JPH0337733B2 - - Google Patents

Info

Publication number
JPH0337733B2
JPH0337733B2 JP57023823A JP2382382A JPH0337733B2 JP H0337733 B2 JPH0337733 B2 JP H0337733B2 JP 57023823 A JP57023823 A JP 57023823A JP 2382382 A JP2382382 A JP 2382382A JP H0337733 B2 JPH0337733 B2 JP H0337733B2
Authority
JP
Japan
Prior art keywords
etching
chamber pressure
pressure
pressure value
end point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57023823A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58140127A (ja
Inventor
Hitoshi Kudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP57023823A priority Critical patent/JPS58140127A/ja
Publication of JPS58140127A publication Critical patent/JPS58140127A/ja
Publication of JPH0337733B2 publication Critical patent/JPH0337733B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Drying Of Semiconductors (AREA)
JP57023823A 1982-02-16 1982-02-16 ドライエツチング方法 Granted JPS58140127A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57023823A JPS58140127A (ja) 1982-02-16 1982-02-16 ドライエツチング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57023823A JPS58140127A (ja) 1982-02-16 1982-02-16 ドライエツチング方法

Publications (2)

Publication Number Publication Date
JPS58140127A JPS58140127A (ja) 1983-08-19
JPH0337733B2 true JPH0337733B2 (show.php) 1991-06-06

Family

ID=12121073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57023823A Granted JPS58140127A (ja) 1982-02-16 1982-02-16 ドライエツチング方法

Country Status (1)

Country Link
JP (1) JPS58140127A (show.php)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0722151B2 (ja) * 1984-05-23 1995-03-08 株式会社日立製作所 エツチングモニタ−方法
JP2892980B2 (ja) * 1995-12-18 1999-05-17 株式会社日立製作所 ドライプロセス処理方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56116532A (en) * 1980-02-15 1981-09-12 Stanley Electric Co Ltd Room-lamp controlling apparatus for cars

Also Published As

Publication number Publication date
JPS58140127A (ja) 1983-08-19

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