JPH0338923U - - Google Patents
Info
- Publication number
- JPH0338923U JPH0338923U JP9810489U JP9810489U JPH0338923U JP H0338923 U JPH0338923 U JP H0338923U JP 9810489 U JP9810489 U JP 9810489U JP 9810489 U JP9810489 U JP 9810489U JP H0338923 U JPH0338923 U JP H0338923U
- Authority
- JP
- Japan
- Prior art keywords
- crystal resonator
- resonator
- photolithography
- wafer
- holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims 2
- 238000000206 photolithography Methods 0.000 claims 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
第１図は本考案の斜視図、第２図は本考案の作
用を示す斜視図である。第３図は従来の振動子が
連装された平面図、第４図は従来の応力集中の作
用を説明する斜視図、第５図は本考案の応力集中
を説明する斜視図である。
１……振動子、２……切り離し部、３……フレ
ーム、４……貫通穴。
FIG. 1 is a perspective view of the present invention, and FIG. 2 is a perspective view showing the operation of the present invention. FIG. 3 is a plan view of conventional vibrators connected in series, FIG. 4 is a perspective view illustrating the effect of conventional stress concentration, and FIG. 5 is a perspective view illustrating stress concentration according to the present invention. 1... Vibrator, 2... Separation part, 3... Frame, 4... Through hole.
Claims (1)
において、ウエハーと振動子の切り離し部分に、
一個又は複数個の貫通穴を設けたことを特徴とす
る水晶振動子。 In a crystal resonator formed by photolithography, at the part where the wafer and resonator are separated,
A crystal resonator characterized by having one or more through holes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9810489U JPH0338923U (en) | 1989-08-23 | 1989-08-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9810489U JPH0338923U (en) | 1989-08-23 | 1989-08-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0338923U true JPH0338923U (en) | 1991-04-15 |
Family
ID=31647221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9810489U Pending JPH0338923U (en) | 1989-08-23 | 1989-08-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0338923U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010175547A (en) * | 2003-06-23 | 2010-08-12 | Seiko Epson Corp | Piezoelectric vibrating piece, method of manufacturing the same, piezoelectric vibrator and vibrating gyro scope, and method of manufacturing the vibrator and the gyro scope |
| JP2015165619A (en) * | 2014-03-03 | 2015-09-17 | 京セラクリスタルデバイス株式会社 | Intermediate product of crystal vibration element and manufacturing method of the same |
-
1989
- 1989-08-23 JP JP9810489U patent/JPH0338923U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010175547A (en) * | 2003-06-23 | 2010-08-12 | Seiko Epson Corp | Piezoelectric vibrating piece, method of manufacturing the same, piezoelectric vibrator and vibrating gyro scope, and method of manufacturing the vibrator and the gyro scope |
| JP2015165619A (en) * | 2014-03-03 | 2015-09-17 | 京セラクリスタルデバイス株式会社 | Intermediate product of crystal vibration element and manufacturing method of the same |