JPH0339241U - - Google Patents
Info
- Publication number
- JPH0339241U JPH0339241U JP10021789U JP10021789U JPH0339241U JP H0339241 U JPH0339241 U JP H0339241U JP 10021789 U JP10021789 U JP 10021789U JP 10021789 U JP10021789 U JP 10021789U JP H0339241 U JPH0339241 U JP H0339241U
- Authority
- JP
- Japan
- Prior art keywords
- filament
- slit
- ion source
- plasma generation
- generation container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図Ａはこの考案の一実施例に係るイオン源
を示す断面図であり、同図Ｂはビーム強度分布の
一例を示す図である。第２図Ａは従来のイオン源
の一例を示す断面図であり、同図Ｂはビーム強度
分布の一例を示す図である。
４……プラズマ生成容器、４１……スリツト、
６……フイラメント、６１……コイル状に巻いた
部分、１２……プラズマ、１４……イオンビーム
、２０……実施例に係るイオン源。
FIG. 1A is a sectional view showing an ion source according to an embodiment of this invention, and FIG. 1B is a diagram showing an example of beam intensity distribution. FIG. 2A is a sectional view showing an example of a conventional ion source, and FIG. 2B is a diagram showing an example of beam intensity distribution. 4... Plasma generation container, 41... Slit,
6... Filament, 61... Coiled portion, 12... Plasma, 14... Ion beam, 20... Ion source according to the example.
Claims (1)
ズマ生成容器内に、そのスリツトの長手方向に沿
つて直線状のフイラメントを配置した構造のイオ
ン源において、前記フイラメントのプラズラ生成
容器内における両端部近傍に、当該フイラメント
をコイル状に巻いた部分をそれぞれ設けたことを
特徴とするイオン源。 In an ion source having a structure in which a linear filament is arranged in a plasma generation container having a slit for extracting an ion beam, and a linear filament is arranged along the longitudinal direction of the slit, the filament is placed near both ends of the filament in the plasma generation container. An ion source characterized in that each part is provided with a coiled part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10021789U JPH0339241U (en) | 1989-08-28 | 1989-08-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10021789U JPH0339241U (en) | 1989-08-28 | 1989-08-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0339241U true JPH0339241U (en) | 1991-04-16 |
Family
ID=31649236
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10021789U Pending JPH0339241U (en) | 1989-08-28 | 1989-08-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0339241U (en) |
-
1989
- 1989-08-28 JP JP10021789U patent/JPH0339241U/ja active Pending