started when the object approaches a predetermined suction position, so that the picking operation can be efficiently performed. It was
しかしながら、従来の構成では、吸着パッドと近接覚センサとが別物であり異なる位置に配置されるために、近接覚センサによるワークの検出位置は、吸着パッドの位置に対してずれた位置になる。このために、例えばワークが微小である場合等において、前述のずれが原因となって、ワークの吸着を適切に行えない可能性がある。　 However, in the conventional configuration, since the suction pad and the proximity sensor are different and are arranged at different positions, the detection position of the work by the proximity sensor is a position deviated from the position of the suction pad. For this reason, for example, when the work is very small, there is a possibility that the work cannot be properly adsorbed due to the above-mentioned deviation. It was
本開示は、所定の吸着位置へのワークの接近を適切に検出してワークを精度良く吸着することができる技術を提供することを目的とする。 An object of the present disclosure is to provide a technique capable of appropriately detecting the approach of a work to a predetermined suction position and sucking the work with high accuracy.
本開示の例示的なワーク吸着装置は、ワークを吸着するワーク吸着装置であって、第１電極部および第２電極部が配置され、前記第１電極部と前記第２電極部との間に形成される電界により前記ワークを静電吸着する吸着ヘッドと、前記第１電極部又は前記第２電極部と電気的に接続される第３電極部と、前記第３電極部と容量結合する検出電極を有する静電容量センサと、を有する。 The exemplary work suction device of the present disclosure is a work suction device that sucks a work, in which a first electrode portion and a second electrode portion are arranged, and between the first electrode portion and the second electrode portion. Detection of capacitive coupling between the suction head that electrostatically attracts the work by the formed electric field, the third electrode portion that is electrically connected to the first electrode portion or the second electrode portion, and the third electrode portion. It has a capacitance sensor with electrodes.
本開示の例示的なワーク吸着装置によれば、所定の吸着位置へのワークの接近を適切に検出してワークを精度良く吸着することができる。 According to the exemplary work suction device of the present disclosure, it is possible to appropriately detect the approach of the work to a predetermined suction position and suck the work with high accuracy.
図１は、本開示の実施形態に係るワーク吸着装置の概略図である。FIG. 1 is a schematic view of a work suction device according to an embodiment of the present disclosure. 図２は、本開示の実施形態に係る吸着ヘッドの概略斜視図である。FIG. 2 is a schematic perspective view of the suction head according to the embodiment of the present disclosure. 図３は、本開示の実施形態の係るワーク吸着装置の制御系の構成を示すブロック図である。FIG. 3 is a block diagram showing a configuration of a control system of the work suction device according to the embodiment of the present disclosure. 本開示のワーク吸着装置の動作を説明するための模式図である。It is a schematic diagram for demonstrating the operation of the work suction apparatus of this disclosure. 本開示のワーク吸着装置の動作を説明するための模式図である。It is a schematic diagram for demonstrating the operation of the work suction apparatus of this disclosure. 図５は、第１変形例のワーク吸着装置の構成を示す概略図である。FIG. 5 is a schematic view showing the configuration of the work suction device of the first modification. 図６は、第２変形例のワーク吸着装置が有する吸着ヘッドの構成を示す概略平面図である。FIG. 6 is a schematic plan view showing the configuration of the suction head included in the work suction device of the second modification. 図７は、第３変形例のワーク吸着装置が有する吸着ヘッドの構成を示す概略斜視図である。FIG. 7 is a schematic perspective view showing the configuration of the suction head included in the work suction device of the third modification. 図８は、図７に示す吸着ヘッドの縦断面図である。FIG. 8 is a vertical cross-sectional view of the suction head shown in FIG. 7. 図９Ａは、第３変形例の吸着ヘッドを用いた場合の効果を説明するための模式図である。FIG. 9A is a schematic diagram for explaining the effect when the suction head of the third modification is used. 図９Ｂは、第３変形例の吸着ヘッドを用いた場合の効果を説明するための模式図である。FIG. 9B is a schematic diagram for explaining the effect when the suction head of the third modification is used. 図１０は、第４変形例のワーク吸着装置が有する吸着ヘッドの構成を示す概略斜視図である。FIG. 10 is a schematic perspective view showing the configuration of the suction head included in the work suction device of the fourth modification.
以下、本開示の例示的な実施形態について、図面を参照しながら詳細に説明する。本明細書では、図面中に示す互いに直交するＸ方向、Ｙ方向、および、Ｚ方向のうち、Ｘ方向と平行な方向を左右方向、Ｙ方向と平行な方向を前後方向、Ｚ方向と平行な方向を上下方向として説明を行う。また、＋Ｘ方向を右側、－Ｘ方向を左側、＋Ｙ方向を前側、－Ｙ方向を後側、＋Ｚ方向を上側、－Ｚ方向を下側として説明を行う。ただし、これらの方向は単に説明のために用いられる名称であって、実際の位置関係及び方向を限定する意図はない。　 Hereinafter, exemplary embodiments of the present disclosure will be described in detail with reference to the drawings. In the present specification, among the X, Y, and Z directions orthogonal to each other shown in the drawings, the direction parallel to the X direction is the left-right direction, the direction parallel to the Y direction is the front-back direction, and the direction parallel to the Z direction. The explanation will be given with the direction as the vertical direction. Further, the description will be given with the + X direction as the right side, the −X direction as the left side, the + Y direction as the front side, the −Y direction as the rear side, the + Z direction as the upper side, and the −Z direction as the lower side. However, these directions are names used only for explanation, and there is no intention of limiting the actual positional relationship and direction. It was
＜１．ワーク吸着装置の概要＞



図１は、本開示の実施形態に係るワーク吸着装置１００の概略図である。ワーク吸着装置１００は、ワークを吸着する。ワークは、例えば加工、検査、又は、組み立て等の処理の対象となる物体である。ワークは、例えば樹脂製又は金属製である。ワーク吸着装置１００は、例えば、ロボットハンドに適用される。図１に示すように、ワーク吸着装置１００は、第１電極部１および第２電極部２が配置される吸着ヘッド３と、第３電極部４と、静電容量センサ５とを有する。　 <1. Overview of work suction device>



FIG. 1 is a schematic view of a work suction device 100 according to an embodiment of the present disclosure. The work suction device 100 sucks the work. The work is an object to be processed, for example, processed, inspected, or assembled. The work is made of, for example, resin or metal. The work suction device 100 is applied to, for example, a robot hand. As shown in FIG. 1, the work suction device 100 has a suction head 3 in which a first electrode portion 1 and a second electrode portion 2 are arranged, a third electrode portion 4, and a capacitance sensor 5.
図２は、本開示の実施形態に係る吸着ヘッド３の概略斜視図である。吸着ヘッド３は、例えば、ロボットハンドのエンドエフェクタの少なくとも一部を構成する。図２に示すように、本実施形態では、吸着ヘッド３は直方体形状である。ただし、吸着ヘッド３の形状は、直方体形状以外であってよい。吸着ヘッド３の形状は、吸着するワークの形状に合わせて様々な形状とされてよい。吸着ヘッド３は、例えば、直方体形状以外の角柱状、円柱状、半球状、球状、或いは、平面視においてＴ字状の立体形状等であってよい。吸着ヘッド３は、絶縁部材で構成される。吸着ヘッド３は、例えば樹脂製である。 FIG. 2 is a schematic perspective view of the suction head 3 according to the embodiment of the present disclosure. The suction head 3 constitutes, for example, at least a part of the end effector of the robot hand. As shown in FIG. 2, in the present embodiment, the suction head 3 has a rectangular parallelepiped shape. However, the shape of the suction head 3 may be other than the rectangular parallelepiped shape. The shape of the suction head 3 may be various shapes according to the shape of the work to be sucked. The suction head 3 may have, for example, a prismatic shape other than a rectangular parallelepiped shape, a columnar shape, a hemispherical shape, a spherical shape, or a T-shaped three-dimensional shape in a plan view. The suction head 3 is composed of an insulating member. The suction head 3 is made of, for example, a resin.
第１電極部１および第２電極部２は、吸着ヘッド３のワークを吸着する面に配置される。別の言い方をすると、第１電極部１と第２電極部２とで構成される電極部分は、吸着ヘッド３のワークと対向する面に設けられる導体部分の少なくとも一部のことを指す。本実施形態では、吸着ヘッド３の上面３ａが、ワークと対向する面である。第１電極部１と第２電極部２とは、吸着ヘッド３の同一面に設けられる。第１電極部１と第２電極部２とで構成される電極部分は、ワークが狙いの吸着位置に吸着された場合に吸着ヘッド３の上面３ａがワークと対向する領域を含む範囲にできる限り広く設けられることが好ましい。　 The first electrode portion 1 and the second electrode portion 2 are arranged on the surface of the suction head 3 for sucking the work. In other words, the electrode portion composed of the first electrode portion 1 and the second electrode portion 2 refers to at least a part of the conductor portion provided on the surface of the suction head 3 facing the work. In the present embodiment, the upper surface 3a of the suction head 3 is a surface facing the work. The first electrode portion 1 and the second electrode portion 2 are provided on the same surface of the suction head 3. The electrode portion composed of the first electrode portion 1 and the second electrode portion 2 is as long as possible so as to include the region where the upper surface 3a of the suction head 3 faces the work when the work is sucked at the target suction position. It is preferable that it is widely provided. It was
第１電極部１および第２電極部２は、例えば銅又はアルミニウム等の金属で構成される。なお、第１電極部１および第２電極部２は、合金で構成されてもよいし、導電性カーボン等の金属以外の導体で構成されてもよい。第１電極部１および第２電極部２は、例えば、矩形状、円形状、半円状、環状等、様々な形状とされてよい。本実施形態では、第１電極部１および第２電極部２は矩形状である。　 The first electrode portion 1 and the second electrode portion 2 are made of a metal such as copper or aluminum. The first electrode portion 1 and the second electrode portion 2 may be made of an alloy or may be made of a conductor other than a metal such as conductive carbon. The first electrode portion 1 and the second electrode portion 2 may have various shapes such as a rectangular shape, a circular shape, a semicircular shape, and an annular shape. In the present embodiment, the first electrode portion 1 and the second electrode portion 2 have a rectangular shape. It was
第１電極部１と第２電極部２とは、左右方向に間隔をあけて配置される。第１電極部１と第２電極部２との左右方向の間隔は、例えばワークの形状又は面積等に基づいて適宜設定されてよい。本実施形態においては、第１電極部１と第２電極部２とは、吸着ヘッド３を左右に二等分する二等分面に対して対称である。ただし、第１電極部１と第２電極部２とは、前述した二等分面に対して非対称に設けられてもよい。　 The first electrode portion 1 and the second electrode portion 2 are arranged at intervals in the left-right direction. The distance between the first electrode portion 1 and the second electrode portion 2 in the left-right direction may be appropriately set based on, for example, the shape or area of the work. In the present embodiment, the first electrode portion 1 and the second electrode portion 2 are symmetrical with respect to the bisector plane that bisects the suction head 3 to the left and right. However, the first electrode portion 1 and the second electrode portion 2 may be provided asymmetrically with respect to the above-mentioned bisector. It was
なお、第１電極部１および第２電極部２は、例えば、ＭＩＤ工法（Molded Interconnect Device）により形成することができる。ＭＩＤ工法には各種の方法があるが、例えばＬＤＳ（Laser Direct Structuring）法では金属触媒が含有された専用の樹脂材料を用いて射出成形して構造物を形成後、構造体にレーザを照射することで照射部位の金属触媒を活性化させる。この状態で無電解メッキ、続いて電解メッキを行うことで樹脂構造物状にレーザ照射した部位に金属膜パターンを形成することが可能である。　 The first electrode portion 1 and the second electrode portion 2 can be formed by, for example, the MID method (Molded Interconnect Device). There are various methods in the MID method. For example, in the LDS (Laser Direct Structuring) method, a special resin material containing a metal catalyst is used for injection molding to form a structure, and then the structure is irradiated with a laser. This activates the metal catalyst at the irradiation site. By performing electroless plating and then electrolytic plating in this state, it is possible to form a metal film pattern on the portion irradiated with the laser in the form of a resin structure. It was
本実施形態では、好ましい形態として、第１電極部１および第２電極部２は、不図示の絶縁膜で覆われる。絶縁膜は、第１電極部１および第２電極部２に印加する電圧に耐えることができる材質および膜厚とされる。絶縁膜は、例えば、ポリイミドシート又はポリウレタン系のシートで形成することができる。この場合、絶縁膜は、接着により第１電極部１および第２電極部２上に配置されてよい。絶縁膜は、シートでなく、スプレー又は電着により形成されてもよい。　 In the present embodiment, as a preferred embodiment, the first electrode portion 1 and the second electrode portion 2 are covered with an insulating film (not shown). The insulating film is made of a material and a film thickness that can withstand the voltage applied to the first electrode portion 1 and the second electrode portion 2. The insulating film can be formed of, for example, a polyimide sheet or a polyurethane-based sheet. In this case, the insulating film may be arranged on the first electrode portion 1 and the second electrode portion 2 by adhesion. The insulating film may be formed by spraying or electrodeposition instead of the sheet. It was
第１電極部１および第２電極部２を覆う絶縁膜が設けられることにより、ワークが絶縁性の部材の場合だけでなく、金属等の導電性の部材である場合にも、ワーク吸着装置１００を利用することが可能になる。また、絶縁膜が設けられることにより、第１電極部１と第２電極部２との間に高電圧を印加した際に、第１電極部１と第２電極部２との間でショートが発生することを防止することができる。また、絶縁膜が設けられることにより、ワークが第１電極部１および第２電極部２に直接載せられることを防止でき、第１電極部１および第２電極部２の耐久性を向上することができる。　 By providing the insulating film covering the first electrode portion 1 and the second electrode portion 2, the work suction device 100 is provided not only when the work is an insulating member but also when the work is a conductive member such as metal. Will be available. Further, by providing the insulating film, when a high voltage is applied between the first electrode portion 1 and the second electrode portion 2, a short circuit occurs between the first electrode portion 1 and the second electrode portion 2. It can be prevented from occurring. Further, by providing the insulating film, it is possible to prevent the work from being directly placed on the first electrode portion 1 and the second electrode portion 2, and to improve the durability of the first electrode portion 1 and the second electrode portion 2. Can be done. It was
吸着ヘッド３は、第１電極部１と第２電極部２との間に形成される電界によりワークを静電吸着する。詳細には、第１電極部１と第２電極部２との間に電圧を印加することにより、第１電極部１と第２電極部２との間に電界が形成される。第１電極部１と第２電極部２とは、いわゆる双極型の静電チャックを構成する。第１電極部１と第２電極部２とにより構成される静電チャックは、クーロン力型とジョンソン・ラーベック力型とのいずれでもよい。本実施形態の静電チャックは、クーロン力型である。　 The suction head 3 electrostatically sucks the work by the electric field formed between the first electrode portion 1 and the second electrode portion 2. Specifically, by applying a voltage between the first electrode portion 1 and the second electrode portion 2, an electric field is formed between the first electrode portion 1 and the second electrode portion 2. The first electrode portion 1 and the second electrode portion 2 form a so-called bipolar electrostatic chuck. The electrostatic chuck composed of the first electrode portion 1 and the second electrode portion 2 may be either a Coulomb force type or a Johnson-Rahbek force type. The electrostatic chuck of this embodiment is a Coulomb force type. It was
第３電極部４は、第１電極部１又は第２電極部２と電気的に接続される。なお、第３電極部４は、第１電極部１又は第２電極部２と常に電気的に接続されてもよいが、必要な時に第１電極部１又は第２電極部２と電気的に接続される構成であってもよい。本実施形態では、第３電極部４は、詳細には第２電極部２と電気的に接続可能に設けられており、必要に応じて第２電極部２と電気的に接続される。　 The third electrode portion 4 is electrically connected to the first electrode portion 1 or the second electrode portion 2. The third electrode portion 4 may always be electrically connected to the first electrode portion 1 or the second electrode portion 2, but may be electrically connected to the first electrode portion 1 or the second electrode portion 2 when necessary. It may be configured to be connected. In the present embodiment, the third electrode portion 4 is provided in detail so as to be electrically connectable to the second electrode portion 2, and is electrically connected to the second electrode portion 2 as needed. It was
第３電極部４は、吸着ヘッド３に設けられてもよいが、吸着ヘッド３外に設けられてもよい。本実施形態では、第３電極部４は、吸着ヘッド３とは異なる部分に設けられる。吸着ヘッド３と異なる部分は、例えば、ロボットハンドのエンドエフェクタ以外の部分等であってよい。第３電極部４は、例えばロボットハンドに設けられる配線を介して第２電極部２と電気的に接続される。　 The third electrode portion 4 may be provided on the suction head 3, but may be provided outside the suction head 3. In the present embodiment, the third electrode portion 4 is provided at a portion different from that of the suction head 3. The portion different from the suction head 3 may be, for example, a portion other than the end effector of the robot hand. The third electrode portion 4 is electrically connected to the second electrode portion 2 via, for example, wiring provided in the robot hand. It was
静電容量センサ５は、静電容量の変化を検出する。静電容量センサ５は、公知の静電容量センサであってよい。静電容量センサ５は検出電極５ａを有する。検出電極５ａは、例えば、真鍮又は銅等の導電性の薄板で構成される。静電容量センサ５は、検出電極５ａの他に不図示の発振回路を有する。発振回路は、検出電極５ａと不図示の回路電源間の容量で発振条件が変化する。ここで、仮に静電容量センサ５が単独で使用されることを想定する。この場合、検出電極５ａへの物体の接近によって検出電極５ａと回路電源間の容量値が変化すると、発振回路は発振を開始或いは停止する。この発振の開始或いは停止の検出により、静電容量センサ５は、静電容量の変化を検出する。 The capacitance sensor 5 detects a change in capacitance. The capacitance sensor 5 may be a known capacitance sensor. The capacitance sensor 5 has a detection electrode 5a. The detection electrode 5a is made of a conductive thin plate such as brass or copper. The capacitance sensor 5 has an oscillation circuit (not shown) in addition to the detection electrode 5a. In the oscillation circuit, the oscillation conditions change depending on the capacitance between the detection electrode 5a and the circuit power supply (not shown). Here, it is assumed that the capacitance sensor 5 is used alone. In this case, when the capacitance value between the detection electrode 5a and the circuit power supply changes due to the approach of the object to the detection electrode 5a, the oscillation circuit starts or stops the oscillation. By detecting the start or stop of this oscillation, the capacitance sensor 5 detects a change in capacitance.
本実施形態では、検出電極５ａは第３電極部４と容量結合する。このために、第３電極部４が第２電極部２と電気的に接続されている場合、第２電極部２にワークが接近すると、検出電極５ａと発振回路の回路電源間の容量値が変化する。すなわち、第２電極部２にワークが接近すると、静電容量センサ５は、静電容量の変化を検出する。静電容量センサ５は、第２電極部２にワークが接近した場合、そのことを検出する。　 In the present embodiment, the detection electrode 5a is capacitively coupled to the third electrode portion 4. Therefore, when the third electrode portion 4 is electrically connected to the second electrode portion 2, when the work approaches the second electrode portion 2, the capacitance value between the detection electrode 5a and the circuit power supply of the oscillation circuit increases. Change. That is, when the work approaches the second electrode portion 2, the capacitance sensor 5 detects a change in capacitance. The capacitance sensor 5 detects when the work approaches the second electrode portion 2. It was
なお、第３電極部４と検出電極５ａとは容量結合していればよい。このために、第３電極部４と検出電極５ａとは、本実施形態のように互いに対向する構成でもよいが、これとは異なる構成であってもよい。第３電極部４と検出電極５ａとの間に、少なくとも１つの追加電極部が配置され、複数の容量結合が直列に並んだ構成とされてもよい。この場合、複数の容量結合間で、静電容量は互いに同じとされる。なお、容量結合は、互いに相対移動する電極間で形成されてもよい。　 The third electrode portion 4 and the detection electrode 5a may be capacitively coupled. For this reason, the third electrode portion 4 and the detection electrode 5a may have a configuration facing each other as in the present embodiment, but may have a configuration different from this. At least one additional electrode portion may be arranged between the third electrode portion 4 and the detection electrode 5a, and a plurality of capacitive couplings may be arranged in series. In this case, the capacitances are the same among the plurality of capacitive couplings. Capacitive coupling may be formed between electrodes that move relative to each other. It was
また、第３電極部４は、第１電極部１と電気的に接続される構成であってもよい。この場合には、静電容量センサ５によって、第１電極部１へのワークの接近を検出することができる。　 Further, the third electrode portion 4 may be configured to be electrically connected to the first electrode portion 1. In this case, the capacitance sensor 5 can detect the approach of the work to the first electrode portion 1. It was
本実施形態の構成によれば、静電吸着を行うための第１電極部１と第２電極部２とのうちの一方が、ワークの接近を検出する静電容量センサ５用の電極としても利用される。このために、本実施形態の構成によれば、ワークの狙いの吸着位置と、ワークの接近を検出する位置とのずれを小さくすることができる。すなわち、本実施形態の構成によれば、ワークが狙いの吸着位置に接近したことを適切に検出することができ、微小なワークであっても精度良く静電吸着を行うことができる。　 According to the configuration of the present embodiment, one of the first electrode portion 1 and the second electrode portion 2 for performing electrostatic adsorption can also be an electrode for the capacitance sensor 5 that detects the approach of the work. It will be used. Therefore, according to the configuration of the present embodiment, it is possible to reduce the deviation between the target suction position of the work and the position where the approach of the work is detected. That is, according to the configuration of the present embodiment, it is possible to appropriately detect that the work has approached the target suction position, and even a minute work can perform electrostatic suction with high accuracy. It was
＜２．ワーク吸着装置の詳細構成＞



図１に示すように、詳細には、ワーク吸着装置１００は、第１配線部６と第２配線部７とを更に有する。　 <2. Detailed configuration of work suction device>



As shown in FIG. 1, in detail, the work suction device 100 further includes a first wiring unit 6 and a second wiring unit 7.
第１配線部６は、第１電極部１を電源部８に接続する。第１電極部１と電源部８とは、第１配線部６により電気的に接続される。例えば、第１電極部１は、第１配線部６を介して電源部８の正極に接続される。なお、電源部８は高電圧電源である。電源部８により印加される電圧の大きさは、例えば１ｋＶから１０ｋＶ程度である。電源部８は、オンオフ機能を有する。電源部８は、印加する電圧の大きさを調節する調節機能を有してよい。電源部８は、吸着ヘッド３に設けられてもよいが、本実施形態では、吸着ヘッド３外に設けられる。　 The first wiring unit 6 connects the first electrode unit 1 to the power supply unit 8. The first electrode unit 1 and the power supply unit 8 are electrically connected by the first wiring unit 6. For example, the first electrode unit 1 is connected to the positive electrode of the power supply unit 8 via the first wiring unit 6. The power supply unit 8 is a high voltage power supply. The magnitude of the voltage applied by the power supply unit 8 is, for example, about 1 kV to 10 kV. The power supply unit 8 has an on / off function. The power supply unit 8 may have an adjusting function for adjusting the magnitude of the applied voltage. The power supply unit 8 may be provided on the suction head 3, but in the present embodiment, the power supply unit 8 is provided outside the suction head 3. It was
第１配線部６は、例えば銅又はアルミニウム等の金属で構成される。なお、第１配線部６は、合金で構成されてもよいし、導電性カーボン等の金属以外の導体で構成されてもよい。第１配線部６は、少なくとも一部が吸着ヘッド３に設けられる。本実施形態では、第１配線部６は、一部が吸着ヘッド３の表面に設けられる。第１配線部６は、吸着ヘッド３の左側面３ｂに設けられる細線状の導体を含む。第１配線部６は、例えば、ロボットハンドの吸着ヘッド３以外の部分にも設けられる。第１配線部６は、少なくとも一部が絶縁体で覆われることが好ましい。　 The first wiring portion 6 is made of a metal such as copper or aluminum. The first wiring portion 6 may be made of an alloy or may be made of a conductor other than a metal such as conductive carbon. At least a part of the first wiring portion 6 is provided on the suction head 3. In the present embodiment, a part of the first wiring portion 6 is provided on the surface of the suction head 3. The first wiring portion 6 includes a thin wire-shaped conductor provided on the left side surface 3b of the suction head 3. The first wiring portion 6 is provided, for example, in a portion other than the suction head 3 of the robot hand. It is preferable that at least a part of the first wiring portion 6 is covered with an insulator. It was
なお、第１配線部６の吸着ヘッド３に設けられる部分は、例えばＭＩＤ工法によって吸着ヘッド３の表面に設けられる。また、第１配線部６の吸着ヘッド３外に設けられる部分は、例えばＭＩＤ工法等によって吸着ヘッド３以外の部材の表面に設けられる薄膜状であってもよいが、銅線等の線状部材であってもよい。　 The portion provided on the suction head 3 of the first wiring portion 6 is provided on the surface of the suction head 3 by, for example, the MID method. Further, the portion provided outside the suction head 3 of the first wiring portion 6 may be in the form of a thin film provided on the surface of a member other than the suction head 3 by, for example, the MID method, but is a linear member such as a copper wire. It may be. It was
第２配線部７は、第２電極部２を接地する。第２配線部７は、例えば銅又はアルミニウム等の金属で構成される。なお、第２配線部７は、合金で構成されてもよいし、導電性カーボン等の金属以外の導体で構成されてもよい。第２配線部７は、第１配線部６と同じ材質で構成されても、異なる材質で構成されてもよい。　 The second wiring portion 7 grounds the second electrode portion 2. The second wiring portion 7 is made of a metal such as copper or aluminum. The second wiring portion 7 may be made of an alloy or a conductor other than a metal such as conductive carbon. The second wiring portion 7 may be made of the same material as the first wiring portion 6 or may be made of a different material. It was
第２配線部７は、一部が吸着ヘッド３に設けられる。第２配線部７は、吸着ヘッド３の右側面３ｃに設けられる細線状の部分を含む。第２配線部７は、例えば、ロボットハンドの吸着ヘッド３以外の部分にも配置される。第２配線部７は、少なくとも一部が絶縁体で覆われることが好ましい。　 A part of the second wiring portion 7 is provided on the suction head 3. The second wiring portion 7 includes a thin wire-shaped portion provided on the right side surface 3c of the suction head 3. The second wiring portion 7 is also arranged in a portion other than the suction head 3 of the robot hand, for example. It is preferable that at least a part of the second wiring portion 7 is covered with an insulator. It was
なお、第２配線部７の吸着ヘッド３に設けられる部分は、例えばＭＩＤ工法によって吸着ヘッド３の表面に設けられる。また、第２配線部７の吸着ヘッド３外に設けられる部分は、例えばＭＩＤ工法等によって吸着ヘッド３以外の部材の表面に設けられる薄膜状であってもよいが、銅線等の線状部材であってもよい。　 The portion provided on the suction head 3 of the second wiring portion 7 is provided on the surface of the suction head 3 by, for example, the MID method. Further, the portion provided outside the suction head 3 of the second wiring portion 7 may be in the form of a thin film provided on the surface of a member other than the suction head 3 by, for example, the MID method, but is a linear member such as a copper wire. It may be. It was
本実施形態の構成によれば、電源部８により電圧を印加して第１電極部１および第２電極部２との間に形成される電界によってワークを静電吸着することができる。一方で、電源部８による電圧の印加を行わない場合に、第２電極部２、第３電極部４および静電容量センサ５を用いてワークの接近を検出することができる。　 According to the configuration of the present embodiment, the work can be electrostatically adsorbed by the electric field formed between the first electrode unit 1 and the second electrode unit 2 by applying a voltage by the power supply unit 8. On the other hand, when the voltage is not applied by the power supply unit 8, the approach of the work can be detected by using the second electrode unit 2, the third electrode unit 4, and the capacitance sensor 5. It was
なお、第１電極部１と第２電極部２とのうちの一方が電源部の正極に接続され、他方が電源部の負極に接続される構成としてもよい。この場合には、電源部がオフとされた状態で静電容量センサ５によるワークの接近の検出を適切に行うために、第１電極部１と第２電極部２とのうち第３電極部４と電気的に接続される側の電極部を、接地可能とするスイッチを設ける必要がある。　 One of the first electrode unit 1 and the second electrode unit 2 may be connected to the positive electrode of the power supply unit, and the other may be connected to the negative electrode of the power supply unit. In this case, in order to appropriately detect the approach of the work by the capacitance sensor 5 with the power supply unit turned off, the third electrode unit of the first electrode unit 1 and the second electrode unit 2 is used. It is necessary to provide a switch that enables the electrode portion on the side electrically connected to 4 to be grounded. It was
本実施形態においては、ワーク吸着装置１００は第３配線部９を更に有する。第３配線部９は、第２配線部７から分岐して、第２配線部７と第３電極部４とを接続する。別の言い方をすると、第２電極部２と第３電極部４とは、第２配線部７の一部と第３配線部９とにより電気的に接続される。本構成によれば、第１電極部１と第２電極部２とのうち電源部８に接続されることなく接地される側の第２電極部２を、第３配線部９により静電容量センサ５と接続することができる。このために、静電チャックとして用いる設定から静電容量センサ５を用いたワークの接近を検出する設定へと切り替え可能とする回路構成を、単純な構成とすることができる。　 In the present embodiment, the work suction device 100 further includes a third wiring portion 9. The third wiring unit 9 branches from the second wiring unit 7 and connects the second wiring unit 7 and the third electrode unit 4. In other words, the second electrode portion 2 and the third electrode portion 4 are electrically connected by a part of the second wiring portion 7 and the third wiring portion 9. According to this configuration, the second electrode portion 2 of the first electrode portion 1 and the second electrode portion 2 on the side that is grounded without being connected to the power supply portion 8 is electrostatically accommodated by the third wiring portion 9. It can be connected to the sensor 5. Therefore, the circuit configuration that enables switching from the setting used as the electrostatic chuck to the setting for detecting the approach of the work using the capacitance sensor 5 can be a simple configuration. It was
第３配線部９は、第１配線部６および第２配線部７と同様に、銅等の導体によって構成される。第３配線部９は、第２配線部７と同じ材質であることが好ましい。本実施形態では、第３配線部９は吸着ヘッド３外に配置される。第３配線部９は、例えば、ロボットハンドを構成する吸着ヘッド３以外の部分に配置される。第３配線部９は、例えばＭＩＤ工法等によって吸着ヘッド３以外の部材の表面に設けられる薄膜状であってもよいが、銅線等の線状部材であってもよい。　 The third wiring portion 9 is composed of a conductor such as copper, like the first wiring portion 6 and the second wiring portion 7. The third wiring portion 9 is preferably made of the same material as the second wiring portion 7. In the present embodiment, the third wiring portion 9 is arranged outside the suction head 3. The third wiring portion 9 is arranged, for example, in a portion other than the suction head 3 constituting the robot hand. The third wiring portion 9 may be in the form of a thin film provided on the surface of a member other than the suction head 3 by, for example, the MID method, but may be a linear member such as a copper wire. It was
本実施形態においては、ワーク吸着装置１００は、第１スイッチ１０を更に有する。第１スイッチ１０は、第２配線部７の途中位置に設けられる。詳細には、第１スイッチ１０は、第２配線部７と第３配線部９との分岐点１１と、第２配線部７の接地点１２との間に設けられる。第１スイッチ１０は、第２電極部２の接地と非接地とを切り替える。第１スイッチ１０は、例えば、リレースイッチであってよい。リレースイッチのリレー方式は、有接点リレーでも無接点リレーでもよい。　 In the present embodiment, the work suction device 100 further includes a first switch 10. The first switch 10 is provided at an intermediate position of the second wiring portion 7. Specifically, the first switch 10 is provided between the branch point 11 between the second wiring unit 7 and the third wiring unit 9 and the grounding point 12 of the second wiring unit 7. The first switch 10 switches between grounding and non-grounding of the second electrode portion 2. The first switch 10 may be, for example, a relay switch. The relay method of the relay switch may be a contact relay or a non-contact relay. It was
このような構成とすることにより、静電容量センサ５を用いてワークの接近を検出する際に、第１スイッチ１０にて第２電極部２が接地していない状態とすることができる。これにより、ワークの接近とは異なる外部要因にて静電容量の変化がもたらされる可能性を低減して、ワークの接近を正確に検出することができる。なお、第１スイッチ１０は、ワークの接近とは異なる外部要因の影響をできるだけ低減するために、分岐点１１と接地点１２との中間位置よりも分岐点１１寄りに設けられることが好ましい。　 With such a configuration, when the approach of the work is detected by using the capacitance sensor 5, the second electrode portion 2 can be in a state of not being grounded by the first switch 10. This makes it possible to accurately detect the approach of the work by reducing the possibility that the change in capacitance is caused by an external factor different from the approach of the work. The first switch 10 is preferably provided closer to the branch point 11 than the intermediate position between the branch point 11 and the grounding point 12 in order to reduce the influence of an external factor different from the approach of the work as much as possible. It was
また、本実施形態においては、ワーク吸着装置１００は、第２スイッチ１３を更に有する。第２スイッチ１３は、第３配線部９の途中位置に設けられる。詳細には、第２スイッチ１３は、第２配線部７と第３配線部９との分岐点１１と第３電極部４との間に設けられる。第２スイッチ１３は、第２電極部２と第３電極部４との接続と非接続とを切り替える。第２スイッチ１３は、例えば、リレースイッチであってよい。リレースイッチのリレー方式は、有接点リレーでも無接点リレーでもよい。　 Further, in the present embodiment, the work suction device 100 further includes a second switch 13. The second switch 13 is provided at an intermediate position of the third wiring portion 9. Specifically, the second switch 13 is provided between the branch point 11 between the second wiring portion 7 and the third wiring portion 9 and the third electrode portion 4. The second switch 13 switches between connection and non-connection between the second electrode portion 2 and the third electrode portion 4. The second switch 13 may be, for example, a relay switch. The relay method of the relay switch may be a contact relay or a non-contact relay. It was
このような構成とすることにより、ワークの静電吸着を行うために電源部８に電圧を印加する際に、第２スイッチ１３をオフとして、第２電極部２と第３電極部４とを電気的に非接続とすることができる。これにより、電源部８に高電圧を印加した場合に、例えば絶縁破壊等が原因となって静電容量センサ５に高電圧が誘起されることを防止することができる。　 With such a configuration, when a voltage is applied to the power supply unit 8 to perform electrostatic adsorption of the work, the second switch 13 is turned off and the second electrode unit 2 and the third electrode unit 4 are separated. It can be electrically disconnected. As a result, when a high voltage is applied to the power supply unit 8, it is possible to prevent the high voltage from being induced in the capacitance sensor 5 due to, for example, dielectric breakdown. It was
図３は、本開示の実施形態の係るワーク吸着装置１００の制御系の構成を示すブロック図である。図３に示すように、ワーク吸着装置１００は、制御部１４を更に有する。制御部１４は、ワーク吸着装置１００の全体を制御する制御回路を有する。制御部１４は、例えば、ＣＰＵ（Central Processing Unit）、ＲＡＭ（Random Access Memory）およびＲＯＭ（Read Only Memory）等を有するコンピュータで構成される。　 FIG. 3 is a block diagram showing a configuration of a control system of the work suction device 100 according to the embodiment of the present disclosure. As shown in FIG. 3, the work suction device 100 further includes a control unit 14. The control unit 14 has a control circuit that controls the entire work suction device 100. The control unit 14 is composed of, for example, a computer having a CPU (Central Processing Unit), a RAM (Random Access Memory), a ROM (Read Only Memory), and the like. It was
制御部１４は、静電容量センサ５から信号が入力され、電源部８を制御する。制御部１４は、静電容量センサ５から入力された信号に基づき電源部８を制御する。詳細には、制御部１４は、静電容量センサ５から入力された信号によりワークの第２電極部２への接近を認識すると、電源部８を制御して第１電極部１と第２電極部２との間に所定の電圧が印加された状態とする。すなわち、電源部８は、制御部１４の制御により自動的にオンされる。これにより、第１電極部１と第２電極部２との間に電界が形成され、ワークの静電吸着が可能になる。　 The control unit 14 receives a signal from the capacitance sensor 5 and controls the power supply unit 8. The control unit 14 controls the power supply unit 8 based on the signal input from the capacitance sensor 5. Specifically, when the control unit 14 recognizes the approach of the work to the second electrode unit 2 by the signal input from the capacitance sensor 5, the control unit 14 controls the power supply unit 8 to control the first electrode unit 1 and the second electrode unit 2. It is assumed that a predetermined voltage is applied between the unit and the unit 2. That is, the power supply unit 8 is automatically turned on under the control of the control unit 14. As a result, an electric field is formed between the first electrode portion 1 and the second electrode portion 2, and electrostatic adsorption of the work becomes possible. It was
一方、制御部１４は、静電容量センサ５から得られる情報によりワークが第２電極部２に接近していないと判断される場合、電源部８を制御して第１電極部１と第２電極部２との間に電圧の印加が行われない状態とする。すなわち、電源部８は、制御部１４の制御により自動的にオフされる。これにより、静電容量センサ５を用いて第２電極部２へのワークの接近を検出することが可能になる。　 On the other hand, when it is determined from the information obtained from the capacitance sensor 5 that the work is not close to the second electrode unit 2, the control unit 14 controls the power supply unit 8 to control the first electrode unit 1 and the second electrode unit 2. It is assumed that no voltage is applied between the electrode portion 2 and the electrode portion 2. That is, the power supply unit 8 is automatically turned off by the control of the control unit 14. This makes it possible to detect the approach of the work to the second electrode portion 2 by using the capacitance sensor 5. It was
すなわち、制御部１４が設けられることにより、ワークが狙いの吸着位置に接近した場合に、自動的に電源部８に電圧を印加させてワークの吸着を行うことができる。また、ワークが狙いの吸着位置に接近していない場合には、電源部８を自動的にオフとして、ワークの接近を監視する監視状態とすることができる。　 That is, by providing the control unit 14, when the work approaches the target suction position, a voltage can be automatically applied to the power supply unit 8 to suck the work. Further, when the work is not close to the target suction position, the power supply unit 8 can be automatically turned off to be in a monitoring state for monitoring the approach of the work. It was
なお、本実施形態では、制御部１４は、第１スイッチ１０および第２スイッチ１３の制御も行う。第１スイッチ１０および第２スイッチ１３の制御の詳細については後述する。　 In this embodiment, the control unit 14 also controls the first switch 10 and the second switch 13. Details of the control of the first switch 10 and the second switch 13 will be described later. It was
＜３．ワーク吸着装置の動作＞



図４Ａおよび図４Ｂは、本開示のワーク吸着装置１００の動作を説明するための模式図である。図４Ａは、ワーク吸着装置１００がワーク２００の接近を監視する状態である場合の動作を説明するための図である。図４Ｂは、ワーク吸着装置１００がワーク２００を静電吸着する状態である場合の動作を説明するための図である。　 <3. Operation of work suction device>



4A and 4B are schematic views for explaining the operation of the work suction device 100 of the present disclosure. FIG. 4A is a diagram for explaining an operation when the work suction device 100 is in a state of monitoring the approach of the work 200. FIG. 4B is a diagram for explaining the operation when the work suction device 100 is in a state of electrostatically sucking the work 200.
ワーク２００の接近を監視する状態においては、図４Ａに示すように、制御部１４の指示により、電源部８はオフ、第１スイッチ１０はオフ、第２スイッチ１３はオンとされる。この状態では、上述のように、第２電極部２にワーク２００が接近すると、静電容量センサ５が静電容量の変化を検出する。制御部１４は、静電容量センサ５から得られる情報により第２電極部２へのワークの接近を認識する。　 In the state of monitoring the approach of the work 200, as shown in FIG. 4A, the power supply unit 8 is turned off, the first switch 10 is turned off, and the second switch 13 is turned on according to the instruction of the control unit 14. In this state, as described above, when the work 200 approaches the second electrode portion 2, the capacitance sensor 5 detects the change in capacitance. The control unit 14 recognizes the approach of the work to the second electrode unit 2 based on the information obtained from the capacitance sensor 5. It was
制御部１４によりワーク２００の接近が認識されると、図４Ｂに示すように、制御部１４の指示により、電源部８はオン、第１スイッチ１０はオン、第２スイッチ１３はオフとされる。電源部８がオンとされると、第１電極部１と第２電極部２との間に高電圧が印加されるために、第１電極部１と第２電極部２との間に電界が形成される。これにより、接近が検出されたワーク２００は吸着ヘッド３に静電吸着される。　 When the approach of the work 200 is recognized by the control unit 14, as shown in FIG. 4B, the power supply unit 8 is turned on, the first switch 10 is turned on, and the second switch 13 is turned off according to the instruction of the control unit 14. .. When the power supply unit 8 is turned on, a high voltage is applied between the first electrode unit 1 and the second electrode unit 2, so that an electric field is applied between the first electrode unit 1 and the second electrode unit 2. Is formed. As a result, the work 200 whose approach is detected is electrostatically attracted to the suction head 3. It was
静電吸着を行うために設けられた第２電極部２を利用してワーク２００の接近を検出するために、ワーク２００の狙いの吸着位置と、ワーク２００の接近を検出する位置とのずれを小さくすることができる。すなわち、本実施形態の構成によれば、ワーク２００が狙いの吸着位置に接近したことを適切に検出することができ、ワーク２００が微小であっても精度良く静電吸着を行うことができる。　 In order to detect the approach of the work 200 by using the second electrode portion 2 provided for electrostatic adsorption, the deviation between the target suction position of the work 200 and the position of detecting the approach of the work 200 is determined. It can be made smaller. That is, according to the configuration of the present embodiment, it is possible to appropriately detect that the work 200 has approached the target suction position, and even if the work 200 is minute, electrostatic suction can be performed with high accuracy. It was
＜４．変形例＞



（４－１．第１変形例）



図５は、第１変形例のワーク吸着装置１００Ａの構成を示す概略図である。本変形例のワーク吸着装置１００Ａでは、上述した実施形態に係るワーク吸着装置１００に設けられた第１スイッチ１０と第２スイッチ１３とが省略されている。すなわち、第１変形例のワーク吸着装置１００Ａにおいては、第２配線部７の途中、および、第３配線部９の途中にスイッチが設けられない。　 <4. Modification example>



(4-1. First modification)



FIG. 5 is a schematic view showing the configuration of the work suction device 100A of the first modification. In the work suction device 100A of this modification, the first switch 10 and the second switch 13 provided in the work suction device 100 according to the above-described embodiment are omitted. That is, in the work suction device 100A of the first modification, the switch is not provided in the middle of the second wiring portion 7 and the middle of the third wiring portion 9.
本変形例では、ワークの接近を検出する際には、電源部８がオフされる。第３電極部４が第２電極部２と電気的に接続されるとともに検出電極５ａと容量結合される。このために、第２電極部２にワークが接近すると、静電容量センサ５により静電容量の変化が検出される。すなわち、制御部１４が、第２電極部２へのワークの接近を認識することができる。ワークの接近が認識された後に、電源部８がオンとされることによって、第１電極部１と第２電極部２との間に生じる電界により、ワークを静電吸着することができる。本変形例では、スイッチ１０、１３を省略することができるために、ワーク吸着装置１００Ａの製造コストを低減することができる。　 In this modification, the power supply unit 8 is turned off when the approach of the work is detected. The third electrode portion 4 is electrically connected to the second electrode portion 2 and is capacitively coupled to the detection electrode 5a. Therefore, when the work approaches the second electrode portion 2, the capacitance sensor 5 detects a change in capacitance. That is, the control unit 14 can recognize the approach of the work to the second electrode unit 2. After the approach of the work is recognized, the power supply unit 8 is turned on, so that the work can be electrostatically adsorbed by the electric field generated between the first electrode unit 1 and the second electrode unit 2. In this modification, since the switches 10 and 13 can be omitted, the manufacturing cost of the work suction device 100A can be reduced. It was
なお、第３電極部４と静電容量センサ５の検出電極５ａとの間は電気的に縁切りされているために、上述の第２スイッチ１３が設けられなくても、電源部８がオンとされた場合に静電容量センサ５に高電圧が印加されることは防止できる。また、第２配線部７が設けられる経路中に静電容量の変化をもたらす外部要因が存在する可能性がある場合には、上述の第１スイッチ１０が配置されることが好ましい。　 Since the third electrode unit 4 and the detection electrode 5a of the capacitance sensor 5 are electrically cut off, the power supply unit 8 is turned on even if the above-mentioned second switch 13 is not provided. If this is the case, it is possible to prevent a high voltage from being applied to the capacitance sensor 5. Further, when there is a possibility that an external factor that causes a change in capacitance exists in the path provided with the second wiring portion 7, it is preferable that the first switch 10 described above is arranged. It was
（４－２．第２変形例）



図６は、第２変形例のワーク吸着装置が有する吸着ヘッド３Ｂの構成を示す概略平面図である。図６は、直方体形状に設けられる吸着ヘッド３Ｂを上方から見た図である。吸着ヘッド３Ｂの上面３ａＢには、第１電極部１Ｂと第２電極部２Ｂとが配置される。第１電極部１Ｂと第２電極部２Ｂとは、左右方向に間隔をあけて配置される。これらの点は、上述の実施形態と同様である。　 (4-2. Second modification)



FIG. 6 is a schematic plan view showing the configuration of the suction head 3B included in the work suction device of the second modification. FIG. 6 is a view of the suction head 3B provided in a rectangular parallelepiped shape as viewed from above. A first electrode portion 1B and a second electrode portion 2B are arranged on the upper surface 3aB of the suction head 3B. The first electrode portion 1B and the second electrode portion 2B are arranged at intervals in the left-right direction. These points are the same as those in the above-described embodiment.
ただし、本変形例では、第１電極部１Ｂと第２電極部２Ｂとは、左右方向間の隙間を挟んで非対称に設けられる。この点、上述の実施形態と異なる。詳細には、第１電極部１Ｂと第２電極部２Ｂとのうち、第３電極部４と接続される電極部は、他の電極部よりも面積が大きい。本変形例では、第１電極部１Ｂが電源部８に接続され、第２電極部２Ｂが第３電極部４に接続される。このために、第２電極部２Ｂは、第１電極部１Ｂよりも面積が大きい。　 However, in this modification, the first electrode portion 1B and the second electrode portion 2B are provided asymmetrically with a gap between the left and right directions interposed therebetween. This point is different from the above-described embodiment. Specifically, of the first electrode portion 1B and the second electrode portion 2B, the electrode portion connected to the third electrode portion 4 has a larger area than the other electrode portions. In this modification, the first electrode unit 1B is connected to the power supply unit 8, and the second electrode unit 2B is connected to the third electrode unit 4. Therefore, the area of the second electrode portion 2B is larger than that of the first electrode portion 1B. It was
本変形例によれば、静電吸着を行うために設けられる一対の電極部１Ｂ、２Ｂのうち、静電容量センサ５を用いたワークの検出に兼用される電極部２Ｂが、他方の電極部１Ｂに比べて大きく設けられために、ワークの接近の検出精度を向上することができる。　 According to this modification, of the pair of electrode portions 1B and 2B provided for electrostatic adsorption, the electrode portion 2B that is also used for detecting the work using the capacitance sensor 5 is the other electrode portion. Since it is provided larger than 1B, the accuracy of detecting the approach of the work can be improved. It was
（４－３．第３変形例）



図７は、第３変形例のワーク吸着装置が有する吸着ヘッド３Ｃの構成を示す概略斜視図である。図８は、図７に示す吸着ヘッド３Ｃの縦断面図である。図８は、上下方向と平行な面で切断した断面図である。図８は、図７のＤ－Ｄ位置で切った断面図である。本変形例では、吸着ヘッド３Ｃは円筒状である。すなわち、吸着ヘッド３Ｃは、貫通孔３ｄを有する。詳細には、吸着ヘッド３Ｃは、上下方向からの平面視において中央部に貫通孔３ｄを有する。貫通孔３ｄは、吸着ヘッド３Ｃを上下方向に貫通する。なお、本変形例においても、吸着ヘッド３Ｃの形状は、ワークの形状に合わせて変更されてよく、円筒状以外の形状であってよい。　 (4-3. Third modification)



FIG. 7 is a schematic perspective view showing the configuration of the suction head 3C included in the work suction device of the third modification. FIG. 8 is a vertical sectional view of the suction head 3C shown in FIG. 7. FIG. 8 is a cross-sectional view cut along a plane parallel to the vertical direction. FIG. 8 is a cross-sectional view taken at the DD position of FIG. In this modification, the suction head 3C has a cylindrical shape. That is, the suction head 3C has a through hole 3d. Specifically, the suction head 3C has a through hole 3d in the central portion in a plan view from the vertical direction. The through hole 3d penetrates the suction head 3C in the vertical direction. Also in this modification, the shape of the suction head 3C may be changed according to the shape of the work, and may be a shape other than the cylindrical shape.
吸着ヘッド３Ｃの上面３ａＣには、第１電極部１Ｃと第２電極部２Ｃとが設けられる。第１電極部１Ｃと第２電極部２Ｃとのうち、第３電極部４と接続される電極部は、少なくとも一部を他方の電極部に取り囲まれる。本変形例では、第１電極部１Ｃが電源部８に接続され、第２電極部２Ｃが第３電極部４に接続される。すなわち、第２電極部２Ｃは、少なくとも一部を第１電極部１Ｃに取り囲まれる。　 A first electrode portion 1C and a second electrode portion 2C are provided on the upper surface 3aC of the suction head 3C. Of the first electrode portion 1C and the second electrode portion 2C, at least a part of the electrode portion connected to the third electrode portion 4 is surrounded by the other electrode portion. In this modification, the first electrode unit 1C is connected to the power supply unit 8, and the second electrode unit 2C is connected to the third electrode unit 4. That is, at least a part of the second electrode portion 2C is surrounded by the first electrode portion 1C. It was
このような構成とすれば、ワークが第２電極部２Ｃに近づくために、第１電極部１Ｃ上を通過することを必要とすることができる。すなわち、本構成によれば、ワークが第１電極部１Ｃと第２電極部２Ｃとの両方に近づいた場合にワークの検出が行われる構成とすることができる。このために、静電容量センサ５によるワークの検出に応じて第１電極部１Ｃと第２電極部２Ｃとの間に電圧を印加した場合に、精度良くワークの静電吸着を行うことができる。　 With such a configuration, it may be necessary for the work to pass over the first electrode portion 1C in order to approach the second electrode portion 2C. That is, according to this configuration, the work can be detected when the work approaches both the first electrode portion 1C and the second electrode portion 2C. Therefore, when a voltage is applied between the first electrode portion 1C and the second electrode portion 2C according to the detection of the work by the capacitance sensor 5, the work can be electrostatically adsorbed with high accuracy. .. It was
詳細には、第１電極部１Ｃおよび第２電極部２Ｃは環状であり、より詳細には円環状である。第１電極部１Ｃと第２電極部２Ｃとの中心位置は同じである。第１電極部１Ｃは、第２電極部２Ｃの全体を取り囲む。第１電極部１Ｃは、吸着ヘッド３Ｃの上面３ａＣの外縁に沿って設けられる。第２電極部２Ｃは、第１電極部１Ｃの内方に間隔をあけて設けられ、貫通孔３ｄを取り囲む。なお、第１電極部１Ｃは、第２電極部２Ｃの全体を取り囲む必要はなく、例えば円弧状等であってもよい。　 In detail, the first electrode portion 1C and the second electrode portion 2C are annular, and more particularly annular. The center positions of the first electrode portion 1C and the second electrode portion 2C are the same. The first electrode portion 1C surrounds the entire second electrode portion 2C. The first electrode portion 1C is provided along the outer edge of the upper surface 3aC of the suction head 3C. The second electrode portion 2C is provided at intervals inside the first electrode portion 1C and surrounds the through hole 3d. The first electrode portion 1C does not need to surround the entire second electrode portion 2C, and may have an arc shape, for example. It was
第１電極部１Ｃは、吸着ヘッド３Ｃの外周面（外側面）に一部が設けられる第１配線部６Ｃを介して電源部８に接続される。第２電極部２Ｃは、吸着ヘッド３Ｃの内周面に一部が設けられる第２配線部７Ｃを介して接地されるとともに、第３電極部４と接続される。すなわち、第１電極部１Ｃと第２電極部２Ｃとのうち、第３電極部４と接続される第２電極部２Ｃから引き出される配線部７Ｃが貫通孔３ｄ内に配置される。　 The first electrode portion 1C is connected to the power supply portion 8 via the first wiring portion 6C provided on the outer peripheral surface (outer surface) of the suction head 3C. The second electrode portion 2C is grounded via the second wiring portion 7C provided on the inner peripheral surface of the suction head 3C, and is connected to the third electrode portion 4. That is, of the first electrode portion 1C and the second electrode portion 2C, the wiring portion 7C drawn out from the second electrode portion 2C connected to the third electrode portion 4 is arranged in the through hole 3d. It was
本変形例によれば、ワークが第１電極部１Ｃと第２電極部２Ｃとの両方に近づいた場合にワークの検出が行われる構成とすることができるために、横方向の位置決め精度が向上する。本変形例の吸着ヘッド３Ｃは、ＭＩＤ工法と付加製造法（ＡＭ：Additive Manufacturing）とを組み合わせた技術（ＡＭ－ＭＩＤ技術）により製造することができる。なお、ＡＭ－ＭＩＤ技術では、ＭＩＤ工法における射出成形法の代わりに、例えば付加製造法における粉末床溶融結合法が用いられる。粉末床溶融結合法は、粉末材料を１層ごと積層し、断面形状をレーザ又は電子ビームなどのエネルギー源で溶融してから固化させ造形する工法である。粉末床溶融結合法においては、粉末材料中に添加された金属錯体をレーザ光により活性化させて造形を行うことができ、造形を行いながら導体パターンの形成も行うことができる。造形中に金属錯体をレーザ光により活性化させた部分にめっき処理を施す手法を用いることにより、貫通孔３ｄ内に第２配線部７Ｃが設けられた吸着ヘッド３Ｃを形成することができる。ＡＭ－ＭＩＤ技術により製造することにより、吸着ヘッド３Ｃの表面のみならず内部に導体パターンを自由に形成することができる。　 According to this modification, the work can be detected when the work approaches both the first electrode portion 1C and the second electrode portion 2C, so that the lateral positioning accuracy is improved. do. The suction head 3C of this modification can be manufactured by a technique (AM-MID technique) in which a MID method and an additive manufacturing method (AM: Additive Manufacturing) are combined. In the AM-MID technique, for example, the powder bed melt bonding method in the addition manufacturing method is used instead of the injection molding method in the MID method. The powder bed melt-bonding method is a method in which powder materials are laminated one layer at a time, the cross-sectional shape is melted by an energy source such as a laser or an electron beam, and then solidified to form a shape. In the powder bed melt-bonding method, the metal complex added to the powder material can be activated by laser light to perform modeling, and the conductor pattern can also be formed while performing modeling. By using a method of plating a portion of the metal complex activated by laser light during modeling, it is possible to form a suction head 3C having a second wiring portion 7C in the through hole 3d. By manufacturing by AM-MID technology, a conductor pattern can be freely formed not only on the surface of the suction head 3C but also inside. It was
図９Ａおよび図９Ｂは、第３変形例の吸着ヘッド３Ｃを用いた場合の効果を説明するための模式図である。図９Ａと図９Ｂとのいずれにおいても、ワーク吸着装置は、静電容量センサ５を用いてワーク２００の接近を監視する状態である。すなわち、第１電極部１Ｃと第２電極部２Ｃとの間には電圧が印加されていない。図９Ａと図９Ｂとでは、ワーク２００の吸着ヘッド３Ｃに対する高さ位置は同じである。　 9A and 9B are schematic views for explaining the effect when the suction head 3C of the third modification is used. In both FIGS. 9A and 9B, the work suction device is in a state of monitoring the approach of the work 200 by using the capacitance sensor 5. That is, no voltage is applied between the first electrode portion 1C and the second electrode portion 2C. In FIGS. 9A and 9B, the height position of the work 200 with respect to the suction head 3C is the same. It was
図９Ａと図９Ｂとを比べると、ワーク２００と第２電極部２Ｃとが上下方向に重なる範囲が異なる。図９Ａでは、第２電源部２Ｃの一部がワーク２００と上下方向に重なるだけである。一方、図９Ｂでは、第２電源部２Ｃの全体がワーク２００と上下方向に重なる。ワーク２００と第２電極部２Ｃとが重なる範囲が大きい方が静電容量の変化は大きくなる。このために、図９Ａの場合に比べて、図９Ｂの場合の方が静電容量の変化は大きくなる。　 Comparing FIGS. 9A and 9B, the range in which the work 200 and the second electrode portion 2C overlap in the vertical direction is different. In FIG. 9A, only a part of the second power supply unit 2C overlaps the work 200 in the vertical direction. On the other hand, in FIG. 9B, the entire second power supply unit 2C overlaps the work 200 in the vertical direction. The larger the range in which the work 200 and the second electrode portion 2C overlap, the larger the change in capacitance. For this reason, the change in capacitance is larger in the case of FIG. 9B than in the case of FIG. 9A. It was
制御部１４は、静電容量の変化の大きさが予め設定された閾値を超えた場合に、ワーク２００の接近を認識する。このために、閾値を大き目の値に設定することにより、図９Ａの場合にはワーク２００の接近が検出されず、図９Ｂの場合にはワーク２００の接近が検出されるといった構成にすることができる。　 The control unit 14 recognizes the approach of the work 200 when the magnitude of the change in capacitance exceeds a preset threshold value. Therefore, by setting the threshold value to a large value, the approach of the work 200 is not detected in the case of FIG. 9A, and the approach of the work 200 is detected in the case of FIG. 9B. can. It was
本変形例の構成では、第１電極部１Ｃが第２電極部２Ｃを取り囲むために、第２電極部２Ｃとワーク２００とが上下方向に重なる範囲が大きくなるように図９Ａの状態からワーク２００を水平方向に動かすと、第１電極部１Ｃとワーク２００とが上下方向に重なる範囲も大きくなる（図９Ｂ参照）。このために、静電容量の変化が閾値を超えた場合に電源部８によって第１電極部１Ｃと第２電極部２Ｃとの間に電圧を印加すると、ワーク２００を精度良く静電吸着することができる。　 In the configuration of this modification, since the first electrode portion 1C surrounds the second electrode portion 2C, the work 200 is formed from the state of FIG. 9A so that the range in which the second electrode portion 2C and the work 200 overlap in the vertical direction becomes large. When is moved in the horizontal direction, the range in which the first electrode portion 1C and the work 200 overlap in the vertical direction also increases (see FIG. 9B). Therefore, when a voltage is applied between the first electrode unit 1C and the second electrode unit 2C by the power supply unit 8 when the change in capacitance exceeds the threshold value, the work 200 is electrostatically adsorbed with high accuracy. Can be done. It was
（４－４．第４変形例）



図１０は、第４変形例のワーク吸着装置が有する吸着ヘッド３Ｄの構成を示す概略斜視図である。第４変形例でも、第３変形例と同様に、第１電極部１Ｄは、円筒状の吸着ヘッド３Ｄの上面３ａＤの外縁に沿って設けられる円環状である。ただし、第２電極部２Ｄは、第３変形例と異なり円形状である。より詳細には、第２電極部２Ｄは、円筒状の吸着ヘッド３Ｄの内部に挿入される円柱状部材１５の上面部分である。円柱状部材１５は、銅等の導体であり、第２配線部７Ｄの一部も構成する。　 (4-4. Fourth modified example)



FIG. 10 is a schematic perspective view showing the configuration of the suction head 3D included in the work suction device of the fourth modification. Also in the fourth modification, as in the third modification, the first electrode portion 1D is an annular shape provided along the outer edge of the upper surface 3aD of the cylindrical suction head 3D. However, the second electrode portion 2D has a circular shape unlike the third modification. More specifically, the second electrode portion 2D is an upper surface portion of the cylindrical member 15 inserted inside the cylindrical suction head 3D. The columnar member 15 is a conductor such as copper, and also constitutes a part of the second wiring portion 7D.
本変形例の構成でも、第３変形例の場合と同様に、ワークが第１電極部１Ｄと第２電極部２Ｄとの両方に近づいた場合にワークの検出が行われる。このために、静電容量センサ５によるワークの検出に応じて第１電極部１Ｄと第２電極部２Ｄとの間に電圧を印加した場合に、精度良くワークの静電吸着を行うことができる。　 Also in the configuration of this modification, the work is detected when the work approaches both the first electrode portion 1D and the second electrode portion 2D, as in the case of the third modification. Therefore, when a voltage is applied between the first electrode portion 1D and the second electrode portion 2D according to the detection of the work by the capacitance sensor 5, the work can be electrostatically adsorbed with high accuracy. .. It was
＜５．留意事項＞



本明細書中に開示される種々の技術的特徴は、その技術的創作の主旨を逸脱しない範囲で種々の変更を加えることが可能である。また、本明細書中に示される複数の実施形態および変形例は可能な範囲で組み合わせて実施されてよい。　 <5. Points to note>



The various technical features disclosed herein can be modified in various ways without departing from the gist of the technical creation. In addition, a plurality of embodiments and modifications shown in the present specification may be combined and implemented to the extent possible.
本開示は、例えばワークの加工処理を行うための設備に利用することができる。 The present disclosure can be used, for example, in equipment for processing a work.
１、１Ｂ、１Ｃ、１Ｄ・・・第１電極部　２、２Ｂ、２Ｃ、２Ｄ・・・第２電極部　３、３Ｂ、３Ｃ、３Ｄ・・・吸着ヘッド　３ｄ・・・貫通孔　４・・・第３電極部　５・・・静電容量センサ　５ａ・・・検出電極　６、６Ｃ・・・第１配線部　７、７Ｃ、７Ｄ・・・第２配線部　８・・・電源部　９・・・第３配線部　１０・・・第１スイッチ　１１・・・分岐点　１２・・・接地点　１３・・・第２スイッチ　１４・・・制御部　１００、１００Ａ・・・ワーク吸着装置　２００・・・ワーク 1, 1B, 1C, 1D ... 1st electrode part 2, 2B, 2C, 2D ... 2nd electrode part 3, 3B, 3C, 3D ... Suction head 3d ... Through hole 4 ... 3rd electrode part 5 ... Capacitance sensor 5a ... Detection electrode 6, 6C ... 1st wiring part 7, 7C, 7D ... 2nd wiring part 8 ... Power supply part 9 ... 3rd wiring part 10 ... 1st switch 11 ... branch point 12 ... grounding point 13 ... 2nd switch 14 ... control unit 100, 100A ... work suction device 200 ... work

Claims (9)

  1. ワークを吸着するワーク吸着装置であって、
    第１電極部および第２電極部が配置され、前記第１電極部と前記第２電極部との間に形成される電界により前記ワークを静電吸着する吸着ヘッドと、
    前記第１電極部又は前記第２電極部と電気的に接続される第３電極部と、
    前記第３電極部と容量結合する検出電極を有する静電容量センサと、
    を有する、ワーク吸着装置。     It is a work suction device that sucks the work.
    A suction head in which the first electrode portion and the second electrode portion are arranged and the work is electrostatically adsorbed by an electric field formed between the first electrode portion and the second electrode portion.
    A third electrode portion electrically connected to the first electrode portion or the second electrode portion, and the third electrode portion.
    A capacitance sensor having a detection electrode that capacitively couples with the third electrode portion,
    A work suction device.
  2. 前記第１電極部を電源部に接続する第１配線部と、
    前記第２電極部を接地する第２配線部と、
    を更に有する、請求項１に記載のワーク吸着装置。     A first wiring unit that connects the first electrode unit to the power supply unit,
    The second wiring part that grounds the second electrode part and
    The work suction device according to claim 1, further comprising.
  3. 前記静電容量センサから信号が入力され、前記電源部を制御する制御部を更に有する、請求項２に記載のワーク吸着装置。 The work suction device according to claim 2, further comprising a control unit that receives a signal from the capacitance sensor and controls the power supply unit.
  4. 前記第２配線部から分岐し、前記第２配線部と前記第３電極部とを接続する第３配線部を更に有する、請求項２又は３に記載のワーク吸着装置。 The work suction device according to claim 2 or 3, further comprising a third wiring portion that branches from the second wiring portion and connects the second wiring portion and the third electrode portion.
  5. 前記第２配線部と前記第３配線部との分岐点と、前記第２配線部の接地点との間に第１スイッチを更に有し、
    前記第１スイッチは、前記第２電極部の接地と非接地とを切り替える、請求項４に記載のワーク吸着装置。     A first switch is further provided between the branch point between the second wiring portion and the third wiring portion and the grounding point of the second wiring portion.
    The work suction device according to claim 4, wherein the first switch switches between grounding and non-grounding of the second electrode portion.
  6. 前記第２配線部と前記第３配線部との分岐点と、前記第３電極部との間に第２スイッチを更に有し、
    前記第２スイッチは、前記第２電極部と前記第３電極部との接続と非接続とを切り替える、請求項４又は５に記載のワーク吸着装置。     A second switch is further provided between the branch point between the second wiring portion and the third wiring portion and the third electrode portion.
    The work suction device according to claim 4 or 5, wherein the second switch switches between connection and non-connection between the second electrode portion and the third electrode portion.
  7. 前記第１電極部と前記第２電極部とのうち、前記第３電極部と接続される電極部は、少なくとも一部を他方の電極部に取り囲まれる、請求項１から６のいずれか１項に記載のワーク吸着装置。 One of claims 1 to 6, wherein at least a part of the electrode portion connected to the third electrode portion of the first electrode portion and the second electrode portion is surrounded by the other electrode portion. The work suction device described in 1.
  8. 前記吸着ヘッドは、貫通孔を有し、
    前記第１電極部と前記第２電極部とのうち、前記第３電極部と接続される電極部から引き出される配線部が前記貫通孔内に配置される、請求項７に記載のワーク吸着装置。     The suction head has a through hole and has a through hole.
    The work suction device according to claim 7, wherein a wiring portion drawn from the electrode portion connected to the third electrode portion of the first electrode portion and the second electrode portion is arranged in the through hole. ..
  9. 前記第１電極部と前記第２電極部とのうち、前記第３電極部と接続される電極部は、他方の電極部よりも面積が大きい、請求項１から８のいずれか１項に記載のワーク吸着装置。 The one according to any one of claims 1 to 8, wherein the electrode portion connected to the third electrode portion of the first electrode portion and the second electrode portion has a larger area than the other electrode portion. Work suction device.
PCT/JP2020/048412 2020-06-30 2020-12-24 Workpiece suction device WO2022004022A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN202080102442.0A CN115916487A (en) 2020-06-30 2020-12-24 Workpiece adsorption device
JP2022533048A JPWO2022004022A1 (en) 2020-06-30 2020-12-24

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020113372 2020-06-30
JP2020-113372 2020-06-30

Publications (1)

Publication Number Publication Date
WO2022004022A1 true WO2022004022A1 (en) 2022-01-06

Family

ID=79315668

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2020/048412 WO2022004022A1 (en) 2020-06-30 2020-12-24 Workpiece suction device

Country Status (3)

Country Link
JP (1) JPWO2022004022A1 (en)
CN (1) CN115916487A (en)
WO (1) WO2022004022A1 (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003103487A (en) * 2001-10-01 2003-04-08 Minolta Co Ltd Electrostatic attraction manipulator
WO2013137414A1 (en) * 2012-03-16 2013-09-19 株式会社クリエイティブ テクノロジー Electrostatic chuck device and method for producing same
JP2013235991A (en) * 2012-05-10 2013-11-21 Ulvac Japan Ltd Power feeding device
JP2016070892A (en) * 2014-10-01 2016-05-09 株式会社クリエイティブ テクノロジー Capacitive sensor and electrostatic chuck
WO2016194336A1 (en) * 2015-05-29 2016-12-08 株式会社アルバック Control system for electrostatic chuck-equipped transport robot

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003103487A (en) * 2001-10-01 2003-04-08 Minolta Co Ltd Electrostatic attraction manipulator
WO2013137414A1 (en) * 2012-03-16 2013-09-19 株式会社クリエイティブ テクノロジー Electrostatic chuck device and method for producing same
JP2013235991A (en) * 2012-05-10 2013-11-21 Ulvac Japan Ltd Power feeding device
JP2016070892A (en) * 2014-10-01 2016-05-09 株式会社クリエイティブ テクノロジー Capacitive sensor and electrostatic chuck
WO2016194336A1 (en) * 2015-05-29 2016-12-08 株式会社アルバック Control system for electrostatic chuck-equipped transport robot

Also Published As

Publication number Publication date
JPWO2022004022A1 (en) 2022-01-06
CN115916487A (en) 2023-04-04

Similar Documents

Publication Publication Date Title
KR101015192B1 (en) Jig for detecting position
JP2017085089A5 (en)
US6516248B2 (en) Robot calibration system and method of determining a position of a robot relative to an electrically-charged calibration object
JP2010098178A (en) Device and method for contactless carrying wiring board, and method of manufacturing resinous wiring board
WO2022004022A1 (en) Workpiece suction device
JP4629764B2 (en) Wiring board non-contact transfer device and method, and resin wiring board manufacturing method
US7075772B2 (en) Electrostatic gripping device
JP5957287B2 (en) Power supply device
CN103339721A (en) Triboelectric charge controlled electro-static clamp
JP7352572B2 (en) capacitive sensor
JP5198551B2 (en) Wiring board non-contact transfer device and wiring board manufacturing method
EP4194156A1 (en) Gripper with pixelated electrostatic adhesion
JPH06163674A (en) Monitoring method for sample holding apparatus
JP4397508B2 (en) Nozzle capacitance detection method, nozzle capacitance detection sensor, and nozzle of laser processing machine
JPH04145220A (en) Moving body supporting device
KR100388403B1 (en) Electrical discharge machining apparatus
JP4629766B2 (en) Wiring board non-contact transfer apparatus and method
CN115836373A (en) Capacitance detection device and manufacturing method
CN114340136B (en) Circuit board jointed board, board splitting method and board splitting device
WO2022004023A1 (en) Workpiece attachment device and production method of workpiece attachment device
KR102645377B1 (en) Device for detecting tool collision and preventing breakage in machine tools
US11148937B2 (en) Method of manufacturing semiconductor device and semiconductor device
US20240019248A1 (en) Sensor and electronic device
JP2007136644A (en) Holding method for object to be treated, electrostatic attracting mechanism, electrostatic attraction probe, transporting method and device for object to be treated
US11831252B2 (en) Pixelated electrostatic adhesion

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 20943829

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2022533048

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 20943829

Country of ref document: EP

Kind code of ref document: A1