JPS63115211U - - Google Patents
Info
- Publication number
- JPS63115211U JPS63115211U JP1987008192U JP819287U JPS63115211U JP S63115211 U JPS63115211 U JP S63115211U JP 1987008192 U JP1987008192 U JP 1987008192U JP 819287 U JP819287 U JP 819287U JP S63115211 U JPS63115211 U JP S63115211U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- process chamber
- heat dissipation
- heating device
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987008192U JPS63115211U (enExample) | 1987-01-22 | 1987-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987008192U JPS63115211U (enExample) | 1987-01-22 | 1987-01-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63115211U true JPS63115211U (enExample) | 1988-07-25 |
Family
ID=30792347
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987008192U Pending JPS63115211U (enExample) | 1987-01-22 | 1987-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63115211U (enExample) |
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1987
- 1987-01-22 JP JP1987008192U patent/JPS63115211U/ja active Pending