JPH0338637U - - Google Patents
Info
- Publication number
- JPH0338637U JPH0338637U JP9883589U JP9883589U JPH0338637U JP H0338637 U JPH0338637 U JP H0338637U JP 9883589 U JP9883589 U JP 9883589U JP 9883589 U JP9883589 U JP 9883589U JP H0338637 U JPH0338637 U JP H0338637U
- Authority
- JP
- Japan
- Prior art keywords
- suction
- semiconductor wafer
- airflow
- hole
- blowout hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9883589U JPH0338637U (de) | 1989-08-23 | 1989-08-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9883589U JPH0338637U (de) | 1989-08-23 | 1989-08-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0338637U true JPH0338637U (de) | 1991-04-15 |
Family
ID=31647914
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9883589U Pending JPH0338637U (de) | 1989-08-23 | 1989-08-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0338637U (de) |
-
1989
- 1989-08-23 JP JP9883589U patent/JPH0338637U/ja active Pending