JPH0341928U - - Google Patents
Info
- Publication number
- JPH0341928U JPH0341928U JP10245489U JP10245489U JPH0341928U JP H0341928 U JPH0341928 U JP H0341928U JP 10245489 U JP10245489 U JP 10245489U JP 10245489 U JP10245489 U JP 10245489U JP H0341928 U JPH0341928 U JP H0341928U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- exhaust
- exhaust chamber
- core tube
- control plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims description 11
- 238000009792 diffusion process Methods 0.000 claims description 5
- 239000011261 inert gas Substances 0.000 claims description 3
- 238000005192 partition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989102454U JP2523938Y2 (ja) | 1989-08-31 | 1989-08-31 | 拡散炉の排気装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989102454U JP2523938Y2 (ja) | 1989-08-31 | 1989-08-31 | 拡散炉の排気装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0341928U true JPH0341928U (enExample) | 1991-04-22 |
| JP2523938Y2 JP2523938Y2 (ja) | 1997-01-29 |
Family
ID=31651350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989102454U Expired - Lifetime JP2523938Y2 (ja) | 1989-08-31 | 1989-08-31 | 拡散炉の排気装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2523938Y2 (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61190929A (ja) * | 1985-02-20 | 1986-08-25 | Hitachi Ltd | 処理装置 |
-
1989
- 1989-08-31 JP JP1989102454U patent/JP2523938Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61190929A (ja) * | 1985-02-20 | 1986-08-25 | Hitachi Ltd | 処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2523938Y2 (ja) | 1997-01-29 |
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