JPH0340534A - Ultrasonic transmitter and receiver - Google Patents
Ultrasonic transmitter and receiverInfo
- Publication number
- JPH0340534A JPH0340534A JP17477189A JP17477189A JPH0340534A JP H0340534 A JPH0340534 A JP H0340534A JP 17477189 A JP17477189 A JP 17477189A JP 17477189 A JP17477189 A JP 17477189A JP H0340534 A JPH0340534 A JP H0340534A
- Authority
- JP
- Japan
- Prior art keywords
- acoustic
- metal
- ultrasonic
- matching layer
- porous metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052751 metal Inorganic materials 0.000 claims abstract description 27
- 239000002184 metal Substances 0.000 claims abstract description 27
- 239000011148 porous material Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 abstract description 7
- 230000035945 sensitivity Effects 0.000 abstract description 7
- 229910052782 aluminium Inorganic materials 0.000 abstract description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 3
- 239000007788 liquid Substances 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 2
- 238000007711 solidification Methods 0.000 abstract description 2
- 230000008023 solidification Effects 0.000 abstract description 2
- 239000004411 aluminium Substances 0.000 abstract 1
- 238000005187 foaming Methods 0.000 abstract 1
- 208000013403 hyperactivity Diseases 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229920006254 polymer film Polymers 0.000 description 2
- 229920005597 polymer membrane Polymers 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012770 industrial material Substances 0.000 description 1
- 239000005001 laminate film Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Selective Calling Equipment (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野コ
本発明は、液体又は気体中で超音波の送受波を行なう超
音波送受波器の改良に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an improvement in an ultrasonic transducer that transmits and receives ultrasonic waves in liquid or gas.
［従来技術］
従来、超音波送受波装置は、カメラ等の距離計測又は位
置計測用センサ、・或いは超音波の送受信号動作を利用
した物体検知装置等のセンサとして盛んに利用され、稲
々実用化されている。[Prior Art] Conventionally, ultrasonic wave transmitting/receiving devices have been widely used as distance measurement or position measurement sensors such as cameras, or as sensors for object detection devices that utilize ultrasonic transmission/reception signal operation, and have been put into practical use. has been done.
超音波送受波装置は、振動子の超音波エネルギを高効率
で利用するために、振動子と空気や水等の振動伝搬媒体
とのインピーダンスのマツチングを取るための音響整合
層が該振動子の送受波面に設けられている。In order to utilize the ultrasonic energy of a transducer with high efficiency, an ultrasonic transducer is equipped with an acoustic matching layer of the transducer to match the impedance between the transducer and a vibration propagation medium such as air or water. It is provided on the transmitting and receiving wave surface.
この超音波送受波装置は、例えば特開昭６１−１６９１
００号公報明細書に記載されているように、ラミネート
膜を有する高分子多孔膜を音響整合層として有する構成
が知られている。This ultrasonic wave transmitter/receiver is disclosed in, for example, Japanese Patent Application Laid-open No. 61-1691.
As described in the specification of Japanese Patent No. 00, a structure in which a porous polymer membrane having a laminate membrane is used as an acoustic matching layer is known.
以下、第４図を参照しつつ従来の超音波送受波装置につ
いて説明する。Hereinafter, a conventional ultrasonic wave transmitting/receiving device will be explained with reference to FIG.
第４図において、１は厚み振動を行なう圧電振動子であ
り、該圧電振動子１の超音波放射面２には音響整合層と
して作用する高分子多孔膜３が接着されている。該高分
子多孔膜３の前記圧電振動子１側及びその反対側の表面
にはラミネート膜４及び５が形成されている。また、前
記圧電振動子１の他の一面には、バッキング材６が着設
されている。７は高分子多孔膜３に形成された気孔であ
る。In FIG. 4, reference numeral 1 denotes a piezoelectric vibrator that performs thickness vibration, and a porous polymer film 3 that acts as an acoustic matching layer is adhered to an ultrasonic emission surface 2 of the piezoelectric vibrator 1. Laminate films 4 and 5 are formed on the surface of the porous polymer film 3 on the piezoelectric vibrator 1 side and on the opposite side thereof. Further, a backing material 6 is provided on the other surface of the piezoelectric vibrator 1. Reference numeral 7 indicates pores formed in the porous polymer membrane 3.
以上のような構成において、前記超音波送受波装置を空
気中で用い超音波の送受波を行なう場合、前記圧電振動
子１と空気との間に設けられた前記高分子多孔８３によ
りインピーダンス整合が行なわれ、圧電振動子単体で用
いるのに比べ送受波感度の向上を計る事ができる。In the above configuration, when the ultrasonic wave transmitting/receiving device is used in the air to transmit and receive ultrasonic waves, impedance matching is achieved by the polymer holes 83 provided between the piezoelectric vibrator 1 and the air. This allows for improved wave transmission and reception sensitivity compared to using a piezoelectric vibrator alone.
［発明が解決しようとする課題］
上述の構成においては、音響整合層を形成する母材とし
ては、ポリオレフィル系多孔膜を用いている。[Problems to be Solved by the Invention] In the above-described configuration, a polyolefil-based porous film is used as the base material for forming the acoustic matching layer.
一般に超音波振動子は金属弾性体を用いて共振振動して
いるため、その内部損は非常に小さい。Generally, an ultrasonic vibrator uses an elastic metal body to vibrate resonantly, so its internal loss is extremely small.
しかしながら、上記多孔膜は金属に比べ減衰率がはるか
に大きいため、超音波送受波装置の送受波感度が低くな
るという問題を有していた。However, since the porous membrane has a much higher attenuation rate than metal, it has had the problem of lowering the wave transmitting and receiving sensitivity of the ultrasonic wave transmitting and receiving device.
本発明は、上述した問題点を解決するためになされたも
のであり、超音波送受波装置の音響整合層に内部損失の
小さい金属を母材とした多孔質金属を用いることにより
、該超音波送受波感度を向上する事をその目的としてい
る。The present invention has been made in order to solve the above-mentioned problems, and by using a porous metal whose base material is a metal with low internal loss for the acoustic matching layer of an ultrasonic wave transmitting/receiving device, the ultrasonic The purpose is to improve the transmitting and receiving sensitivity.
［課題を解決するための手段］
この目的を達成するために本発明の超音波送受波装置は
、音響負荷に超音波を送受波する振動子の一面に音響整
合層を備えた超音波送受波装置において、該音響整合層
として金属中に複数の空孔を有する多孔質金属を備えて
いる。[Means for Solving the Problems] In order to achieve this object, the ultrasonic wave transmitting/receiving device of the present invention has an ultrasonic wave transmitting/receiving device including an acoustic matching layer on one surface of a vibrator that transmits and receives ultrasonic waves to and from an acoustic load. The device includes a porous metal having a plurality of holes in the metal as the acoustic matching layer.
［作用」
上記の構成を有する本発明の超音波送受波装置は、上記
構成により超音波減衰の小さい音響整合層を実現する事
により、振動子と音響負荷として作用する空気や液体等
との間のインピーダンス整合を効率よく行なう。[Function] The ultrasonic wave transmitting/receiving device of the present invention having the above-mentioned configuration realizes an acoustic matching layer with low ultrasonic attenuation by the above-mentioned configuration, thereby reducing the distance between the transducer and air, liquid, etc. that acts as an acoustic load. Efficiently perform impedance matching.
その結果、該超音波送受波装置の送受波感度を向上する
ようにしたものである。As a result, the wave transmitting and receiving sensitivity of the ultrasonic wave transmitting and receiving device is improved.
［実施例］
以下、本発明を具体化した一実施例を図面を参照して説
明子る。[Example] Hereinafter, an example embodying the present invention will be explained with reference to the drawings.
第１図は本発明の第１の実施例における超音波送受波装
置１０である。本実施例において、圧電振動子１１は、
基台１２に着設されている。該圧電振動子の他の一面に
は、アルミニウムを母材とした多孔質金属より形成され
た音響整合層１３が着設されている。ここで音響負荷は
空気１４である。FIG. 1 shows an ultrasonic wave transmitting/receiving device 10 in a first embodiment of the present invention. In this embodiment, the piezoelectric vibrator 11 is
It is attached to a base 12. The other surface of the piezoelectric vibrator is provided with an acoustic matching layer 13 made of porous metal with aluminum as the base material. Here, the acoustic load is air 14.
本実施例で使用する多孔質金属は、例えば工業材料Ｖｏ
１．３０．Ｎ０ＩＯの“発泡金属”に見られるようなも
のである。これらは、金属溶融中に予め主としてＨ２又
はＮ２戊分から成るガスを溶解させておき、減圧凝固途
中で該ガスを金属中に気泡化させる溶解度差法等により
製作される。The porous metal used in this example is, for example, an industrial material Vo.
1.30. It is similar to that seen in N0IO's "foamed metal". These are manufactured by a solubility difference method, etc., in which a gas consisting mainly of H2 or N2 gas is dissolved in advance during metal melting, and the gas is bubbled into the metal during solidification under reduced pressure.
多孔質金属中の空孔径は１００Ａ〜数ｍｍ、又空孔の含
有率（以下多孔率と呼ぶ）は１０％程度から９８％まで
、広い範囲が得られている。依って、該多孔率を調節す
る事により、任意のインピーダンスを有する多孔質金属
を製作する事は容易である。上記音響整合層１３の厚さ
は、該音響整合層１３の厚さ方向に伝搬する超音波の波
長の大略１／４にとっである。そして、該音響整合層１
３の音響インピーダンス整合は前記振動子１１のインピ
ーダンスをＺ＋、音響負荷である空気１４のインピーダ
ンスを２２としたとき、以下の式で与えられる関係を満
たしている。The diameter of the pores in the porous metal ranges from 100A to several mm, and the content of pores (hereinafter referred to as porosity) ranges widely from about 10% to 98%. Therefore, by adjusting the porosity, it is easy to manufacture porous metals having arbitrary impedance. The thickness of the acoustic matching layer 13 is about 1/4 of the wavelength of the ultrasonic waves propagating in the thickness direction of the acoustic matching layer 13. Then, the acoustic matching layer 1
The acoustic impedance matching of No. 3 satisfies the relationship given by the following equation, where the impedance of the vibrator 11 is Z+ and the impedance of the air 14, which is the acoustic load, is 22.
Ｚ３−Ｊτ７フ１ゴ
上述の構成を取ることにより、前記振動子１１と音響負
荷の空気１４との間のインピーダンス整合が可能となる
。Z3-Jτ7 Figure By adopting the above-described configuration, impedance matching between the vibrator 11 and the air 14 serving as the acoustic load becomes possible.
又、前記音響整合層１３の多孔率を厚手方向に変化させ
る事により、更にインピーダンス整合を効率良く行なう
事ができる第２の実施例を第２図に示す。FIG. 2 shows a second embodiment in which impedance matching can be performed more efficiently by changing the porosity of the acoustic matching layer 13 in the thickness direction.
第２図において、第１図と同じ符号の付された各部材は
、前記詳述した各構成部材と同一である事を意味してい
る。In FIG. 2, each member with the same reference numeral as in FIG. 1 means the same as each component described in detail above.
音響整合層１３に用いられている多孔質金属は、その多
動率を厚さ方向で変化させる事により、厚さ方向のイン
ピーダンスを調節しである。該音響整合層１３において
、前記圧電振動子１１との接触部の音響インピーダンス
は、多動率を小さくして該圧電振動子１３のインピーダ
ンスと略同−となるようにし、一方前記音響負荷の空気
１４との接触部の音響インピーダンスは、多孔率を大き
くして該空気１４のインピーダンスと略同−となるよう
構成されている。The porous metal used in the acoustic matching layer 13 can adjust the impedance in the thickness direction by changing its hyperactivity in the thickness direction. In the acoustic matching layer 13, the acoustic impedance of the contact portion with the piezoelectric vibrator 11 is made to be approximately the same as the impedance of the piezoelectric vibrator 13 by reducing the hyperactivity rate, while the acoustic impedance of the acoustic load is The acoustic impedance of the contact portion with the air 14 is configured to be approximately the same as the impedance of the air 14 by increasing the porosity.
そして、該多動率を音響整合層１３の厚さ方向に対し、
連続的に変化させている。その関係を第３図に示す。Then, the hyperactivity rate is determined as follows in the thickness direction of the acoustic matching layer 13:
It is changing continuously. The relationship is shown in FIG.
上述の構成をとる事により、前記音響整合層１３におい
て、反射波の位相調節が行なわれるので、周波数帯域特
性を向上する事ができる。By adopting the above configuration, the phase of the reflected wave is adjusted in the acoustic matching layer 13, so that the frequency band characteristics can be improved.
更に、インピーダンスの異なる音響整合層１３をｔ１１
層して用いる事によっても、周波数帯域特性等を向上す
る事が可能である。Furthermore, the acoustic matching layer 13 with different impedance is placed at t11.
It is also possible to improve frequency band characteristics etc. by using layers.
尚、上記実施例において、多孔質金属の母材としてアル
ミニウムを使用したが、各種アルミニウム合金やニッケ
ル、銅等を用いる事も可能である。In the above embodiments, aluminum was used as the base material of the porous metal, but it is also possible to use various aluminum alloys, nickel, copper, etc.
更に、本実施例において、超音波振動子として圧電振動
子を用いたが、これに限定されるものではなく、電気エ
ネルギを機械エネルギに変換できるその他の素子、例え
ば電歪素子、磁歪素子等を用いてもよい。またその形状
も、平板状に限らず、種々の形状が考えられる。Furthermore, in this example, a piezoelectric vibrator was used as the ultrasonic vibrator, but the present invention is not limited to this, and other elements that can convert electrical energy into mechanical energy, such as an electrostrictive element, a magnetostrictive element, etc. May be used. Further, its shape is not limited to a flat plate shape, and various shapes can be considered.
その他、本発明の趣旨を逸脱しない範囲で種々の変形が
可能である。In addition, various modifications can be made without departing from the spirit of the present invention.
［発明の効果コ
以上詳述したたことから明らかにように、本発明によれ
ば、インピーダンス整合を効率良く行なう事によって、
超音波送受波装置の感度を向上することができる。[Effects of the Invention] As is clear from the detailed description above, according to the present invention, by efficiently performing impedance matching,
The sensitivity of the ultrasonic transceiver can be improved.
第１図から第４図までは本発明を具体化した実施例を示
すもので、第１図は、第１の実施例の超音波送受波装置
の側面図、第２図は第２の実施例の超音波送受波装置の
側面図、第３図は多孔質金属の多動率と厚さとの関係を
示す図、第４図は従来の超音波送受波装置の側面図であ
る。
図中、１０は超音波送受波装置、１１は圧電振動子、１
３は音響整合層、１４は空気である。1 to 4 show embodiments embodying the present invention, FIG. 1 is a side view of the ultrasonic wave transceiver device of the first embodiment, and FIG. 2 is a side view of the ultrasonic wave transmitting/receiving device of the first embodiment. FIG. 3 is a diagram showing the relationship between the hyperactivity rate and thickness of a porous metal, and FIG. 4 is a side view of a conventional ultrasonic transceiver. In the figure, 10 is an ultrasonic transceiver, 11 is a piezoelectric vibrator, 1
3 is an acoustic matching layer, and 14 is air.
Claims (1)
整合層を備えた超音波送受波装置において、 該音響整合層が、金属中に複数の空孔を有する多孔質金
属である事を特徴とする超音波送受波装置。 ２、請求項１記載の超音波送受波装置において、前記多
孔質金属の音響インピーダンスは、被整合体である前記
振動子及び音響負荷との接触部において、 前記空孔の含有率を調節する事により該各被整合体の音
響インピーダンスと大略同一となるよう構成されており
、 且つ、該多孔質金属中の音響インピーダンスは、前記各
接触部の間では前記振動子の音響インピーダンスから音
響負荷の音響インピーダンス値まで連続的に変化するよ
う構成した事を特徴とする超音波送受波装置。[Claims] 1. An ultrasonic wave transmitting/receiving device including an acoustic matching layer on one side of a vibrator that transmits and receives ultrasonic waves to and from an acoustic load, wherein the acoustic matching layer has a plurality of holes in metal. An ultrasonic transceiver device characterized by being made of porous metal. 2. In the ultrasonic wave transmitting/receiving device according to claim 1, the acoustic impedance of the porous metal is adjusted by adjusting the content rate of the pores at a contact portion with the vibrator, which is an object to be matched, and the acoustic load. The acoustic impedance of the porous metal is approximately the same as the acoustic impedance of each of the objects to be matched, and the acoustic impedance of the porous metal is calculated from the acoustic impedance of the vibrator to the acoustic load of the acoustic load between the contact parts. An ultrasonic wave transmitting/receiving device characterized by being configured so that the impedance value changes continuously.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17477189A JPH0340534A (en) | 1989-07-06 | 1989-07-06 | Ultrasonic transmitter and receiver |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17477189A JPH0340534A (en) | 1989-07-06 | 1989-07-06 | Ultrasonic transmitter and receiver |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0340534A true JPH0340534A (en) | 1991-02-21 |
Family
ID=15984384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17477189A Pending JPH0340534A (en) | 1989-07-06 | 1989-07-06 | Ultrasonic transmitter and receiver |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0340534A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003042400A (en) * | 2001-08-01 | 2003-02-13 | Sony Corp | Information transfer device |
| JP2008067304A (en) * | 2006-09-11 | 2008-03-21 | Aichi Tokei Denki Co Ltd | Ultrasonic sensor |
-
1989
- 1989-07-06 JP JP17477189A patent/JPH0340534A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003042400A (en) * | 2001-08-01 | 2003-02-13 | Sony Corp | Information transfer device |
| JP2008067304A (en) * | 2006-09-11 | 2008-03-21 | Aichi Tokei Denki Co Ltd | Ultrasonic sensor |
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