JPH0338669Y2 - - Google Patents

Info

Publication number
JPH0338669Y2
JPH0338669Y2 JP1984027065U JP2706584U JPH0338669Y2 JP H0338669 Y2 JPH0338669 Y2 JP H0338669Y2 JP 1984027065 U JP1984027065 U JP 1984027065U JP 2706584 U JP2706584 U JP 2706584U JP H0338669 Y2 JPH0338669 Y2 JP H0338669Y2
Authority
JP
Japan
Prior art keywords
charged particle
particle analyzer
electrode
container
vacuum gauge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984027065U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60139241U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2706584U priority Critical patent/JPS60139241U/ja
Publication of JPS60139241U publication Critical patent/JPS60139241U/ja
Application granted granted Critical
Publication of JPH0338669Y2 publication Critical patent/JPH0338669Y2/ja
Granted legal-status Critical Current

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Landscapes

  • Measuring Fluid Pressure (AREA)
JP2706584U 1984-02-27 1984-02-27 荷電粒子分析器の電離真空計 Granted JPS60139241U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2706584U JPS60139241U (ja) 1984-02-27 1984-02-27 荷電粒子分析器の電離真空計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2706584U JPS60139241U (ja) 1984-02-27 1984-02-27 荷電粒子分析器の電離真空計

Publications (2)

Publication Number Publication Date
JPS60139241U JPS60139241U (ja) 1985-09-14
JPH0338669Y2 true JPH0338669Y2 (enrdf_load_html_response) 1991-08-15

Family

ID=30523665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2706584U Granted JPS60139241U (ja) 1984-02-27 1984-02-27 荷電粒子分析器の電離真空計

Country Status (1)

Country Link
JP (1) JPS60139241U (enrdf_load_html_response)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5252739B2 (ja) * 2006-12-06 2013-07-31 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング 真空圧力測定装置
JP5783866B2 (ja) * 2011-09-27 2015-09-24 株式会社アルバック 熱陰極電離真空計
CN114823273A (zh) * 2022-05-07 2022-07-29 合肥工业大学 可用于强磁场环境测量下限较低的高灵敏度热阴极电离规

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5255575A (en) * 1975-10-31 1977-05-07 Hitachi Ltd Vacuum degree measuring element for vacuum valve
JPS5258590A (en) * 1975-11-10 1977-05-14 Hitachi Ltd Ion number counter device

Also Published As

Publication number Publication date
JPS60139241U (ja) 1985-09-14

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