JPH0341926U - - Google Patents
Info
- Publication number
- JPH0341926U JPH0341926U JP1989102291U JP10229189U JPH0341926U JP H0341926 U JPH0341926 U JP H0341926U JP 1989102291 U JP1989102291 U JP 1989102291U JP 10229189 U JP10229189 U JP 10229189U JP H0341926 U JPH0341926 U JP H0341926U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- resist
- baking apparatus
- mounting plate
- spacer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989102291U JPH0341926U (enExample) | 1989-08-31 | 1989-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989102291U JPH0341926U (enExample) | 1989-08-31 | 1989-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0341926U true JPH0341926U (enExample) | 1991-04-22 |
Family
ID=31651197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989102291U Pending JPH0341926U (enExample) | 1989-08-31 | 1989-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0341926U (enExample) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59132128A (ja) * | 1983-01-19 | 1984-07-30 | Toshiba Corp | レジストパタ−ンの形成方法及び装置 |
| JPS60263431A (ja) * | 1984-06-12 | 1985-12-26 | Toshiba Corp | レジストパタ−ンの形成方法 |
| JPS6167224A (ja) * | 1984-09-07 | 1986-04-07 | Fujitsu Ltd | 半導体装置の製造方法 |
| JPS61147527A (ja) * | 1984-12-21 | 1986-07-05 | Toshiba Corp | レジストパタ−ンの形成方法 |
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1989
- 1989-08-31 JP JP1989102291U patent/JPH0341926U/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59132128A (ja) * | 1983-01-19 | 1984-07-30 | Toshiba Corp | レジストパタ−ンの形成方法及び装置 |
| JPS60263431A (ja) * | 1984-06-12 | 1985-12-26 | Toshiba Corp | レジストパタ−ンの形成方法 |
| JPS6167224A (ja) * | 1984-09-07 | 1986-04-07 | Fujitsu Ltd | 半導体装置の製造方法 |
| JPS61147527A (ja) * | 1984-12-21 | 1986-07-05 | Toshiba Corp | レジストパタ−ンの形成方法 |