JPH02165889A - Nozzle of laser beam machine - Google Patents

Nozzle of laser beam machine

Info

Publication number
JPH02165889A
JPH02165889A JP63321572A JP32157288A JPH02165889A JP H02165889 A JPH02165889 A JP H02165889A JP 63321572 A JP63321572 A JP 63321572A JP 32157288 A JP32157288 A JP 32157288A JP H02165889 A JPH02165889 A JP H02165889A
Authority
JP
Japan
Prior art keywords
electrode
nozzle
laser processing
processing machine
tip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63321572A
Other languages
Japanese (ja)
Inventor
Toshiharu Mine
峰 俊治
Takeshi Watanabe
毅 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP63321572A priority Critical patent/JPH02165889A/en
Publication of JPH02165889A publication Critical patent/JPH02165889A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462Nozzles; Features related to nozzles

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

PURPOSE:To prevent the influence by a spatter at the time of working by using a first electrode in which a nozzle is connected to an electromagnetic capacity detector, and a second electrode which is placed in the outside periphery of a first electrode and connected to said electromagnetic capacity detector, and protruding a first electrode from a second electrode. CONSTITUTION:A first electrode 6a protrudes from a second electrode 6c. The protruding part of a first electrode is in a columnar shape in which the tip part is formed like a truncated cone, and in its inside, passages of a laser beam and assist gas are formed. A first electrode and a second electrode are insulated from each other, and as for a material, copper, brass, etc., are desirable. As for a material of an insulating plate 3, an insulating sleeve, and insulators 6b, 6d, ceramic, etc., are desirable. At the time of controlling an interval between the tip of a nozzle 6 and a work 10, a capacitance between both of them is detected by a capacitance detector 9, and an operating signal is sent to a controller so that its value becomes a prescribed value. Since a first electrode protrudes, damage caused by a spatter, etc., is received by only is first electrode, and parts can be replaced easily.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明はレーザ加工機のノズルに関する。より詳しくは
、複雑な形状を有する被加工物の加工に適したノズルに
関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a nozzle for a laser processing machine. More specifically, the present invention relates to a nozzle suitable for processing workpieces having complex shapes.

[従来の技術] レーザ加工機においては、加工精度を維持するためレー
ザ加工機のノズルと被加工物(以下、ワークという)の
間隔を一定にしワークがレーザ光の焦点位置にあるよう
にする必要がある。ノズル先端とワークとの間隔を一定
に保つ方法のひとつにノズル先端とワークの間の静電容
量の変化を利用したものがある。第4図はかかる従来例
によるレーザ加工機のノズルを示している。
[Prior art] In order to maintain processing accuracy in a laser processing machine, it is necessary to keep the distance between the nozzle of the laser processing machine and the workpiece (hereinafter referred to as the workpiece) constant so that the workpiece is at the focal point of the laser beam. There is. One method of maintaining a constant distance between the nozzle tip and the workpiece is to use changes in the capacitance between the nozzle tip and the workpiece. FIG. 4 shows a nozzle of such a conventional laser processing machine.

図において、(1)はレーザ加工機のヘッド本体(図示
せず)に装着されている内部に集光レンズ(′2Jを保
持しているレンズホルダである。レンズホルダ(1)の
下端には絶縁板(3)を介して絶縁スリーブ(4)を有
する取付ボルト(Sでノズル(6)が電気的絶縁状態で
固着されている。ノズル(6)は倒置中空円錐台状をな
し、その先端部すなわち下端中央部にはレーザ光および
アシストガスなどが通過する噴射口(6f)が形成され
ている。ノズル(6)は内側より順に同心円状に配設さ
れた第1電極(6a)、絶縁1(6b)および第2電極
(6C)を有している。この絶縁1 (6b)により第
1電極(6a)と第2電極(6C)の電気的絶縁が確保
されている。また、第1N極(6a)は絶縁2 (6b
)を介して第2電極(6C)に装着されている電極固定
板(6e)により支持されている。
In the figure, (1) is a lens holder that holds a condensing lens ('2J) inside, which is attached to the head body (not shown) of a laser processing machine.The lower end of the lens holder (1) is A nozzle (6) is fixed in an electrically insulated state with a mounting bolt (S) having an insulating sleeve (4) through an insulating plate (3).The nozzle (6) has an inverted hollow truncated conical shape, and its tip An injection port (6f) through which laser light and assist gas pass is formed in the center of the lower end.The nozzle (6) has a first electrode (6a) arranged concentrically from the inside, an insulating 1 (6b) and a second electrode (6C).This insulation 1 (6b) ensures electrical insulation between the first electrode (6a) and the second electrode (6C). 1N pole (6a) is insulated 2 (6b
) is supported by an electrode fixing plate (6e) attached to the second electrode (6C).

(7)は第2電極(6C)に設けられた接続口(6g)
と接続されるコネクタである。このコネクタ(7)の接
続口(6g)と反対側の端部には同軸ケーブル(8)が
接続されている。同軸ケーブル(8)の芯線たる第1電
線(8a)がコネクタ(7)の内部を通って第1電極(
6a)に接続されている。また、第1電線(8a)の外
側の第2電線(8b)はコネクタ(7)を介して第2電
極(6C)に接続されている。しかして第1電線(8a
)と第2電線(8b)とは外部に配設された静電容量検
出器(9)に接続されている。(ト))はレーザ加工を
行なうワークである。
(7) is the connection port (6g) provided on the second electrode (6C)
This is a connector that is connected to the A coaxial cable (8) is connected to the end of the connector (7) opposite to the connection port (6g). The first electric wire (8a), which is the core wire of the coaxial cable (8), passes through the inside of the connector (7) and passes through the first electrode (
6a). Further, a second electric wire (8b) outside the first electric wire (8a) is connected to a second electrode (6C) via a connector (7). However, the first electric wire (8a
) and the second electric wire (8b) are connected to an external capacitance detector (9). (g)) is a workpiece to be laser processed.

[発明が解決しようとする課題] 以上説明したように従来のレーザ加工機のノズルは、第
1電極の先端まで第2電極があるため、ノズル先端が太
くなり立体ワークの狭隘な谷間に入ることができず、ま
たワーク表面の凹凸などの複雑な立体形状の加工には不
適当であった。また、第1′F4極と第2電極の端面が
同一平面上にありかつレーザ出射部近くにあるため、レ
ーザ加工時のスパッタなどの付着により第1電極と第2
1極とが短絡しやすくノズル先端部とワークとの間隔を
計測できなくなるという不具合もあった。
[Problems to be Solved by the Invention] As explained above, in the nozzle of a conventional laser processing machine, since the second electrode extends to the tip of the first electrode, the tip of the nozzle becomes thick and enters the narrow valley of the three-dimensional workpiece. It was also unsuitable for machining complex three-dimensional shapes such as irregularities on the workpiece surface. In addition, since the end faces of the 1'F4 pole and the second electrode are on the same plane and near the laser emission part, the first and second electrodes may be damaged due to adhesion of spatter during laser processing.
There was also the problem that one pole was easily short-circuited, making it impossible to measure the distance between the nozzle tip and the workpiece.

本発明は前記のような従来技術の課題に鑑みなされたも
のであって、形状の複雑な立体ワークに使用でき、かつ
、加工時のスパッタの影響を受けにくいレーザ加工機の
ノズルを提供することを目的とする。
The present invention has been made in view of the problems of the prior art as described above, and it is an object of the present invention to provide a nozzle for a laser processing machine that can be used for three-dimensional workpieces with complex shapes and is less susceptible to spatter during processing. With the goal.

[課題を解決するための手段] 本発明のレーザ加工機のノズルは、ノズル先端と被加工
物との電磁的容量を検出することによって、両者の距離
を一定に保つようにノズルを移動調整するようにしたレ
ーザ加工機のノズルでありて、前記ノズルが電磁的容量
検出器に接続された第1電極と、電気的絶縁状態で前記
第1電極の外周に配設されかつ前記電磁的容量検出器に
接続された第2電極とからなり、前記ノズルが被加工物
と電気的絶縁状態でレーザ加工機に取付けられ、かつ、
前記第1電極の先端部が前記第2電極より突出している
ことを特徴としている。
[Means for Solving the Problems] The nozzle of the laser processing machine of the present invention detects the electromagnetic capacitance between the nozzle tip and the workpiece, and adjusts the movement of the nozzle so as to maintain a constant distance between the two. A nozzle for a laser processing machine according to the present invention, wherein the nozzle is arranged around a first electrode connected to an electromagnetic capacitance detector, and the first electrode is electrically insulated from the first electrode. a second electrode connected to a laser processing machine, the nozzle is installed in a laser processing machine in an electrically insulated state from the workpiece, and
It is characterized in that the tip of the first electrode protrudes from the second electrode.

[作 用] 本発明においては、第1電極を第2電極より突出させた
ので、ノズル先端が細くでき凹凸を有するワーク、狭隘
な部分を有するワークなどの加工ができ、またレーザ出
射部から第1N極の第2電極と隣合う端面および第2電
極の端面とが離れているので、加工時のスパッタによる
影響を受けにくい。
[Function] In the present invention, since the first electrode is made to protrude from the second electrode, the tip of the nozzle can be made thin, and it is possible to process workpieces with unevenness or narrow parts. Since the end face adjacent to the 1N-pole second electrode and the end face of the second electrode are separated from each other, they are less likely to be affected by sputtering during processing.

[実施例] 以下、本発明を実施例に基づいて説明するが、本発明は
なにもかかる実施例にのみ限定されるものではない。
[Examples] The present invention will be described below based on Examples, but the present invention is not limited to these Examples.

第1図は本発明の一実施例のレーザ加工機のノズルの縦
断面図、第2図は本発明のさらに他の実施例のノズル先
端部の縦断面図である。
FIG. 1 is a vertical cross-sectional view of a nozzle of a laser processing machine according to an embodiment of the present invention, and FIG. 2 is a vertical cross-sectional view of a nozzle tip of still another embodiment of the present invention.

第1図〜第3図において第4図と同一部分または相当部
分は第4図と同一符号を付してその説明は省略する。
In FIGS. 1 to 3, the same or equivalent parts as in FIG. 4 are given the same reference numerals as in FIG. 4, and the explanation thereof will be omitted.

第1図に示す実施例においては、第1電極−(6a)は
第2電極より突出されている。第11!極(6a)の突
出部は先端部が円錐台状をなす円柱体であり、内部にレ
ーザ光線およびアシストガスの通路が形成されている。
In the embodiment shown in FIG. 1, the first electrode (6a) is more protruding than the second electrode. 11th! The protrusion of the pole (6a) is a cylindrical body with a truncated conical tip, and a passage for the laser beam and assist gas is formed inside.

第1電極(6a)および第2電極(6c)の材質として
は、公知の電極材が使用できるが導電性および伝熱性の
点から銅、黄銅などを用いるのが好ましい。
As the material for the first electrode (6a) and the second electrode (6c), any known electrode material can be used, but it is preferable to use copper, brass, etc. from the viewpoint of electrical conductivity and heat conductivity.

絶縁板(3)、絶縁スリーブ(4)、絶縁1 (6b)
および絶縁2 (6d)の材質としては、公知の絶縁材
が使用できるが耐熱性および強度の点からセラミックな
どを用いるのが好ましい。これら絶縁材の形成はたとえ
ばセラミック溶射により行なうことができる。セラミッ
ク溶射によれば絶縁の厚さを薄くすることができ装置が
コンパクトにできる。
Insulation plate (3), insulation sleeve (4), insulation 1 (6b)
As the material for the insulation 2 (6d), any known insulating material can be used, but from the viewpoint of heat resistance and strength, it is preferable to use ceramic or the like. These insulating materials can be formed, for example, by ceramic spraying. Ceramic spraying allows the insulation to be thinner and the equipment to be more compact.

本実施例におけるノズル(6)の先端とワーク(ト)の
間隔の制御は、従来例と同様に、両者間の静電容量をノ
ズル(6)の外部に設けられた静電容量検出器(9)に
より検出し、この値が所定値になるようレーザ加工機の
制御装置(図示せず)に静電容量検出器(9)より操作
信号を送ることによってなされる。
In this embodiment, the distance between the tip of the nozzle (6) and the workpiece (T) is controlled by measuring the capacitance between them using a capacitance detector ( 9) and sends an operation signal from the capacitance detector (9) to a control device (not shown) of the laser processing machine so that this value becomes a predetermined value.

なお、本実施例において↓よ、ノズル(6)とワーク□
□□との間隔の制御を両者間の静電容量を検出すること
によって行なったが、他の電磁的方法、たとえば渦電流
、磁気力などを計測する方法によって行なってもよい。
In this example, ↓, nozzle (6) and workpiece □
Although the distance between the □□ and the □□ was controlled by detecting the capacitance between the two, other electromagnetic methods such as measuring eddy current, magnetic force, etc. may be used.

第2図に示す実施例は、第1図に示す実施例において、
第1電極(6a)の突出部の根本部に絶縁01)を施し
スパッタなどによる短絡防止性能の向上を図ったもので
ある。
The embodiment shown in FIG. 2 is different from the embodiment shown in FIG.
Insulation 01) is applied to the base of the protruding portion of the first electrode (6a) to improve short-circuit prevention performance due to sputtering or the like.

絶縁ODの材質としては、絶縁板(3)と同様の絶縁材
が使用でき、また同様にセラミック溶射により形成する
ことができる。
The same insulating material as the insulating plate (3) can be used as the material for the insulating OD, and it can be similarly formed by ceramic spraying.

なお、第2図に示す実施例では第1電極(6a)突出部
の根本部に絶縁0ηを施したが、絶縁0Dを突出部すべ
てに施してもよい。
In the embodiment shown in FIG. 2, the insulation 0η is applied to the root of the protrusion of the first electrode (6a), but the insulation 0D may be applied to all the protrusions.

第3図に示す実施例は第2図に示す実施例とは逆に第2
電極(6C)に絶縁01)を施したものである。
The embodiment shown in FIG. 3 is different from the embodiment shown in FIG.
The electrode (6C) is provided with insulation 01).

第2図および第3図に示す実施例においては第1N極(
6a)と第2N極(6C)との短絡を生じにくくしたの
で、加工時のスパッタなどによるダメージは第1電極(
6a)のみが受けるので、部品の取替が第1電極(6a
)だけでよく、維持費が安くて済む。
In the embodiment shown in FIGS. 2 and 3, the first N pole (
6a) and the second N-pole (6C), so damage caused by sputtering during processing is avoided by reducing the chance of short-circuiting between the first electrode (6a) and the second N-pole (6C).
Since only the first electrode (6a) is affected, parts must be replaced only when the first electrode (6a)
), and maintenance costs are low.

[発明の効果コ 以上説明したように、本発明のレーザ加工機のノズルに
よるときは、第1電極を第2電極よりも突出させたので
複雑な形状のワークの加工ができるとともに、加工時の
スパッタなどによるダメージは第1電極のみが受けるの
で、部品の取替が第1電極のみでよく維持費が安くて済
むという効果が得られる。
[Effects of the Invention] As explained above, when using the nozzle of the laser processing machine of the present invention, since the first electrode is made to protrude more than the second electrode, it is possible to process workpieces with complex shapes, and it is possible to process workpieces with a complicated shape. Since only the first electrode is damaged by sputtering or the like, parts need to be replaced only for the first electrode, resulting in low maintenance costs.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明のレーザ加工機のノズルの一実施例の縦
断面図、第2図は本発明のレーザ加工機のノズルの他の
実施例の縦断面図、第3図は本発明のレーザ加工機のノ
ズルのさらに他の実施例のノズル先端部の縦断面図、第
4図は従来例のノズルの縦断面図である。 (図面の主要符号) (1):レンズホルダ (6):ノズル (7) :コネクタ (8)二同軸ケーブル (至):ワーク 第1 図
FIG. 1 is a longitudinal cross-sectional view of one embodiment of the nozzle of the laser processing machine of the present invention, FIG. 2 is a longitudinal cross-sectional view of another embodiment of the nozzle of the laser processing machine of the present invention, and FIG. FIG. 4 is a vertical cross-sectional view of a nozzle tip of still another embodiment of a nozzle for a laser processing machine, and FIG. 4 is a vertical cross-sectional view of a conventional nozzle. (Main symbols in the drawing) (1): Lens holder (6): Nozzle (7): Connector (8) Twin coaxial cable (to): Work Figure 1

Claims (2)

【特許請求の範囲】[Claims] (1)ノズル先端と被加工物との間の電磁的容量を検出
することによって、両者の距離を一定に保つようにノズ
ルを移動調整するようにしたレーザ加工機のノズルであ
って、前記ノズルが電磁的容量検出器に接続された第1
電極と、電気的絶縁状態で前記第1電極の外周に配設さ
れかつ前記電磁的容量検出器に接続された第2電極とか
らなり、前記ノズルが被加工物と電気的絶縁状態でレー
ザ加工機に取付けられ、かつ、前記第1電極の先端部が
前記第2電極よりも突出していることを特徴とするレー
ザ加工機のノズル。
(1) A nozzle for a laser processing machine that adjusts the movement of the nozzle by detecting electromagnetic capacitance between the nozzle tip and the workpiece so as to maintain a constant distance between the two, wherein the nozzle is connected to the electromagnetic capacitance detector.
an electrode, and a second electrode disposed on the outer periphery of the first electrode in an electrically insulated state and connected to the electromagnetic capacitance detector, and the nozzle performs laser processing in an electrically insulated state from the workpiece. 1. A nozzle for a laser processing machine, which is attached to a laser processing machine, and wherein a tip of the first electrode protrudes beyond the second electrode.
(2)前記第1電極の突出部所定箇所を電気的絶縁物質
で被覆してなる請求項1記載のレーザ加工機のノズル。
(2) The nozzle for a laser processing machine according to claim 1, wherein a predetermined portion of the protruding portion of the first electrode is coated with an electrically insulating material.
JP63321572A 1988-12-19 1988-12-19 Nozzle of laser beam machine Pending JPH02165889A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63321572A JPH02165889A (en) 1988-12-19 1988-12-19 Nozzle of laser beam machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63321572A JPH02165889A (en) 1988-12-19 1988-12-19 Nozzle of laser beam machine

Publications (1)

Publication Number Publication Date
JPH02165889A true JPH02165889A (en) 1990-06-26

Family

ID=18134060

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63321572A Pending JPH02165889A (en) 1988-12-19 1988-12-19 Nozzle of laser beam machine

Country Status (1)

Country Link
JP (1) JPH02165889A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6025571A (en) * 1998-07-15 2000-02-15 American Torch Tip Company Nozzle assembly for laser cutting head

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6025571A (en) * 1998-07-15 2000-02-15 American Torch Tip Company Nozzle assembly for laser cutting head

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