JPH02126423U - - Google Patents
Info
- Publication number
- JPH02126423U JPH02126423U JP3361689U JP3361689U JPH02126423U JP H02126423 U JPH02126423 U JP H02126423U JP 3361689 U JP3361689 U JP 3361689U JP 3361689 U JP3361689 U JP 3361689U JP H02126423 U JPH02126423 U JP H02126423U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric vibrator
- piezoelectric
- wafer
- frame
- vibrator wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims 1
- 238000000206 photolithography Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 4
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
第１図Ａ，Ｂは本考案の圧電振動子ウエハの平
面図でＡはウエハ状態、Ｂは切離した状態を示す
。第２図Ａ，Ｂは従来の圧電振動子ウエハの平面
図でＡはウエハ状態、Ｂは切離した状態を示すも
のである。
１……フレーム、２……圧電振動子、３……接
続部分、４……クラツク。
1A and 1B are plan views of the piezoelectric vibrator wafer of the present invention, where A shows the wafer state and B shows the separated state. FIGS. 2A and 2B are plan views of conventional piezoelectric vibrator wafers, with A showing the wafer state and B showing the separated state. 1...Frame, 2...Piezoelectric vibrator, 3...Connection part, 4...Crack.
Claims (1)
個整列して連装された圧電振動子から成り、フオ
トリソグラフイー加工により成形される圧電振動
子ウエハにおいて、前記圧電振動子と前記フレー
ムを連結する前記連結部を、前記圧電振動子の中
心線から遠ざけた位置に設けたことを特徴とする
圧電振動子ウエハ。 In a piezoelectric vibrator wafer formed by photolithography processing, the piezoelectric vibrator wafer is formed by a plurality of piezoelectric vibrators arranged in a row and mounted in a frame in a thin crystal slope through connecting portions, and the connection connects the piezoelectric vibrators and the frame. A piezoelectric vibrator wafer, wherein the piezoelectric vibrator wafer is provided at a position away from a center line of the piezoelectric vibrator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3361689U JPH02126423U (en) | 1989-03-24 | 1989-03-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3361689U JPH02126423U (en) | 1989-03-24 | 1989-03-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02126423U true JPH02126423U (en) | 1990-10-18 |
Family
ID=31537414
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3361689U Pending JPH02126423U (en) | 1989-03-24 | 1989-03-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02126423U (en) |
-
1989
- 1989-03-24 JP JP3361689U patent/JPH02126423U/ja active Pending