JPH0338923U - - Google Patents
Info
- Publication number
- JPH0338923U JPH0338923U JP9810489U JP9810489U JPH0338923U JP H0338923 U JPH0338923 U JP H0338923U JP 9810489 U JP9810489 U JP 9810489U JP 9810489 U JP9810489 U JP 9810489U JP H0338923 U JPH0338923 U JP H0338923U
- Authority
- JP
- Japan
- Prior art keywords
- crystal resonator
- resonator
- photolithography
- wafer
- holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims 2
- 238000000206 photolithography Methods 0.000 claims 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9810489U JPH0338923U (un) | 1989-08-23 | 1989-08-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9810489U JPH0338923U (un) | 1989-08-23 | 1989-08-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0338923U true JPH0338923U (un) | 1991-04-15 |
Family
ID=31647221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9810489U Pending JPH0338923U (un) | 1989-08-23 | 1989-08-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0338923U (un) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010175547A (ja) * | 2003-06-23 | 2010-08-12 | Seiko Epson Corp | 圧電振動片、圧電振動片の製造方法、圧電振動子および振動型ジャイロスコープ、圧電振動子および振動型ジャイロスコープの製造方法 |
| JP2015165619A (ja) * | 2014-03-03 | 2015-09-17 | 京セラクリスタルデバイス株式会社 | 水晶振動素子の中間生成品及びその製造方法 |
-
1989
- 1989-08-23 JP JP9810489U patent/JPH0338923U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010175547A (ja) * | 2003-06-23 | 2010-08-12 | Seiko Epson Corp | 圧電振動片、圧電振動片の製造方法、圧電振動子および振動型ジャイロスコープ、圧電振動子および振動型ジャイロスコープの製造方法 |
| JP2015165619A (ja) * | 2014-03-03 | 2015-09-17 | 京セラクリスタルデバイス株式会社 | 水晶振動素子の中間生成品及びその製造方法 |